IMAGE SENSOR Profile sensor S9132 High-speed frame rate sensor capable of acquiring two-dimensional projection data The profile sensor S9132 is a high-performance CMOS area sensor particularly intended to acquire projection data. A projection profile in the X and Y directions has very small amounts of data compared to normal area sensors and therefore allows high-speed position detection and moving object detection. S9132 also has advantages over convensional 2D PSDs (Position Sensitive Detectors) that the output linearity is improved, multiple light spots can be detected and external circuits are simplified. A timing generator, bias voltage generator and 10-bit AD converter circuits are all integrated on the same chip, allowing operations with a very simple external driver circuit and external signal processing circuit. Features Applications l Sensor for acquiring 2D projection data l High-speed frame rate: 3200 frames/s Max. (8-bit) 1600 frames/s Max. (10-bit) l Low power consumption l Digital video output l 10-bit/8-bit switchable ADC l Light spot position detection (printers, FA inspection equipment, amusement machines) l Moving object detection (FA inspection equipment, amusement machines) l 3D measurement (FA inspection equipment, medical measurement) Y-DIRECTION PROJECTION DATA DO (Y) ■ Conceptual view of light spot detection LIGHT SPOT X-DIRECTION PROJECTION DATA DO (X) KMPDC0168EA ■ Absolute maximum ratings Parameter Analog supply voltage Digital supply voltage Gain selection terminal voltage AD mode selection voltage Clock pulse voltage Start pulse voltage Operating temperature *1 Storage temperature *1: No condensation Symbol Vdd (A) Vdd (D) Vg Vsel V (CLK) V (ST) Topr Tstg Value -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -0.3 to +6 -5 to +65 -10 to +85 Unit V V V V V V °C °C ■ Shape specifications Parameter Number of pixels Pixel pitch Active area Package Package size Value 256 × 256 7.8 1.9968 × 1.9968 20-pin LCC package 7.6 × 7.6 Unit µm mm mm 1 Profile sensor S9132 ■ Recommended terminal voltage Parameter Analog supply voltage Digital supply voltage *2 Gain selection terminal voltage AD mode selection voltage Symbol Vdd (A) Vdd (D) Min. Typ. Max. Unit 4.75 5 5.25 V 3 5 Vdd (A) V High gain 0 0.4 Vg V Low gain Vdd (A) -0.25 Vdd (A) Vdd (A) +0.25 10-bit MODE Vdd (A) -0.25 Vdd (A) Vdd (A) +0.25 Vsel V 8-bit MODE 0 0.4 High level Vdd (D) -0.25 Vdd (D) Vdd (D) +0.25 Clock pulse voltage V (CLK) V Low level 0 0.4 High level Vdd (D) -0.25 Vdd (D) Vdd (D) +0.25 Start pulse voltage V (ST) V Low level 0 0.4 *2: When the latter-stage digital processing circuit is a 3.3 V family, the high level of digital output signal is 3.3 V when operated at Vdd (A)=5 V, Vdd (D)=3.3 V. ■ Electrical characteristics (Ta=25 °C) Parameter Symbol Min. Typ. 500 Clock pulse frequency *3 f (CLK) 500 Start pulse intervals T (ST) 3101/f (CLK) Video data rate VR f (CLK)/12 High level VDO (H) Vdd (D)-0.15 Digital output voltage Low level VDO (L) CL=10 pF Digital output rise time tr (10 to 90 %)*4 CL=30 pF CL=10 pF Digital output fall time tf (10 to 90 %)*4 CL=30 pF