BT-CCD Camera C8000-30 Back-Thinned CCD Camera FEATURES High-sensitivity imaging from UV to nearinfrared wavelengths - UV: Quantum efficiency over 60 % (at 200 nm) - Near-infrared: Quantum efficiency over 90 % (at 650 nm) Quantum efficiency in UV source (reference data) (This is typical, not guaranteed.) F2 ArF KrF Fourth harmonic generation of a YAG laser i line Wavelength (nm) 157 193 248 266 365 Quantum efficiency (%) (typ.) 84 57 69 50 47 Light source light irradiation may cause a drop in sensitivity and increase the dark current of the * UV CCD sensor. Real time background subtraction Recursive filter (2, 4, 8, 16, 32 and 64 frames selectable) C8000-30 The C8000-30 employs an ultrahigh-sensitivity back-thinned CCD sensor made by Hamamatsu, which offers extremely high quantum efficiency in a wide range of UV, VIS and NIR wavelengths. The high UV sensitivity from 120 nm is useful for semiconductor mask inspection and measurement applications. Also, the high NIR sensitivity is useful for fluorescence measurement, NIR LD measurement and so on. SPECTRAL RESPONSE Quantum efficiency (%) 100 80 60 PRINCIPLE PRINCIPLE In a normal CCD with front-illuminated CCD structure, the light sensitive pixels have a charge transfer function as well, and this function requires the front surface of light sensitive pixels to be covered by a semi-transparent Poly-Si electrode for the charge transfer function. The Poly-Si electrode absorbs some percentage of incoming photons depending on their wavelength. Especially of of the UV light is not able to reach the light sensitive pixels. To overcome this disadvantage, in a back-thinned CCD, the CCD is turned upside down and this back side of the CCD is thinned to 10-15 μm in thickness. Incident photons now enter the CCD from the back-thinned side, without the Poly-Si electrode in the light path. Then QE values of greater than 90 % can be achieved. Normal CCD 40 20 0 Back-Thinned CCD (Front-Illuminated CCD) Light Light sensitive pixels e- 200 600 400 800 1000 Gate electrodes Light Light sensitive pixels 1200 e-e- Wavelength (nm) Gate electrodes * Without sapphire window. With the sapphire window, the spectral response is decreased due to the transmittance characteristics of the window. SYSTEM CONFIGURATION C8000-30 Lens AC ADAPTOR A3472-06 Computer frame grabber board Computer POWER HAMAMATSU A3472-06 Microscope Video camera microscope attachment Standard Options OPTIONS SYSTEM SPECIFICATIONS C8000-30 Type number Imaging device AC adaptor: A3472-06 Back-thinned frame transfer CCD Effective number of pixels 640 (H) 14 μm (H) Cell size Effective area 8.96 mm (H) 14 μm (V) 6.72 mm (V) 31.4 frames/s 1 1 2 2 58.3 frames/s 4 4 Readout noise (r.m.s.) (typ.) 101.8 frames/s Frame rate binning Power cable (5 m): A9071-05 480 (V) Approx. 100 electrons 30 000 electrons Full well capacity (typ.) Passive air-cooled Cooling method Cooling temperature + 5 ˚C (room temperature + 20 ˚C) A/D converter 12 bit Exposure time 30.8 ms to 1 s Analog gain Approx. 1 to 5 times (16 steps) Sub-array 8 pixels increments (V) External trigger mode Edge trigger, Level trigger, Start trigger, Synchronous readout trigger Image processing functions Background subtraction, Recursive filter Lens mount C-mount Interface Camera Link Base Configuration External control Camera Link Power requirements DC +12 V Approx. 10 V.A Power consumption Ambient storage temperature - 10 ˚C to + 50 ˚C Ambient operating temperature 0 ˚C to + 40 ˚C 70 % max. (with no condensation) Ambient storage/operating humidity *Calculated from the ratio of the full well capacity and the average readout noise. DIMENSIONAL OUTLINES (Unit: mm) Camera head (approx. 1.3 kg) AC adaptor A3472-06 (approx. 0.8 kg) (option) 1-32UN C-mount 82±1 3.3±2 140±1 2.36±0.5 BT-CCD CAMERA AC ADAPTOR A3472-06 C8000 59 82±1 41±0.5 ΠΟΩΕΡ 8±0.5 168 148 HAMAMATSU 67.7±1 4-M3 d=8 32±0.3 18±0.3 1/4-20UNC d=8 ★ Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers. ● ● Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult your local sales representative. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearance are subject to change without notice.. © 2010 Hamamatsu Photonics K.K. Homepage Address http://www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Systems Division 812 Joko-cho, Higashi-ku, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail:[email protected] U.S.A. and Canada: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1)908-231-0852, E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658,, E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10, E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire, AL7 1BW, U.K., Telephone: (44) 1707-294888, Fax: (44) 1707-325777, E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 Solna, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01, E-mail: [email protected] Cat. No. SCAS0009E01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1 int.6-20020 Arese (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741, E-mail: [email protected] JUN/2010 HPK Created in Japan