D6F-PH MEMS Differential pressure Sensor A Compact, High-accuracy Differential Pressure Sensor with Superior Resistance to Environments. • High accuracy of ±3% RD • Linearized and temperature compensated • Digital output (I2C communication) • High flow impedance to reduce the influence of bypass configuration RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Applicable fluid (See note 1.) Measurement range (See note 3.) Air (See note 2.) Model 0 to 250 Pa (0 to 1 in. H2O) D6F-PH0025AD1 -50 to +50 Pa (±0.2 in. H2O) D6F-PH0505AD3 -500 to +500 Pa (±2 in. H2O) D6F-PH5050AD3 Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative. Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist. Note: 3. At standard atmospheric pressure (1013.25 hPa) Output Characteristics D6F-PH0505AD3 70000 70000 60000 60000 Output (count) Output (count) D6F-PH0025AD1 50000 40000 30000 20000 10000 0 0 50 100 150 200 50000 40000 30000 20000 10000 0 -50 250 -30 Differential pressure (Pa) -10 10 30 50 Differential pressure (Pa) Differential pressure (Pa) 0 50 100 150 200 250 Differential pressure (Pa) Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Output (HEX) Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 250 Dp = Differential pressure, Op = Output -50 -30 -10 0 10 30 50 1024 13024 25024 31024 37024 49024 61024 (0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60) Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 100 - 50 Dp = Differential pressure, Op = Output D6F-PH5050AD3 70000 Output (count) 60000 50000 40000 30000 20000 10000 0 -500 -300 -100 100 300 500 Differential pressure (Pa) Differential pressure (Pa) Output (HEX) -500 -300 -100 0 100 300 500 1024 13024 25024 31024 37024 49024 61024 (0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60) Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%. Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 1000 - 500 Dp = Differential pressure, Op = Output 28 Note. Change of gas density affects the sensor output. Change of atmospheric pressure is compensated by the following formula. Dpeff = Dp × (Pstd / Pamb) Dpeff: Effective differential pressure Dp: Differential pressure of the sensor output Pstd: Standard atmospheric pressure (1013.25 hPa) Pamb: Actual ambient atmospheric pressure (hPa) D6F-PH MEMS Differential pressure Sensor Characteristics/Performance Model D6F-PH0025AD1 Differential pressure range (See note 1) 0 to 250 Pa D6F-PH0505AD3 ±50 Pa D6F-PH5050AD3 ±500 Pa Calibration Gas (See note 2.) Air Port Type Bamboo joint, Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm Power Supply 2.3 to 3.6 VDC Current Consumption 6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25°C Resolution 12 bit Zero point tolerance (See note 4.) ±0.2 Pa Span tolerance (See note 4.) ±3% RD Span shift due to temperature variation < 0.5% RD per 10°C 33 ms typical at 12 bit resolution (50 ms max.) Response time The processing time is 6 ms typical at 12 bit resolution. Gas flow through sensor (See note 3.) 63 mL/min Interface I2C Case material PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 10 kPa Operating temperature (See note 5.) -20 to +80°C Operating humidity (See note 5.) 35 to 85 %RH Storage temperature (See note 5.) -40 to +80°C 23 mL/min Storage humidity (See note 5.) 35 to 85 %RH Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) 100 mL/min Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.2 g Note: 1. At standard atmospheric pressure (1013.25 hPa) Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist. Note: 3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow by differential pressure is below. Note: 4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation. Note: 5. With no condensation or icing. Note: 6. Please call us about functions, such as fault detection, temperature check, Vdd check, threshold value setup. Relation between pressure and flow rate Flow rate (mL/min) 60 40 20 0 -20 -40 0 -500 -300 -100 100 300 500 Differential pressure (Pa) 29 D6F-PH MEMS Differential pressure Sensor Connections/Dimensions (Unit: mm) 3.1 1.2 4:SCL 3:VCC 7.2 2:GND 1:SDA Mounting Direction Install the Sensor so that the joints are facing upward. 22 Two, 4 dia. 12 10.5 6.5 Recommendation size for pin header installation (tolerrances: ±0.1) Two, 4.9 dia Two, 4 dia. Two, through hole 2.2 dia 4 16.5 Two, through hole 2 dia. 10 5 Two, R2 3.37 Pin Header 3.7 Four, 0.48 dia. Three, 2 5.25 Four, through hole 0.8 dia. Three, 2 18 7.05 High pressure side 26 20 16.5 10 Low pressure side Two, through hole 2 dia Electrical connection Vcc pull-up resister 2.2 kΩ SDA GND Sensor (slave) Vcc 3.3 V Master SCL pull-up resister 2.2 kΩ Vcc Communication Serial Interface Master/Slave Speed mode I2C Slave / Address: Fast Mode 400kHz Signal 30 SCL Serial Clock SDA Data Signal HEX : 0x6C BIN : 110_1100 (7bit) Tubes Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 6 mm and an inner diameter of 4 mm are recommended. Soldering Conditions Use a soldering iron for 5 s at 350°C with a pressure of 100 gf max.