D6F-A7D/-AB71D MEMS Flow Sensor Digital Compensation for High Accuracy • Temperature compensation and linear compensation produce high accuracy (±3% RD (25% to 100% FS)). • Compact models for 10 to 70 L/min. • Reduced piping work with quick-fastening feature. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Characteristics MEMS Flow Sensor D6F-10A7D-000-0 Quick joint P10 Air Quick joint P14 Flow rate range Model 0 to 10 L/min D6F-10A7D-000-0 0 to 20 L/min D6F-20A7D-000-0 0 to 50 L/min D6F-50A7D-000-0 0 to 70 L/min D6F-70AB71D-000-0 70000 60000 60000 50000 40000 30000 20000 10000 0 Quick fastener D6F-FASTENER-P10 Connections Connector 30000 20000 10 0 5 10 15 20 Flow rate (L/min) D6F-70AB71D-000-0 50000 60000 50000 40000 30000 20000 40000 30000 20000 10000 0 10 20 30 40 0 50 10 20 30 40 50 60 70 Flow rate (L/min) Flow rate (L/min) D6F-10A7D-000-0 Use the following connectors for connections to the D6F: Housing GHR-04V-S (made by J.S.T. Mfg. Co.) Terminals SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.) Wires AWG26 to AWG30 3: SCL 8 70000 0 1: Vcc 2: SDA 3: SCL 4: GND GHR-04V-S (made by J.S.T. Mfg. Co.) 4: GND 6 10000 0 D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 D6F-70AB71D-000-0 Pin No. 4 Output (Count) D6F-CABLE3 2 D6F-50A7D-000-0 Model Cable 40000 Flow rate (L/min) Output (Count) Type 50000 10000 0 0 Accessories (Sold separately) D6F-20A7D-000-0 70000 Output (Count) Applicable fluid Output (Count) Joint 2: SDA 1: Vcc Flow rate L/min (normal) 0 2 4 6 8 10 Output voltage (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 10 D6F-20A7D-000-0 Flow rate L/min (normal) 0 4 8 12 16 20 Output voltage (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 20 D6F-50A7D-000-0 Enlarged View Flow rate L/min (normal) 0 10 20 30 40 50 Output voltage (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 50 D6F-70AB71D-000-0 Flow rate L/min (normal) 0 20 40 60 70 Output voltage (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 43024 (A810) Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5 C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 100 20 D6F-A7D/-AB71D MEMS Flow Sensor Characteristics/Performance Model D6F-10A7D-000-0 Flow Range (See note 1.) 0 to 10L/min D6F-20A7D-000-0 0 to 20 L/min D6F-50A7D-000-0 0 to 50 L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P10 Electrical Connection Four-pin connector Power Supply 3.0 to 3.6 VDC Current Consumption 10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25°C Quick joint P14 Resolution 15 bit Accuracy (See note 3.) ±5%RD (10%F.S. ≤ Flow rate < 25%F.S.) ±3%RD (25%F.S. ≤ Flow rate ≤ 100%F.S.) Response time 90 ms max. Repeatability (See note 4.) 0.3 %RD Interface (See note 5.) I2C 0.3%RD Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 100 kPa Pressure Drop (See note 4.) 0.034 kPa Operating Temperature (See note 6.) –10 to +60°C Operating Humidity (See note 6.) 35 to 85%RH Storage Temperature (See note 6.) –30 to +80°C D6F-70AB71D-000-0 0 to 70 L/min 0.083 kPa ±5%RD (10L/min ≤ Flow rate < 20L/min) ±3%RD (20L/min ≤ Flow rate ≤ 70L/min) 0.5%RD 1.3%RD 0.28 kPa 0.57 kPa Storage Humidity (See note 6.) 35 to 85%RH Insulation Resistance Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 57.3 g Note: 1. Note: 2. Note: 3. Note: 4. Note: 5. Note: 6. Note: 7. 64.4 g Volumetric flow rate at 0°C, 101.3 kPa. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) -10 ≤ Operating Temperature ≤ 60 C Reference (typical) Refer to the D6F-@@@@D-000-@ Application Notes for details. With no condensation or icing. The following custom options are available. Ask your OMRON representative for details. - Temperature measurement - Address settings (up to four addresses) - Fault detection - Threshold setting Communication Serial Interface Master/Slave Speed mode I2C Slave / Address: HEX : 0x6C BIN : 110_1100 (7bit) Fast Mode 400kHz Signal SCL Serial Clock SDA Data Signal 21 D6F-A7D/-AB71D MEMS Flow Sensor Dimensions (Unit: mm) ● MEMS Flow Sensors D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 Lot No. Display A A (4.4) 84.6±0.5 (60.6) (66.6) (34.9) B B (7.9) 30° 20±0.5 dia. Note 1. Note . The Port type of pipe fitting based on “Quick Joint P10 Type”. * P10 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P10 of JIS B 2406. 30±0.5 17±0.5 dia. +0.1 13 -0.05 dia. 3±0.15 6 0.9±0.5 Note C0.5 (circumference) R2 (circumference) Note 2. Use the following connectors to connect to the Sensor. Connector :GHR-04V-S (JST) Terminals :SSHL-002T-P0.2 (JST) Wires :AWG26 to AWG30 Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND 30±0.5 C0.5 (circumference) CROSS A-A (B-B) D6F-70AB71D-000-0 Lot No. Display 20.5±0.2 A 2-2.6 dia. Depth 6.5 A 20.5±0.2 25.8±0.2 (4.4) 84.6±0.5 (64.5) (66.6) (60.6) 25.8±0.2 Two, 4±0.1 dia. 30.9±0.5 (34.8) Recommended Installation Dimensions from back side (See note 2.) B B 30° 26±0.5 dia. 30±0.5 22±0.5 dia. +0.1 18 -0.05dia. 3±0.15 Note 1. The Port type of pipe fitting based on “Quick Joint P14 Type”. * P14 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P14 of JIS B 2406. (7.9) 0.9±0.5 Note 1 C0.5 (circumference) 32±0.5 30±0.5 R2 (circumference) C0.5 (circumference) 6 CROSS A-A (B-B) ● Cable (Sold separately) D6F-CABLE3 Blue wire 15±3 (5) Note 3. Use the following connectors to connect to the Sensor. Connector :GHR-04V-S (JST) Terminals :SSHL-002T-P0.2 (JST) Wires :AWG26 to AWG30 Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND ● Quick fastener (Sold separately) D6F-FASTENER-P10 Black wire Red wire 660±10 Note 2. To mount the Sensor with 2.6-dia. holes, use P-type self-tapping screws with a nominal diameter of 3 mm and tighten them to a torque of 1.2 N·m max. The screw threads must engage for 5.5 mm min. Return direction 1. Vcc 2. SDA 3. SCL 4. GND 16.5±2 11.5±1 Rolling direction 3.3 1 Yellow wire 4-R1.5 2-R2 730±10 750±35 R8.5 R8.5 14 1 11 2-R2 8-R2.5 “10” is engraved here. 6±0.15 3 12±0.15 22 8±0.3 3±0.15 15±1 2-R1 t=0.8±0.04