CCD Linear Image Sensor MN3674 Color CCD Linear Image Sensor with 512 Pixels for R and B Colors/1024 Pixels for G Color ■ Overview The MN3674 is a high responsivity CCD color linear image sensor with 512 pixels each for R and B and 1024 G pixels, and having low dark output floating photodiodes in the photodetector region and CCD analog shift registers for read out. It can read a 64mm-width color document with a high quality and a maximum pseudo resolution of 400dpi. In addition to being used as a color sensor, this device can also be used as a black and white sensor if only the G row is used, and in this case, it is possible to read a 64mm-width document with a full resolution of 400dpi. Since a one line delay analog memory is built in so as to compensate for the difference in the positions of reading out between the R, B rows and the G row, the configuration of the signal processing circuit becomes simpler. ■ Pin Assignments 1 NC NC OS1 DS1 VSS øR ø1 ø SG1 VSS VSS NC 1 2 3 4 5 6 7 8 9 10 11 22 21 20 19 18 17 16 15 14 13 12 ■ Features 1024 • 2048 floating photodiodes and n-channel buried type CCD shift registers for read out are integrated in a single chip. • RGB primary colors type on chip color filters are used for color separation. • In order to compensate for the distance between the photodiode rows for the R, B colors and the G color, the device has a built in analog memory that can store the signals of one line of the R-B colors row. • All clock inputs can be driven by 5V CMOS logic. • Use of photodiodes with a new structure has made the dark output voltage very low. • Large signal output of typically 0.8V at saturation can be obtained. ■ Application • Color graphic read out in color image scanners, color fax machines, etc. (Top View) C26 WDIP022-G-0470B NC NC OS 2 DS 2 VDD NC ø2 ø SG2 øV NC NC MN3674 CCD Linear Image Sensor ■ Block Diagram OS2 20 DS 2 19 VDD ø2 ø SG2 øV 18 16 15 14 1 12 1212 121212121212 121212121 1-line delay analog memory B2 B4 B1 B3 3 R1 B1 R2 B31 D1 D3 G1 G2 G3 R B 512 512 G G 1023 1024 12 1212 1 B1 to B32 : Black reference pixels D1 to D8 : Dummy invalid pixels D OS1 B32 D2 D4 121212121212 D6 D8 D5 D7 121212121 6 7 DS1 VSS ø R ø1 4 5 8 9 10 VSS VSS ø SG1 ■ Absolute Maximum Ratings (Ta=25˚C, VSS=0V) Parameter Power supply voltage Input pulse voltage Symbol Rating Unit VDD – 0.3 to + 15 – 0.3 to + 15 V Operating temperature range VI Topr Storage temperature range Tstg 0 to + 60 V ˚C –2 5 to + 85 ˚C ■ Operating Conditions • Voltage conditions (Ta=0 to + 60˚C, VSS=0V) Parameter Power supply voltage Symbol VDD CCD shift register clock High level Vø H CCD shift register clock Low level Vø L Vertical transfer clock High level VVH Vertical transfer clock Low level VVL Shift gate clock High level VSH Shift gate clock Low level VSL Reset gate clock High level VRH Reset gate clock Low level VRL Condition (ø1, ø2) (øV) (øSG1, øSG2) (øR) min typ max Unit 11.4 4.5 12.0 5.0 13.0 VDD V 0 0.2 0.5 4.5 5.0 VDD 0 4.5 0.2 5.0 0.5 VDD V V V V V 0 0.2 5.0 0.5 VDD V 4.5 0 0.2 0.5 V V MN3674 CCD Linear Image Sensor • Timing conditions (without 1-line delay operation) (Ta=0 to + 60˚C) min typ max Unit fC See drive timing diagram (3) fC=1/2T 0.1 1.0 3.0 MHz Reset clock frequency (=data rate) fR See drive timing diagram (3) fR=1/2T 0.1 1.0 3.0 MHz Shift register clock rise time t Cr Shift register clock fall time t Cf 0 0 20 20 50 50 ns ns 0 0 15 15 50 50 ns Parameter Shift register clock frequency Symbol Condition See drive timing diagram (3) Vertical transfer clock rise time t Vr Vertical transfer clock fall time t Vf Vertical transfer clock pulse width t VW 5 10 50 µs Shift clock 1 rise time Shift clock 1 fall time t SG1r 0 15 50 ns t SG1f 0 15 50 ns ø SG1 and øV should be the same timing. See drive timing diagram (1) See drive timing diagram (1) ns Shift clock 1 set up time t SG1s t SG1w 0.5 5 1.0 10 2.0 50 µs Shift clock 1 pulse width Shift clock 2 rise time t SG2r 0 15 50 Shift clock 2 fall time t SG2f 0 15 50 ns ns 1.0 2.0 µs 50 2 µs µs 20 µs Shift clock 2 set up time t SG2s Shift clock 2 pulse width t SG2w Shift clock 2 hold time t SG2h 0.5 5 0 Reset clock rise time t Rr 0 10 1 10 Reset