Power consumption *5 P 75 *3: Vdd (A)=Vdd (D)=5 V, V (CLK)=V (ST)=5 V, Vg=5 V (Low gain) *4: CL: Load capacitance of digital output terminal *5: Vdd (A)=Vdd (D)=5 V, V (CLK)=V (ST)=V (ST)=5 V, f (CLK)=5 MHz, f (ST)=1.5 kHz 10-bit MODE 8-bit MODE Max. 5M 10 M 0.15 30 60 30 60 - Unit Hz s Hz V ns ns mW ■ Electrical and optical characteristics [Ta=25 °C, Vdd (A)=Vdd (D)=5 V, V (CLK)=V (ST)=5 V] Parameter Symbol Min. Typ. Spectral response range 380 to 1000 λ Peak sensitivity wavelength 500 λp High gain 40 Photo sensitivity *6 RES Low gain 8 Dark current ID 0.2 Saturation charge Qsat 8 High gain 0.2 Feedback capacitance Cf of charge amplifier *7 Low gain 1 High gain 100 Dark output voltage *8 Vd Low gain 20 High gain 2.5 3.5 Saturation output Vsat voltage Low gain 2.5 3 Photo response non-uniformity *9 PRNU *6: Vg=5 V (Low gain), Vg=0 V (High gain) *7: λ=780 nm *8: Storage time Ts=100 ms *9: Uniformity is defined under the condition that the device is uniformly illuminated by light which is exposure level and using 254 pixels excluding both ends pixels as follows: PRNU=∆V/V × 100 (%) X: the average output of all pixels, ∆X: the difference from the maximum or minimum output and X 2 Max. 0.6 300 60 ±10 Unit nm nm V/nJ pA pC pF mV V % 50 % of the saturation Profile sensor S9132 ■ Spectral response (typical example) (Ta=25 ˚C) RELATIVE SENSITIVITY (%) 100 80 60 40 20 0 200 300 400 500 600 700 800 900 1000 1100 1200 WAVELENGTH (nm) KMPDB0231EA ■ A/D converter characteristics (Ta=25 °C) Parameter Digital output format Resolution *10 Symbol 10-bit MODE 8-bit MODE RESO Conversion time tCON Frame readout time FR Conversion voltage range *11 *10: Vsel=5 V (10-bit mode), Vsel=0 V (8-bit mode) *11: Digital output is available from MSB as serial output. 10-bit mode: D9 to D0 8-bit mode: D7 to D0 Value Serial output 10 8 12/f (CLK) 3100/f (CLK) 0 to 3.8 Unit bit s/ch s/f V ■ Timing chart tr (CLK) tf (CLK) CLK tpw (CLK) tf (ST) tr (ST) ST DO TRIG KMPDC0177EA Parameter Symbol Min. Typ. Max. Unit Clock pulse width tpw (CLK) 40 ns Clock pulse rise and fall time tr (CLK), tf (CLK) 0 20 30 ns Start pulse width tpw (ST) 90 ns Start pulse rise and fall time tr (ST), tr (ST) 0 20 30 ns NOTE) Operation in the X and Y directions can be performed independently. The internal timing circuit starts operating at the fall timing of the clock pulse immediately after the start pulse goes "low". It doesn’t matter how many times the clock pulse goes “low” during the "Low" period of the start pulse. The storage time is determined by the start pulse intervals. However, scince the charge storage of each pixel is carried out between the signal readout of that pixel and the next signal readout of the same pixel, the start time of charge storage differs depending on each pixel. In addition, the next start pulse cannot be input until signal readout from all pixels is completed. 