Freescale Semiconductor Technical Data Document Number: MRFE6S9201H Rev. 1, 12/2008 RF Power Field Effect Transistors N - Channel Enhancement - Mode Lateral MOSFETs MRFE6S9201HR3 MRFE6S9201HSR3 Designed for broadband commercial and industrial applications with frequencies up to 1000 MHz. The high gain and broadband performance of these devices make them ideal for large - signal, common - source amplifier applications in 28 volt base station equipment. • Typical Single - Carrier N - CDMA Performance: VDD = 28 Volts, IDQ = 1400 mA, Pout = 40 Watts Avg., f = 880 MHz, IS - 95 CDMA (Pilot, Sync, Paging, Traffic Codes 8 Through 13). Channel Bandwidth = 1.2288 MHz, PAR = 9.8 dB @ 0.01% Probability on CCDF. Power Gain — 20.8 dB Drain Efficiency — 31.3% Device Output Signal PAR — 8.1 dB @ 0.01% Probability on CCDF ACPR @ 750 kHz Offset — - 46.5 dBc in 30 kHz Channel Bandwidth • Capable of Handling 10:1 VSWR, @ 32 Vdc, 880 MHz, Pout = 270 W CW (2 dB Input Overdrive from Rated Pout), Designed for Enhanced Ruggedness Features • 100% PAR Tested for Guaranteed Output Power Capability • Characterized with Series Equivalent Large - Signal Impedance Parameters • Internally Matched for Ease of Use • Greater Negative Gate - Source Voltage Range for Improved Class C Operation • Qualified Up to a Maximum of 32 VDD Operation • Integrated ESD Protection • RoHS Compliant • In Tape and Reel. R3 Suffix = 250 Units per 56 mm, 13 inch Reel. 880 MHz, 40 W AVG., 28 V SINGLE N - CDMA LATERAL N - CHANNEL RF POWER MOSFETs CASE 465 - 06, STYLE 1 NI - 780 MRFE6S9201HR3 CASE 465A - 06, STYLE 1 NI - 780S MRFE6S9201HSR3 Table 1. Maximum Ratings Symbol Value Unit Drain - Source Voltage Rating VDSS - 0.5, +66 Vdc Gate - Source Voltage VGS - 6.0, +10 Vdc Storage Temperature Range Tstg - 65 to +150 °C TC 150 °C TJ 225 °C Symbol Value (2,3) Unit Case Operating Temperature Operating Junction Temperature (1,2) Table 2. Thermal Characteristics Characteristic Thermal Resistance, Junction to Case Case Temperature 85°C, 197 W CW Case Temperature 75°C, 40 W CW RθJC 0.34 0.33 °C/W 1. Continuous use at maximum temperature will affect MTTF. 2. MTTF calculator available at http://www.freescale.com/rf. Select Software & Tools/Development Tools/Calculators to access MTTF calculators by product. 3. Refer to AN1955, Thermal Measurement Methodology of RF Power Amplifiers. Go to http://www.freescale.com/rf. Select Documentation/Application Notes - AN1955. © Freescale Semiconductor, Inc., 2007-2008. All rights reserved. RF Device Data Freescale Semiconductor MRFE6S9201HR3 MRFE6S9201HSR3 1 Table 3. ESD Protection Characteristics Test Methodology Class Human Body Model (per JESD22 - A114) 1B (Minimum) Machine Model (per EIA/JESD22 - A115) A (Minimum) Charge Device Model (per JESD22 - C101) IV (Minimum) Table 4. Electrical Characteristics (TC = 25°C unless otherwise noted) Characteristic