clock fall time t Rf 0 10 20 ns ns See drive timing diagram (1) Reset clock set up time t Rs 0.7T — — ns Reset clock pulse width t Rw 100 200 — ns Reset clock hold time t Rh 10 125 — ns See drive timing diagram (3) • Timing conditions (during 1-line delay operation) (Ta=0 to + 60˚C) min typ max Unit Shift register clock frequency fC See drive timing diagram (3) fC=1/2T 0.1 1.0 3.0 MHz Reset clock frequency (=data rate) fR See drive timing diagram (3) fR=1/2T 0.1 1.0 3.0 MHz Shift register clock rise time t Cr Shift register clock fall time t Cf 0 0 20 20 50 50 ns ns 0 0 15 15 50 50 ns 0.5 1.0 2.0 µs 5 10 50 µs Parameter Symbol Condition See drive timing diagram (3) Vertical transfer clock rise time t Vr Vertical transfer clock fall time t Vf Vertical transfer clock set up time t Vs Vertical transfer clock pulse width t Vw Vertical transfer clock hold time t Vh 0 1 2 µs Shift clock 1 rise time Shift clock 1 fall time t SG1r 15 15 50 50 ns t SG1f 0 0 Shift clock 1 pulse width t SG1w 5 10 50 µs Shift clock 2 rise time t SG2r 0 15 50 ns Shift clock 2 fall time t SG2f Shift clock 2 pulse width t SG2w 15 1.0 10 ns Shift clock 2 set up time 0 0.5 5 50 t SG2s 2.0 50 µs µs Reset clock rise time t Rr 0 10 Reset clock fall time t Rf 0 10 20 20 ns ns — ns ø SG1 and øV should be the same timing. See drive timing diagram (2) See drive timing diagram (2) See drive timing diagram (2) See drive timing diagram (3) ns ns Reset clock set up time t Rs Reset clock pulse width t Rw 100 200 — ns Reset clock hold time t Rh 100 125 — ns 0.7T MN3674 CCD Linear Image Sensor ■ Electrical Characteristics • Clock input capacitance (Ta=–20 to + 60˚C) Parameter CCD Shift register clock input capacitance Symbol C1 , C 2 Vertical transfer clock input capacitance CV Reset clock input capacitance Shift clock input capacitance C RS Condition VIN =5V f=1MHz C SG1, C SG2 min typ max — 200 — Unit pF — 100 — pF — 20 — pF — 100 — pF • DC characteristics Parameter Power supply current Symbol I DD Condition VDD = +12V min typ max Unit — 10 20 mA min typ max Unit — 50 — ns • AC characteristics Parameter Signal output delay time Symbol t OS Condition (a reference value) ■ Optical Characteristics <Inspection conditions> • Ta=25˚C, VDD=12V, VøH=VVH=VSH=VRH=5V (pulse), fC=fR=1MHz, Tint (accumulation time)=10ms • Light source: Daylight fluorescent lamp with IR/UV cutting filter • Optical system: A slit with an aperture dimensions of 20mm × 20mm is used at a distance of 200mm from the sensor (equivalent to F=10). • Load resistance = 100k Ohms • These specifications apply to the 512 valid R and G pixels and the 1024 valid G pixels excluding the dummy pixels D1 to D8. Parameter Responsivity Photo response non-uniformity Saturation output voltage Saturation exposure Dark signal output voltage Dark signal output non-uniformity Shift register total transfer efficiency Dynamic range Symbol min typ max RR Note 1 Condition 0.70 0.95 1.20 RG Note 1 1.40 1.80 2.20 RB PRNU Note 1 Note 2 0.90 1.20 1.50 — 6 15 VSAT Note 3 650 800 — SER Note 4 0.67 0.84 — SEG Note 4 0.36 0.44 — SEB 0.53 0.67 — VDRK1 Note 4 OS1, Dark condition, see Note 5 — 0.5 1.0 VDRK2 OS2, Dark condition, see Note 5 — 1.0 2.0 DSNU1 OS1, Dark condition, see Note 6 — 0.1 2.0 DSNU2 OS2, Dark condition, see Note 6 — 0.2 4.0 92 99 — — 800 — STTE DR Note 7 Unit V/lx · s % mV lx · s mV mV % Note 1) Responsivity (R) This is the value obtained by dividing the average output voltage (V) of the all pixels by the exposure (lx· s). The exposure (lx· s) is the product of the illumination intensity (lx) and the accumulation time (s). Since the responsivity changes with the spectral distribution of the light source used, care should be taken when using a light source other than the daylight type fluorescent lamp specified in the inspection conditions. Note 2) Photo response non-uniformity (PRNU) This is defined by the following equation where Xave is the average output voltage of the valid pixels of each of the colors R, G, and B, and ∆x is the difference between the output voltage of the maximum (or minimum) output pixel and Xave, when the photodetector region is illuminated with light of a uniform illumination