3 Profile sensor 8-bit mode ● In the neighborhood of start pixel 012345 CLK ST D7 - (1 ch) - D0 D7 - (2 ch) - D0 D7 - (3 ch) - D0 27.5 39.5 51.5 DO 34.5 46.5 58.5 TRIG 26 37 38 49 50 61 62 EOC 0 EOS ● In the neighborhood of last pixel CLK ST D7 - (253 ch) - D0 D7 - (254 ch) - D0 D7 - (255 ch) - D0 D7 - (256 ch) - D0 DO 3051.5 3058.5 3063.5 3070.5 3075.5 3082.5 3087.5 3050 3061 3062 3073 3074 3085 3086 3094.5 TRIG 3097 EOC 3099 EOS KMPDC0173EA 10-bit mode ● In the neighborhood of start pixel 012345 CLK ST D9 - (1 ch) - D0 D9 - (2 ch) - D0 D9 - (3 ch) - D0 DO 27.5 36.5 39.5 48.5 51.5 60.5 TRIG 26 37 38 49 50 61 62 EOC 0 EOS ● In the neighborhood of last pixel CLK ST D9 - (253 ch) - D0 D9 - (254 ch) - D0 D9 - (255 ch) - D0 D9 - (256 ch) - D0 DO 3051.5 3060.5 3063.5 3072.5 3075.5 3084.5 3087.5 3096.5 TRIG 3050 3061 3062 3073 3074 3085 3086 3097 EOC 3099 EOS KMPDC0174EA 4 S9132 Profile sensor S9132 ■ Block diagram Vg (Y) X-scanning direction SHIFT REGISTER (Y) ACTIVE AREA Y-scanning direction CDS CHARGE AMP TIMING GENERATOR TIMING GENERATOR DO (Y) Vsel (Y) Trig (Y) CLK (Y) ST (Y) Vg (X) CDS SHIFT REGISTER (X) A/D CONVERTER BUFFER AMP CHARGE AMP A/D CONVERTER BUFFER AMP DO (X) Vsel (X) Trig (X) CLK (X) ST (X) EOS (X) EOC (X) Vdd (A) Vdd (D) Vss (A) Vss (D) KMPDC0175EA ■ Connection examples EOS (X) Vg (Y)…0 or 5 V Vg (X)…0 or 5 V EOC (X) Vsel (X)…5 or 0 V 74HC164 Vsel (Y)…5 or 0 V CLK DO (X) ST : FORWARD BUFFER (e.g.) 74HC541 A, B CLK CLR CLK (X) Trig (X) CLK (Y) C8225-01/-02 (PULSE GENERATOR) DIGITAL I/O BOARD Vdd (D) ST (Y) 74HC164 DO (Y) : REVERSE BUFFER (e.g.) 74HC540 A, B CLK CLR Trig (Y) Vdd (D) Vdd (A) Vdd (D) Vss (A) D8 D9 A, B CLK CLR S9132 ST (X) 74HC164 D0 D1 D2 D3 D4 D5 D6 D7 Vss (D) 74HC164 D0 D1 D2 D3 D4 D5 D6 D7 D8 D9 A, B CLK CLR KMPDC0176EB 5 Profile sensor ■ Dimensional outline (unit: mm) ■ Pin connection o7.60 ± 0.2 o7.20 ± 0.1 Pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 ACTIVE AREA 2.00 1.00 ± 0.15 15 11 16 10 20 6 1.10 ± 0.2 ACTIVE AREA 1.40 ± 0.14 5 0.55 ± 0.05 1 1.77 1 INDEX MARK 5 1.48 4.06 ± 0.13 1.016 ± 0.08 20 6 16 10 15 11 0.508 ± 0.08 S9132 Symbol Vsel (X) Vg (X) ST (X) CLK (X) EOS (X) CLK (Y) ST (Y) Vdd (A) Vg (Y) Vsel (Y) Vss (A) Vss (D) Trig (Y) DO (Y) Vdd (D) NC DO (X) Trig (X) EOC (X) Vss (A) I/O I I I I O I I I I I I I O O I O O O I Function AD mode selection voltage Gain selection voltage Start pulse Clock pulse End of scan pulse Clock pulse Start pulse Analog supply voltage Gain selection voltage AD mode selection voltage Analog ground Digital ground Trigger pulse Digital output Digital supply voltage No connection Digital output Trigger pulse End of conversion pulse Analog ground 1.016 KMPDA0174EA Profile sensor mounted on terminal pitch conversion board S9132-01 S9132-01 is a profile sensor mounted on a terminal pitch conversion board having 1-inch (2.54 mm) pitch output terminals. ■ Dimensional outline (unit: mm) (4 ×) 30.0 1.7 2.5 20.0 2.7 MAX. 1.4 PHOTOSENSITIVE SURFACE 45.0 7.6 20.0 2.0 15.0 0.9 (32 ×) 0.8 30.0 7.6 2 20 1 19 ACTIVE AREA Y-DIRECTION 2.54 22.86 2.0 P2.54 × 9 = 22.86 X-DIRECTION KMPDA0180EA Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2004 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, http://www.hamamatsu.com U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 6 Cat. No. KMPD1075E05 Dec. 2004 DN