Symbol Min Typ Max Unit Zero Gate Voltage Drain Leakage Current (VDS = 66 Vdc, VGS = 0 Vdc) IDSS — — 10 μAdc Zero Gate Voltage Drain Leakage Current (VDS = 28 Vdc, VGS = 0 Vdc) IDSS — — 1 μAdc Gate - Source Leakage Current (VGS = 5 Vdc, VDS = 0 Vdc) IGSS — — 10 μAdc Gate Threshold Voltage (VDS = 10 Vdc, ID = 400 μAdc) VGS(th) 1.5 2.2 3 Vdc Gate Quiescent Voltage (VDD = 28 Vdc, ID = 1400 mAdc, Measured in Functional Test) VGS(Q) 2.25 2.9 3.75 Vdc Drain - Source On - Voltage (VGS = 10 Vdc, ID = 4.11 Adc) VDS(on) 0.1 0.21 0.35 Vdc Reverse Transfer Capacitance (VDS = 28 Vdc ± 30 mV(rms)ac @ 1 MHz, VGS = 0 Vdc) Crss — 2.3 — pF Output Capacitance (VDS = 28 Vdc ± 30 mV(rms)ac @ 1 MHz, VGS = 0 Vdc) Coss — 90 — pF Input Capacitance (VDS = 28 Vdc, VGS = 0 Vdc ± 30 mV(rms)ac @ 1 MHz) Ciss — 480 — pF Off Characteristics On Characteristics Dynamic Characteristics (1) Functional Tests (In Freescale Test Fixture, 50 ohm system) VDD = 28 Vdc, IDQ = 1400 mA, Pout = 40 W Avg. N - CDMA, f = 880 MHz, Single - Carrier N - CDMA, 1.2288 MHz Channel Bandwidth Carrier. ACPR measured in 30 kHz Channel Bandwidth @ ±750 kHz Offset. PAR = 9.8 dB @ 0.01% Probability on CCDF. Power Gain Gps 19.5 20.8 22.5 dB Drain Efficiency ηD 29 31.3 — % PAR 7.7 8.1 — dB ACPR — - 46.5 - 45 dBc IRL — - 16 -9 dB Output Peak - to - Average Ratio @ 0.01% Probability on CCDF Adjacent Channel Power Ratio Input Return Loss 1. Part is internally matched on input. (continued) MRFE6S9201HR3 MRFE6S9201HSR3 2 RF Device Data Freescale Semiconductor Table 4. Electrical Characteristics (TC = 25°C unless otherwise noted) (continued) Characteristic Symbol Min Typ Max Unit Typical Performances (In Freescale Test Fixture, 50 ohm system) VDD = 28 Vdc, IDQ = 1400 mA, 865 - 900 MHz Bandwidth Video Bandwidth @ 200 W PEP Pout where IM3 = - 30 dBc (Tone Spacing from 100 kHz to VBW) ΔIMD3 = IMD3 @ VBW frequency - IMD3 @ 100 kHz <1 dBc (both sidebands) VBW MHz — 10 — Gain Flatness in 35 MHz Bandwidth @ Pout = 40 W Avg. GF — 0.19 — dB Average Deviation from Linear Phase in 35 MHz Bandwidth @ Pout = 200 W CW Φ — 0.461 — ° Delay — 11.66 — ns Part - to - Part Insertion Phase Variation @ Pout = 200 W CW, f = 880 MHz, Six Sigma Window ΔΦ — 14.97 — ° Gain Variation over Temperature ( - 30°C to +85°C) ΔG — 0.011 — dB/°C ΔP1dB — 0.39 — dBm/°C Average Group Delay @ Pout = 200 W CW, f = 880 MHz Output Power Variation over Temperature ( - 30°C to +85°C) MRFE6S9201HR3 MRFE6S9201HSR3 RF Device Data Freescale Semiconductor 3 B1 VBIAS + R4 C2 C4 R1 RF INPUT C8 Z1 Z2 Z3 Z4 Z6 Z5 Z7 Z8 Z9 C1 C43 C6 C7 C9 R2 B2 + R3 C3 C20 C5 C29 C31 C30 C28 C27 VSUPPLY + + C42 C26 Z10 C10 Z12 C40 Z13 Z14 Z15 C12 Z16 C13 Z17 C16 Z18 Z19 C18 C21 Z20 Z21 C22 Z22 Z23 Z24 Z25 Z26 RF OUTPUT C39 C11 C41 Z11 C15 C14 C17 C19 C23 C24 C25 C32 C38 DUT C44 Z1 Z2 Z3 Z4 Z5 Z6 Z7 Z8 Z9 0.227″ 0.938″ 0.492″ 0.046″ 0.094″ 0.141″ 0.076″ 