Freescale Semiconductor Technical Data MPXC2011DT1 Rev. 3, 10/2004 High Volume Sensor for Low Pressure Applications MPXC2011DT1 MPXC2012DT1 Freescale Semiconductor has developed a low cost, high volume, miniature pressure sensor package which is ideal as a sub--module component or a disposable unit. The unique concept of the Chip Pak allows great flexibility in system design while allowing an economic solution for the designer. This new chip carrier package uses Freescale Semiconductor’s unique sensor die with its piezoresistive technology, along with the added feature of on--chip, thin--film temperature compensation and calibration. NOTE: Freescale Semiconductor is also offering the Chip Pak package in application--specific configurations, which will have an “SPX” prefix, followed by a four--digit number, unique to the specific customer. Freescale Semiconductor Preferred Device PRESSURE SENSORS 0 to 75 mmHg (0 to 10 kPa) Features: • Low Cost CHIP PAK PACKAGE • Integrated Temperature Compensation and Calibration • Ratiometric to Supply Voltage • Polysulfone Case Material (Medical, Class V Approved) • Provided in Easy--to--Use Tape and Reel Application Examples MPXC2011DT1/MPXC2012DT1 CASE 423A • Respiratory Diagnostics • Air Movement Control • Controllers PIN NUMBER • Pressure Switching NOTE: The die and wire bonds are exposed on the front side of the Chip Pak (pressure is applied to the backside of the device). Front side die and wire protection must be provided in the customer’s housing. Use caution when handling the devices during all processes. Freescale Semiconductor ’s MPXC2011DT1/ MPXC2012DT1 Pressure Sensor has been designed for medical usage by combining the performance of Freescale Semiconductor’s shear stress pressure sensor design and the use of biomedically approved materials. Materials with a proven history in medical situations have been chosen to provide a sensor that can be used with confidence in applications, such as invasive blood pressure monitoring. It can be sterilized using ethylene oxide. The portions of the pressure sensor that are required to be biomedically approved are the rigid housing and the gel coating. The rigid housing is molded from a white, medical grade polysulfone that has passed extensive biological testing including: tissue culture test, rabbit implant, hemolysis, intracutaneous test in rabbits, and system toxicity, USP. 1 Gnd 3 VS 2 S+ 4 S-- The MPXC2011DT1 contains a silicone dielectric gel which covers the silicon piezoresistive sensing element. The gel is a nontoxic, nonallergenic elastomer system which meets all USP XX Biological Testing Class V requirements. The properties of the gel allow it to transmit pressure uniformly to the diaphragm surface, while isolating the internal electrical connections from the corrosive effects of fluids, such as saline solution. The gel provides electrical isolation sufficient to withstand defibrillation testing, as specified in the proposed Association for the Advancement of Medical Instrumentation (AAMI) Standard for blood pressure transducers. A biomedically approved opaque filler in the gel prevents bright operating room lights from affecting the performance of the sensor. The MPXC2012DT1 is a no--gel option. Preferred devices are Freescale Semiconductor recommended choices for future use and best overall value. © Freescale Semiconductor, Inc., 2004. All rights reserved. Sensor Device Data Freescale Semiconductor MPXC2011DT1 MPXC2012DT1 1 MAXIMUM RATINGS(NOTE) Rating Symbol Value Unit Maximum Pressure (Backside) Pmax 75 kPa Storage Temperature Tstg --25 to +85 °C Operating Temperature TA +15 to +40 °C NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Symbol Min Typ Max Unit POP 0 — 10 kPa VS — 3 10 Vdc Io — 6.0 — mAdc VFSS 24 25 26 mV Voff --1.0 — 1.0 mV Sensitivity ∆V/∆P — 2.5 — mV/kPa Linearity(5) — --1.0 — 1.0 %VFSS — — ±0.1 — %VFSS — — ±0.1 — %VFSS TCVFSS --1.0 — 1.0 %VFSS TCVoff --1.0 — 1.0 mV Input Impedance Zin 1300 — 2550 Ω Output Impedance Zout 1400 — 3000 Ω tR — 1.0 — ms — — 20 — ms — — ±0.5 — %VFSS Pressure Supply Range(1) Voltage(2) Supply Current Full Scale Span(3) Offset(4) Pressure Hysteresis(5) Temperature (0 to 10 kPa) Hysteresis(5) (+15°C to +40°C) Temperature Effect on Full Scale Temperature Effect on Offset(5) Response Time(6) (10% to 90%) Warm--Up Offset Stability(7) Span(5) NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self--heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPXC2011DT1 MPXC2012DT1 2 Sensor Device Data Freescale Semiconductor ORDERING INFORMATION The MPXC2011DT1/MPXC2012DT1 silicon pressure sensors are available in tape and reel. Device Type/Order No. Case No. Device Description Marking MPXC2011DT1 423A Chip Pak, 1/3 Gel Date Code, Lot ID MPXC2012DT1 423A Chip Pak, No Gel Date Code, Lot ID Packaging Information Tape and Reel Reel Size Tape Width Quantity 330 mm 24 mm 1000 pc/reel PACKAGE DIMENSIONS A M C L F N 1 2 3 4 B V K DETAIL A --T-- D1 G J H FRONT VIEW E END VIEW AC NOTES: 8. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 9. CONTROLLING DIMENSION: INCH. F AA AB AD D2 DETAIL A BACK VIEW DIM A B C D1 D2 E F G H J K L M N V AA AB AC AD INCHES MIN MAX 0.240 0.260 0.350 0.370 0.140 0.150 0.012 0.020 0.014 0.022 0.088 0.102 0.123 0.128 0.045 0.055 0.037 0.047 0.007 0.011 0.120 0.140 0.095 0.105 0.165 0.175 0.223 0.239 0.105 0.115 0.095 0.107 0.015 0.035 0.120 0.175 0.100 0.115 MILLIMETERS MIN MAX 6.10 6.60 8.89 9.40 3.56 3.81 0.30 0.51 0.36 0.56 2.24 2.59 3.12 3.25 1.14 1.40 0.94 1.19 0.18 0.28 3.05 3.56 2.41 2.67 4.19 4.45 5.66 6.07 2.67 2.92 2.41 2.72 0.38 0.89 3.05 4.45 2.54 2.92 CASE 423A--03 ISSUE C MPXC2011DT1 MPXC2012DT1 Sensor Device Data Freescale Semiconductor 3 How to Reach Us: Home Page: www.freescale.com E--mail: [email protected] USA/Europe or Locations Not Listed: Freescale Semiconductor Technical Information Center, CH370 1300 N. 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Freescalet and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2004. All rights reserved. MPXC2011DT1 Rev. 3 10/2004 MPXC2011DT1 MPXC2012DT1 4 Sensor Device Data Freescale Semiconductor