intensity distribution. x ×100 (%) PRNU= Xave The incident light intensity shall be 50% of the standard saturation llight intensity. MN3674 CCD Linear Image Sensor ■ Optical Characteristics (continued) Note 3) Saturation output voltage: This is the output voltage at the point beyond which it is not possible to maintain the linearity of the photoelectric conversion characteristics as the exposure is increased. (The exposure at this point is called the saturation exposure.) Note 4) Saturation Exposure (SE) This is the exposure beyond which it is not possible to maintain the linearity of the output voltage as the exposure is increased. When designing the equipment using these devices, make sure that the incident light exposure is set with sufficient margin so that the CCD never gets saturated. Note 5) Dark signal output voltage (VDRK) This is defined as the average of the output from all the valid pixels in the dark condition at Ta=25˚C, Tint=10ms. Normally, the dark signal output voltage gets doubled for every 8 to 10˚C increase in Ta and is proportional to Tint. The dark signal output voltage (VDRK2) on the OS2 side will be larger than the dark signal output voltage (VDRK1) on the OS1 side because there is a delay memory on the OS2 side. Note 6) Dark signal non-uniformity (DSNU) This is defined as the difference between the maximum value among the output voltages of the all valid pixels at Ta=25˚Cand Tint=10ms and VDRK. VDRK DSNU Note 7) Dynamic range (DR) This is defined by the following equation. DR= VSAT VDRK Since the dark signal output voltage is proportional to the accumulation time, the dynamic range becomes wider when the accumulation time is shorter. ■ Pin Descriptions Pin No. Symbol 1 NC Pin name 2 NC Non connection 3 OS1 Signal output 1 4 DS1 Compensation output 1 5 6 7 VSS øR ø1 Ground Reset clock CCD clock (Phase 1) Condition Non connection 8 øSG1 CCD shift register clock 1 9 VSS Ground 10 VSS 11 NC 12 NC 13 NC Ground Non connection Non connection Non connection 14 øV Vertical transfer clock 15 øSG2 Shift clock gate 2 16 ø2 CCD clock (Phase 2) 17 NC 18 19 20 VDD DS 2 OS 2 21 NC Green pixel output Non connection Power supply Compensation output 2 Signal output 2 Non connection Non connection NC 22 Note) Connect all NC pins externally to VSS (GND). Red and Blue pixel output MN3674 CCD Linear Image Sensor ■ Construction of the Image Sensor The MN3674 can be made up of the three sections of—a) photo detector region, b) CCD transfer region (shift register), and c) output region. a) Photo detector region • The photoelectric conversion device consists of an 11µm floating photodiode and a 3µm channel stopper (isolation region) per pixel, and such pixels are arranged in a linear row with a pitch of 14µm along the main scanning direction. • The R-B row has 512 pixels each of the red and blue colors arranged alternatingly, and the G row has1024 pixels. The R-B row and G row are placed with a spacing of one line (14µm) along the sideways scanning direction. The pixels of the G row are displaced by half the pixel pitch (7µm) relative to the pixels of the R-B row in the main scanning direction. 1 1 2 2· · · · · · · 512 512 R B R B · · · · · · R B G G G G · · · · · · G G 1 2 3 4 · · · · · · 1023 1024 14µm 14µm 14µm 14µm • A one line analog delay memory is built in the chip in order to compensate for the difference in the positions of the R-B and G rows in the sideways scanning direction. • The photodetector window is a rectangle of dimensions 9µm (Horizontal) × 11µm (Vertical), and the areas other than the photodetector window are optically shielded. • The photodetector region has a total of 32 optically shielded (black reference) pixels that can be used as the black level reference, with 16 pixels each for the R-B row and the G row. b) CCD Transfer region (shift register) • The signal charges obtained by photoelectric conversion are transferred to the CCD transfer regions of the respective colors during the period when the shift gate (øSG) is at the High level. The signal charges transferred to this analog shift register are successively transferred to the output region. • A buried type CCD