0.023″ 0.170″ x 0.065” Microstrip x 0.065” Microstrip x 0.065” Microstrip x 0.300″ Microstrip x 0.300″ Microstrip x 0.546″ x 0.300″ Taper x 0.734″ x 0.546″ Taper x 0.780″ x 0.734″ Taper x 0.780″ Microstrip Z10, Z11 Z12 Z13 Z14 Z15 Z16 Z17 Z18 C46 C37 0.853″ 0.084″ 0.086″ 0.035″ 0.093″ 0.131″ 0.047″ 0.054″ C36 x 0.100″ x 0.780″ x 0.780″ x 0.780″ x 0.709″ x 0.499″ x 0.365″ x 0.365″ C35 C34 + + C33 C45 Microstrip Microstrip Microstrip x 0.709″ Taper x 0.499″ Taper x 0.286″ Taper Microstrip Microstrip Z19 Z20 Z21, Z22 Z23 Z24 Z25 Z26 PCB 0.020″ x 0.365″ Microstrip 0.097″ x 0.065″ Microstrip 0.050″ x 0.065″ Microstrip 0.305″ x 0.065″ Microstrip 0.456″ x 0.065″ Microstrip 0.357″ x 0.065″ Microstrip 0.340″ x 0.065″ Microstrip Taconic RF - 35, 0.030″, εr = 3.5 Figure 1. MRFE6S9201HR3(HSR3) Test Circuit Schematic MRFE6S9201HR3 MRFE6S9201HSR3 4 RF Device Data Freescale Semiconductor Table 5. MRFE6S9201HR3(HSR3) Test Circuit Component Designations and Values Part Description Part Number Manufacturer B1, B2 Short RF Beads 2743019447ROP50 Fair - Rite C1, C4, C5, C20, C39, C44 33 pF Chip Capacitors ATC100B330JT500XT ATC C2, C3 10 μF, 50 V Tantalum Capacitors T491C106K050AT Kemet C6, C32, C38, C43 0.6 - 4.5 pF Variable Capacitors, Gigatrim 27271SL Johanson C7, C12, C13, C14, C15, C16, C17, C25 3.3 pF Chip Capacitors ATC600F3R3BT250XT ATC C8, C9 4.7 pF Chip Capacitors ATC600F4R7BT250XT ATC C10, C11 15 pF Chip Capacitors ATC100B6R8JT500XT ATC C18, C19, C21, C22, C23, C24 1.0 pF Chip Capacitors ATC600F1R0BT250XT ATC C26, C45 470 μF, 63 V Electrolytic Capacitors EKMG630ELL331MJ20S United Chemi - Con C27, C34 1.2K pF Chip Capacitors ATC100B1R2BT500XT ATC C28, C35 20K pF Chip Capacitors ATC200B203MT50XT ATC C29, C31, C37, C46 10 μF, 50 V Chip Capacitors GRM55DR61H106KA88B Murata C30, C36 0.047 pF, 50 V Chip Capacitors C1825C473J5RAC Kemet C33, C42 22 μF, 50 V Tantalum Capacitors T491C226K050AT Kemet C40, C41 5.6 pF Chip Capacitors ATC600F5R6BT250XT ATC R1, R2 12 Ω, 1/4 W Chip Resistors CRCW120612R0FKEA Vishay R3, R4 1 KΩ, 1/4 W Chip Resistors CRCW12061001FKEA Vishay C27 R4 B1 C28 C30 C31 C26 C2 C4 C42 C10 R1 C29 C40 C16 C18 C1 C6 C5 C43 C9 R2 CUT OUT AREA C7 C13 C21 C14 C23 C15 C32 C24 C38 C41 C17 C19 C46 C44 C11 C3 C39 C22 C25 C12 C8 C20 C33 MRFE6S9201H/HS Rev. 0 R3 C37 B2 C34 C35 C36 C45 Figure 2. MRFE6S9201HR3(HSR3) Test Circuit Component Layout MRFE6S9201HR3 MRFE6S9201HSR3 RF Device Data Freescale Semiconductor 5 TYPICAL CHARACTERISTICS 35 30 ηD 25 19 VDD = 28 Vdc, Pout = 40 W (Avg.) IDQ = 1400 mA, N−CDMA IS−95 Pilot Sync, Paging, Traffic Codes 8 Through 13 18 17 −45 16 ACPR 15 −50 IRL 14 13 12 800 20 −40 −55 −60 ALT1 820 840 860 880 900 920 940 −65 960 0 −5 −10 −15 −20 −25 IRL, INPUT RETURN LOSS (dB) 20 ηD, DRAIN EFFICIENCY (%) 21 Gps, POWER GAIN (dB) 40 Gps ACPR (dBc), ALT1 (dBc) 22 f, FREQUENCY (MHz) Figure 3. Single - Carrier