Freescale Semiconductor Technical Data MPX4100 Rev 7, 12/2006 Integrated Silicon Pressure Sensor Manifold Absolute Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX4100 series Manifold Absolute Pressure (MAP) sensor for engine control is designed to sense absolute air pressure within the intake manifold. This measurement can be used to compute the amount of fuel required for each cylinder. The small form factor and high reliability of on-chip integration makes the MAP sensor a logical and economical choice for automotive system designers. MPX4100 SERIES INTEGRATED PRESSURE SENSOR 20 TO 105 kPA (2.9 TO 15.2 psi) 0.3 TO 4.9 V OUTPUT MPX4100A CASE 867-08 Features • • • • • • 1.8% Maximum Error Over 0° to 85°C Specifically Designed for Intake Manifold Absolute Pressure Sensing in Engine Control Systems Ideally Suited for Microprocessor Interfacing Temperature Compensated Over -40°C to +125°C Durable Epoxy Unibody Element Ideal for Non-Automotive Applications MPX4100AP CASE 867B-04 Typical Applications • Manifold Sensing for Automotive Systems ORDERING INFORMATION(1) Device Type Basic Element Case No. MPX Series Order Number Device Marking 867-08 MPX4100A MPX4100A 867B-04 MPX4100AP MPX4100AP Absolute, Stove Pipe Port 867E-03 MPX4100AS MPX4100A Absolute, Axial Port 867F-03 MPX4100ASX MPX4100A Options Absolute, Element Only Ported Elements Absolute, Ported 1. The MPX4100A series MAP silicon pressure sensors are available in the Basic Element, or with pressure port fittings that provide mounting ease and barbed hose connections. MPX4100AS CASE 867E-03 MPX4100ASX CASE 867F-03 PIN NUMBERS © Freescale Semiconductor, Inc., 2006. All rights reserved. 1 VOUT 4 NC 2 GND 5 NC 3 VS 6 NC processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. The MPX4100 series piezoresistive transducer is a stateof-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor VS Thin Film Temperature Compensation and Gain Stage #1 Sensing Element Gain Stage #2 and Ground Reference Shift Circuitry VOUT Pins 4, 5, and 6 are NO CONNECTS GND Figure 1. Fully Integrated Pressure Sensor Schematic (1) Table 1. MAXIMUM RATINGS Rating Overpressure (2) (P1 > P2) Symbol Value Unit Pmax 400 kPa Pburst 1000 kPa Storage Temperature Tstg -40 to +125 °C Operating Temperature TA -40 to +125 °C Burst Pressure(2) (P1 > P2) 1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPX4100 2 Sensors Freescale Semiconductor Table 2. OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25×C unless otherwise noted, P1 > P2) Characteristic(1) Pressure Range(2) Supply Voltage(2) Supply Current Symbol Min Typ Max Unit POP 20 — 105 kPa VS 4.85 5.1 5.35 Vdc IO — 7.0 10 mAdc Minimum Pressure Offset(3) @ VS = 5.1 V (0 to 85°C) Voff 0.225 0.306 0.388 Vdc Full Scale Output(4) @ VS = 5.1 V (0 to 85°C) VFSO 4.815 4.897 4.978 Vdc Full Scale Span(5) @ VS = 5.1 V (0 to 85°C) VFSS — 4.59 — Vdc Accuracy(6) (0 to 85°C) — — — ±1.8 %VFSS V/P — 54 — mV/kPa Response Time(7) tR — 1.0 — ms Output Source Current at Full Scale Output IO+ — 0.1 — mAdc — — 20 — ms — — ±0.5 — %VFSS Sensitivity Warm-Up Time (8) Offset Stability(9) (10) 1. Decoupling circuit shown in Figure 3 required to meet electrical specifications. 2. 1.0 kPa (kiloPascal) equals 0.145 psi. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 10. Device is ratiometric within this specified excitation range. Table 3. MECHANICAL CHARACTERISTICS Characteristic Weight, Basic Element (Case 867) Common Mode Line Pressure(1) Symbol Min Typ Max Unit — — 4.0 — Grams — — — 690 kPa 1. Common mode pressures beyond specified may result in leakage at the case-to-lead interface. MPX4100 Sensors Freescale Semiconductor 3 Fluoro Silicone Gel Die Coat Stainless Steel Metal Cover Die P1 Wire Bond Lead Frame Sealed Vacuum Reference Epoxy Plastic Case Die Bond Absolute Element P2 Figure 2. Cross-Sectional Diagram (Not to Scale) +5.0 V 1 OUTPUT 3 1.0 µF 0.01 µF 2 IPS Figure 3. Recommended Power Supply Decoupling (For output filtering recommendations, refer to Application Note AN1646.) Figure 2 illustrates an absolute sensing chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX4100A series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on 5.0 4.5 4.0 3.5 Output (Volts) 3.0 sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C. (The output will saturate outside of the specified pressure range.) Transfer Function: VOUT = Vs* (.01059*P-.152) ± Error VS = 5.1 Vdc TEMP = 0 to 85°C 20 kPa TO 105 kPa MAX MPX4100A TYP 2.5 2.0 1.5 MIN 1.0 0.5 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110 0 Pressure (ref. to sealed vacuum) in kPa Figure 4. Output versus Absolute Pressure MPX4100 4 Sensors Freescale Semiconductor Transfer Function (MPX4100A) Nominal Transfer Value: Vout = VS (P x 0.01059 - 0.1518) ± (Pressure Error x Temp. Factor x 0.01059 x VS) VS = 5.1 V ± 0.25 Vdc Temperature Error Band MPX4100A Series 4.0 3.0 Temperature Error Factor 2.0 Temp Multiplier - 40 0 to 85 +125 3 1 3 1.0 0.0 -40 -20 0 20 40 80 60 100 120 140 Temperature in C× Pressure Error Band Error Limits for Pressure 3.0 Pressure Error (kPa) 2.0 1.0 0.0 -1.0 20 40 60 80 100 Pressure (in kPa) 120 -2.0 -3.0 Pressure Error (Max) 20 to 105 (kPa) ±1.5 (kPa) PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE The two sides of the pressure sensor are designated as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel, which protects the die from harsh media. The MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below: Part Number MPX4100A Case Type 867 Pressure (P1) Side Identifier Stainless Steel Cap MPX4100AP 867B Side with Port Marking MPX4100AS 867E Side with Port Attached MPX4100ASX 867F Side with Port Attached MPX4100 Sensors Freescale Semiconductor 5 PACKAGE DIMENSIONS C NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). R POSITIVE PRESSURE (P1) M B -AN PIN 1 SEATING PLANE 1 2 3 4 5 DIM A B C D F G J L M N R S L 6 -TG J S F D 6 PL 0.136 (0.005) STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX M T A M INCHES MILLIMETERS MAX MIN MAX MIN 16.00 0.595 0.630 15.11 13.56 0.514 0.534 13.06 5.59 0.200 0.220 5.08 0.84 0.027 0.033 0.68 1.63 0.048 0.064 1.22 0.100 BSC 2.54 BSC 0.40 0.014 0.016 0.36 18.42 0.695 0.725 17.65 30˚ NOM 30˚ NOM 12.57 0.475 0.495 12.07 11.43 0.430 0.450 10.92 0.090 0.105 2.29 2.66 STYLE 3: CASE OPEN 867-08 PIN 1. GROUND 2. ISSUE N -VOUT 3. VSUPPLY 4. BASIC ELEMENT (A, D) +VOUT 5. STYLE 2: PIN 1. 2. 3. 4. 5. 6. OPEN OPEN GROUND +VOUT +VSUPPLY -VOUT 6. OPEN CASE 867-O8 ISSUE N BASIC ELEMENT MPX4100 6 Sensors Freescale Semiconductor PACKAGE DIMENSIONS -B- NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. A C DIM A B C D E F G J K N S V V PIN 1 PORT #1 POSITIVE PRESSURE (P1) 6 K 4 3 2 1 S J N 5 G F E D 6 PL -T- 0.13 (0.005) M T B M INCHES MILLIMETERS MAX MIN MAX MIN 18.28 0.720 17.53 0.690 6.48 6.22 0.245 0.255 20.82 0.780 0.820 19.81 0.84 0.69 0.027 0.033 4.72 4.52 0.178 0.186 1.63 1.22 0.048 0.064 0.100 BSC 2.54 BSC 0.41 0.36 0.014 0.016 9.53 8.76 0.375 0.345 7.87 7.62 0.300 0.310 6.10 5.59 0.220 0.240 4.93 4.62 0.194 0.182 STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX CASE 867E-O3 ISSUE D STOVE PIPE PORT (AS) -TC A E -Q- U N V B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) -P0.25 (0.010) M T Q 6 M 5 4 3 2 1 S K J 0.13 (0.005) M T P S D 6 PL Q S G F NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MILLIMETERS MAX MIN MIN MAX 28.45 27.43 1.080 1.120 19.30 18.80 0.740 0.760 16.51 16.00 0.630 0.650 0.84 0.68 0.027 0.033 4.57 4.06 0.160 0.180 1.63 1.22 0.048 0.064 0.100 BSC 2.54 BSC 0.41 0.36 0.014 0.016 6.10 5.59 0.220 0.240 2.03 1.78 0.070 0.080 4.06 3.81 0.150 0.160 4.06 3.81 0.150 0.160 11.68 11.18 0.440 0.460 18.42 17.65 0.695 0.725 21.84 21.34 0.840 0.860 4.93 4.62 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX CASE 867F-03 ISSUE D AXIAL PORT (ASX) MPX4100 Sensors Freescale Semiconductor 7 PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 867B-04 ISSUE G PORTED (AP) MPX4100 8 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 867B-04 ISSUE G PORTED (AP) MPX4100 Sensors Freescale Semiconductor 9 How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. 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