that can be driven by a two phase clock (ø1, ø2) is used for the analog shift register. c) Output region • The signal charge transferred to the output region is first sent to the charge to voltage conversion region where it is converted into a voltage level corresponding to the amount of the signal charge, and then output after impedance conversion in a two stage source follower amplifier. • The DC level component not containing the optical signal and the clock noise component are output at the DS pin. • It is possible to obtain a signal with a high S/N ratio with reduced clock noise, etc., by carrying out differential amplification of the OS and DS outputs externally. ■ 1-Line delay analog memory • In order to compensate for the distance between the photodiode rows for the R, B colors and the G color, the device has a built in analog memory that can store the signals of one line. It is possible to select either to use or not use the delay memory by the timings of the pulses øV, øSG1, and øSG2, and the two types of read out operation of 512 pixel operation and pseudo 1024 pixel operation can be obtained accordingly. (1) 512-pixel operation (no delay memory) R B G G is taken as one pixel thereby making this device a 512-pixel color CCD. (Each pixel of the color sensor will be a parallelogram of 28µm (horizontal) × 28µm (vertical).) Sideways scanning direction (2) Pseudo 1024-pixel operaation (delay memory is used) 2 4 1022 A 1-line delay operation and interpolation signal processing 1 3 5 · · · · · · 1023 shown in the figure at left are made for the R-B colors. R B R B R B ··· B R B G G G G G G ··· G G G 1 2 3 4 5 6 · · · 1022 1024 1023 B R R B G G or becomes one pixel during color sensing operation. * Since the signal from the R-B row gets delayed, configure the optical system and mechanisms so that the sideways scanning is done first from the R-B row. The R-B row and the G row of the same line will be read out due to the one line delay. The weighted center of one color pixel can be considered to be at the position of the G pixel. MN3674 CCD Linear Image Sensor ■ Timing Diagram • I/O timing (1) (without 1-line delay operation) ø SG1 øV ø SG2 ø1 ø2 øR 0 1 2 DS1 OS1 17 18 19 20 21 22 B1 B29 B31 1041 1043 1045 1042 1044 1046 D1 D 3 G1 G2 G3 DS2 OS2 B2 D G1022 G1024 5 D7 G1021 G1023 Blank feed level B30 B32 D2 D 4 B1 to B32 : Black reference pixels R1 B1 R2 D1 to D8 : Dummy invalid pixels B511 B512 D6 D8 Note) Repeat the transfer R511 R512 pulses (ø1 , ø2) for more than 1046 periods. • I/O timing (2) (during 1-line delay operation) ø SG1 øV ø SG2 ø1 ø2 øR 0 DS1 OS1 1 2 17 18 19 20 21 22 B1 B29 B31 D1 D3 G1 G2 G 3 DS2 OS2 B2 1041 1043 1045 1042 1044 1046 D G1022 G1024 5 D7 G1021 G1023 Blank feed level B30 B32 D2 D 4 B1 to B32 : Black reference pixels R1 B1 R2 D1 to D8 : Dummy invalid pixels * OS 2 outputs the previous line signal. B 511 B 512 D6 D8 R 511 R 512 Note) Repeat the transfer pulses (ø1 , ø2) for more than 1046 periods. MN3674 CCD Linear Image Sensor • Drive timing (1) (read-out during no 1-line delay operation) t SG1r 90% ø SG1 50% 10% t SG1f t SG1w t Vr øV t Vf 90% 50% 10% t SG2r t Vw t SG2f t SG2s 90% 50% 10% t SG2w ø SG2 ø1 50% 50% t SG1s t SG2h Note) Make sure that the timings of ø SG and ø V are identical. (If these are not identical, the accumulation time gets shifted and hence the data on the same line cannot be obtained.) • Drive timing (2) (read-out during 1-line delay operation) t SG1r ø SG1 t SG1f t Vr t SG2r øV ø SG2 90% 50% 10% t SG1w 90% 50% 10% t SG2f t Vs 90% 50% 10% ø1 50% t Vf t Vw 50% t SG2s t SG2w t Vh Note) Make sure that the timings of ø SG and ø V are identical. (If these are not identical, the accumulation time gets shifted and hence the data on the same line cannot be obtained.) MN3674 CCD Linear Image Sensor • Drive timing (3) (during repeated pattern) 90% ø2 10% t Cf 90% 50% 10% t RW t Cr ø1 t RS t Rh 90% 50% 10% øR t Rr DS 1 (DS2) t OS t Rf t Oh 2T Reference level OS 1 (OS 2) 50% Effective signal output period ■ Graphs and Characteristics Spectral Response Characteristics Relative responsivity (%) 100 80 Blue 60 Green Red 40 20 0 400 500 600 700 Wavelength (nm) 800