N - CDMA Broadband Performance @ Pout = 40 Watts Avg. 40 30 Gps, POWER GAIN (dB) 20 19 Gps 18 17 ACPR 16 15 VDD = 28 Vdc, Pout = 84 W (Avg.) IDQ = 1400 mA, N−CDMA IS−95 Pilot Sync, Paging, Traffic Codes 8 Through 13 20 −30 −35 −40 IRL −45 14 −50 13 −55 12 800 ALT1 820 840 860 880 900 920 940 −60 960 0 −5 −10 −15 −20 −25 IRL, INPUT RETURN LOSS (dB) 21 ηD, DRAIN EFFICIENCY (%) 50 ηD ACPR (dBc), ALT1 (dBc) 22 f, FREQUENCY (MHz) Figure 4. Single - Carrier N - CDMA Broadband Performance @ Pout = 84 Watts Avg. 23 IMD, THIRD ORDER INTERMODULATION DISTORTION (dBc) −10 IDQ = 2100 mA Gps, POWER GAIN (dB) 22 1750 mA 21 1400 mA 20 1050 mA 19 700 mA VDD = 28 Vdc, f1 = 880 MHz, f2 = 880.1 MHz Two−Tone Measurements 18 VDD = 28 Vdc, f1 = 880 MHz, f2 = 880.1 MHz Two−Tone Measurements −20 IDQ = 700 mA −30 −40 1050 mA −50 1750 mA 1400 mA 2100 mA −60 −70 1 10 100 400 1 10 100 400 Pout, OUTPUT POWER (WATTS) PEP Pout, OUTPUT POWER (WATTS) PEP Figure 5. Two - Tone Power Gain versus Output Power Figure 6. Third Order Intermodulation Distortion versus Output Power MRFE6S9201HR3 MRFE6S9201HSR3 6 RF Device Data Freescale Semiconductor 0 IMD, INTERMODULATION DISTORTION (dBc) IMD, INTERMODULATION DISTORTION (dBc) TYPICAL CHARACTERISTICS VDD = 28 Vdc, IDQ = 1400 mA f1 = 880 MHz, f2 = 880.1 MHz Two−Tone Measurements −20 −40 3rd Order −60 −80 5th Order 7th Order −100 1 10 −10 −20 IM3−U −30 IM3−L IM5−U −40 IM5−L −50 IM7−U IM7−L −60 1 400 100 VDD = 28 Vdc, Pout = 200 W (PEP), IDQ = 1400 mA Two−Tone Measurements (f1 + f2)/2 = Center Frequency of 880 MHz 10 100 Pout, OUTPUT POWER (WATTS) PEP TWO−TONE SPACING (MHz) Figure 7. Intermodulation Distortion Products versus Output Power Figure 8. Intermodulation Distortion Products versus Tone Spacing Pout, OUTPUT POWER (dBm) 63 P6dB = 54.86 dBm (306.2 W) 62 61 60 Ideal P3dB = 54.18 dBm (261.82 W) 59 58 57 56 P1dB = 53.21 dBm (209.41 W) Actual 55 54 53 52 51 VDD = 28 Vdc, IDQ = 1400 mA, Pulsed CW 12 μsec(on), 1% Duty Cycle, f = 880 MHz 29 30 31 32 33 34 35 36 37 38 39 40 Pin, INPUT POWER (dBm) 70 VDD = 28 Vdc, IDQ = 1400 mA 60 f = 880 MHz, N−CDMA IS−95 (Pilot Sync, Paging, Traffic Codes 8 50 Through 13) 40 85_C −20 25_C −30 −30_C −40 −50 ACPR 25_C 85_C 30 Gps −60 TC = −30_C 20 −70 85_C ALT1 10 25_C ηD 0 1 10 100 −80 −90 300 ACPR, ADJACENT CHANNEL POWER RATIO (dBc) ALT1, CHANNEL POWER (dBc) ηD, DRAIN EFFICIENCY (%), Gps, POWER GAIN (dB) Figure 9. Pulsed CW Output Power versus Input Power Pout, OUTPUT POWER (WATTS) AVG. Figure 10. Single - Carrier N - CDMA ACPR, ALT1, Power Gain and Drain Efficiency versus Output Power MRFE6S9201HR3 MRFE6S9201HSR3 RF Device Data Freescale Semiconductor 7 TYPICAL CHARACTERISTICS 23 85_C 50 85_C 40 19 30 18 20 VDD = 28 Vdc IDQ = 1400 mA f = 880 MHz ηD 17 10 21 20 19 10 28 V VDD = 24 V 16 1 Gps, POWER GAIN (dB) 25_C 21 20 IDQ = 1400 mA f = 880 MHz 25_C 60 ηD, DRAIN EFFICIENCY (%) Gps, POWER GAIN (dB) TC = −30_C Gps 22 22 70 −30_C 0 400 100 32 V 18 50 0 100 150 200 250 300 Pout, OUTPUT POWER (WATTS) CW Pout, OUTPUT POWER (WATTS) CW Figure 11. Power Gain and Drain Efficiency versus CW Output Power Figure 12. Power Gain versus Output Power 350 MTTF (HOURS) 108 107 106 105 90 110 130 150 170 190 210 230 250 TJ, JUNCTION TEMPERATURE (°C) This above graph displays calculated MTTF in hours when the device is operated at VDD = 28 Vdc, Pout = 40 W Avg., and ηD = 31.3%. MTTF calculator available at http://www.freescale.com/rf. Select Software & Tools/Development Tools/Calculators to access MTTF calculators by product. Figure 13. MTTF versus Junction Temperature MRFE6S9201HR3 MRFE6S9201HSR3 8 RF Device Data Freescale Semiconductor N - CDMA TEST SIGNAL 100 −10 −20 10 1 −40 −50 0.1 IS−95 CDMA (Pilot, Sync, Paging, Traffic Codes 8 Through 13) 1.2288 MHz Channel Bandwidth Carriers. ACPR Measured in 30 kHz Bandwidth @ ±750 kHz Offset. ALT1 Measured in 30 kHz Bandwidth @ ±1.98 MHz Offset. PAR = 9.8 dB @ 0.01% Probability on CCDF. 0.01 0.001 (dB) PROBABILITY (%) −30 −60 −70 −80 −90 0.0001 0 2 4 6 8 10 1.2288 MHz Channel BW .......................................... .................. . . . . ... .. .. ... .. .. . .. .. .. ... −ALT1 in 30 kHz +ALT1 in 30 kHz .. .. Integrated BW Integrated BW . . . . . . ... . .. . ... . . . ........... . . . . . . . . . . ..... ... ................. .......... ...... . . ... . ............. .................. ........ ... .......... ...... ... ........... ...... . . . ................ . . . . . . .......... . ... . . ............ −ACPR in 30 kHz +ACPR in 30 kHz ................... ..... .... . . . . ... .. ............ . . . ...... . . . . . . ....... .............. . ... Integrated BW Integrated BW .. ........ ........... ................. ...... ..... ...... ... −100 PEAK−TO−AVERAGE (dB) Figure 14. Single - Carrier CCDF N - CDMA −110 −3.6 −2.9 −2.2 −1.5 −0.7 0 0.7 1.5 2.2 2.9 3.6 f, FREQUENCY (MHz) Figure 15. Single - Carrier N - CDMA Spectrum MRFE6S9201HR3 MRFE6S9201HSR3 RF Device Data Freescale Semiconductor 9 Zo = 5 Ω Zload f = 820 MHz f = 980 MHz Zsource f = 820 MHz f = 980 MHz VDD = 28 Vdc, IDQ = 1400 mA, Pout = 40 W Avg. f MHz Zsource W Zload W 820 3.28 - j3.94 0.78 + j0.24 840 3.12 - j3.93 0.81 + j0.36 860 2.85 - j3.73 0.83 + j0.51 880 2.58 - j3.39 0.82 + j0.70 900 2.44 - j2.98 0.83 + j0.98 920 2.43 - j2.87 1.02 + j1.60 940 2.31 - j2.66 4.12 + j1.11 960 2.17 - j2.54 1.49 - j0.66 980 1.91 - j2.39 0.90 - j0.26 Zsource = Test circuit impedance as measured from gate to ground. Zload = Test circuit impedance as measured from drain to ground. Output Matching Network Device Under Test Input Matching Network Z source Z load Figure 16. Series Equivalent Source and Load Impedance MRFE6S9201HR3 MRFE6S9201HSR3 10 RF Device Data Freescale Semiconductor PACKAGE DIMENSIONS B G Q bbb 2X 1 T A M M B M NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M−1994. 2. CONTROLLING DIMENSION: INCH. 3. DELETED 4. DIMENSION H IS MEASURED 0.030 (0.762) AWAY FROM PACKAGE BODY. 3 B K 2 (FLANGE) D bbb M T A B M M M bbb N R (INSULATOR) M T A M B M ccc M T A M M aaa M T A M ccc H B S (LID) M T A M B (LID) M (INSULATOR) B M C F E T A A SEATING PLANE DIM A B C D E F G H K M N Q R S aaa bbb ccc INCHES MIN MAX 1.335 1.345 0.380 0.390 0.125 0.170 0.495 0.505 0.035 0.045 0.003 0.006 1.100 BSC 0.057 0.067 0.170 0.210 0.774 0.786 0.772 0.788 .118 .138 0.365 0.375 0.365 0.375 0.005 REF 0.010 REF 0.015 REF MILLIMETERS MIN MAX 33.91 34.16 9.65 9.91 3.18 4.32 12.57 12.83 0.89 1.14 0.08 0.15 27.94 BSC 1.45 1.70 4.32 5.33 19.66 19.96 19.60 20.00 3.00 3.51 9.27 9.53 9.27 9.52 0.127 REF 0.254 REF 0.381 REF STYLE 1: PIN 1. DRAIN 2. GATE 3. SOURCE (FLANGE) CASE 465 - 06 ISSUE G NI - 780 MRFE6S9201HR3 4X U (FLANGE) 4X Z (LID) B 1 K 2X 2 B (FLANGE) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M−1994. 2. CONTROLLING DIMENSION: INCH. 3. DELETED 4. DIMENSION H IS MEASURED 0.030 (0.762) AWAY FROM PACKAGE BODY. D bbb M T A M B M N ccc M R (LID) M T A M B M ccc M T A M M B M aaa M T A M S (INSULATOR) bbb M T A (LID) B M (INSULATOR) B M H C 3 E A A F T SEATING PLANE (FLANGE) CASE 465A - 06 ISSUE H NI - 780S MRFE6S9201HSR3 DIM A B C D E F H K M N R S U Z aaa bbb ccc INCHES MIN MAX 0.805 0.815 0.380 0.390 0.125 0.170 0.495 0.505 0.035 0.045 0.003 0.006 0.057 0.067 0.170 0.210 0.774 0.786 0.772 0.788 0.365 0.375 0.365 0.375 −−− 0.040 −−− 0.030 0.005 REF 0.010 REF 0.015 REF MILLIMETERS MIN MAX 20.45 20.70 9.65 9.91 3.18 4.32 12.57 12.83 0.89 1.14 0.08 0.15 1.45 1.70 4.32 5.33 19.61 20.02 19.61 20.02 9.27 9.53 9.27 9.52 −−− 1.02 −−− 0.76 0.127 REF 0.254 REF 0.381 REF STYLE 1: PIN 1. DRAIN 2. GATE 5. SOURCE MRFE6S9201HR3 MRFE6S9201HSR3 RF Device Data Freescale Semiconductor 11 PRODUCT DOCUMENTATION Refer to the following documents to aid your design process. Application Notes • AN1955: Thermal Measurement Methodology of RF Power Amplifiers Engineering Bulletins • EB212: Using Data Sheet Impedances for RF LDMOS Devices REVISION HISTORY The following table summarizes revisions to this document. Revision Date Description 0 Sept. 2007 • Initial Release of Data Sheet 1 Dec. 2008 • Updated Typical Performance Full Frequency Band to f = 880 MHz to match production test, p. 1 • Updated Part Numbers in Table 5, Component Designations and Values, to latest RoHS compliant part numbers, p. 5 MRFE6S9201HR3 MRFE6S9201HSR3 12 RF Device Data Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. 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Freescalet and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007-2008. All rights reserved. MRFE6S9201HR3 MRFE6S9201HSR3 Document RF DeviceNumber: Data MRFE6S9201H Rev. 1, 12/2008 Freescale Semiconductor 13