Agilent ATF-541M4 Low Noise Enhancement Mode Pseudomorphic HEMT in a Miniature Leadless Package Data Sheet Features • High linearity performance • Single Supply Enhancement Mode Technology[1] • Very low noise figure • Excellent uniformity in product specifications Description Agilent Technologies’s ATF-541M4 is a high linearity, low noise, single supply E-PHEMT housed in a miniature leadless package. The ATF-541M4’s small size and low profile makes it ideal for the design of hybrid module and other space-constraint devices. The device can be used in applications such as TMA and front end LNA for Cellular/PCS and WCDMA base stations, LNA and driver amplifiers for Wireless Data and 802.11b WLAN. In addition, the device’s superior RF performance at higher frequency makes it an ideal candidate for high frequency applications such as WLL, 802.11a WLAN, 5–6 GHz UNII and HIPERLAN applications. MiniPak 1.4 mm x 1.2 mm Package Rx • 800 micron gate width • Miniature leadless package 1.4 mm x 1.2 mm x 0.7 mm • Tape-and-Reel packaging option available Specifications 2 GHz; 3V, 60 mA (Typ.) Pin Connections and Package Marking Source Pin 3 Gate Pin 2 Rx • 35.8 dBm output 3rd order intercept Drain Pin 4 • 21.4 dBm output power at 1 dB gain compression • 0.5 dB noise figure Source Pin 1 Note: Top View. Package marking provides orientation, product identification and date code. “R” = Device Type Code “x” = Date code character. A different character is assigned for each month and year. • 17.5 dB associated gain Applications • Low Noise Amplifier and Driver Amplifier for Cellular/PCS and WCDMA Base Stations • LNA and Driver Amplifier for WLAN, WLL/RLL and MMDS applications • General purpose discrete E-PHEMT for ultra low noise applications in the 450 MHz to 10 GHz frequency range Note: 1. Enhancement mode technology requires positive Vgs, thereby eliminating the need for the negative gate voltage associated with conventional depletion mode devices. ATF-541M4 Absolute Maximum Ratings [1] Symbol Parameter Units Absolute Maximum VDS Drain-Source Voltage [2] V 5 VGS Gate-Source Voltage [2] V -5 to +0.8 VGD Gate Drain Voltage [2] V 5 IDS Drain Current [2] mA 120 IGS Gate Current [5] mA 2 Pdiss Total Power Dissipation [3] mW 360 Pin max. RF Input Power [5] dBm 10 TCH Channel Temperature °C 150 TSTG Storage Temperature °C -65 to 150 θjc Thermal Resistance [4] °C/W 212 Notes: 1. Operation of this device above any one of these parameters may cause permanent damage. 2. Assumes DC quiescent conditions. 3. Source lead temperature is 25°C. Derate 4.7 mW/°C for TL > 74°C. 4. Thermal resistance measured using 150°C Liquid Crystal Measurement method. 5. The device can handle +10 dBm RF Input Power provided IGS is limited to 2 mA. IGS at P1dB drive level is bias circuit dependent. See applications section for additional information. 120 0.7V 100 0.6V IDS (mA) 80 60 0.5V 40 20 0.4V 0.3V 0 0 1 2 3 4 VDS (V) 5 6 7 Figure 1. Typical I-V Curves. (VGS = 0.1 V per step) Product Consistency Distribution Charts [6, 7] 300 320 320 Cpk = 0.85 Stdev = 1.14 Cpk = 1.16 Stdev = 0.30 Cpk = 1.72 Stdev = 0.072 250 240 240 200 -3 Std 160 160 80 80 -3 Std +3 Std +3 Std 150 100 50 0 0 29 32 35 38 OIP3 (dBm) Figure 2. OIP3 @ 2 GHz, 3 V, 60 mA. LSL = 33.0, Nominal = 35.82 41 15 16 17 18 GAIN (dB) 19 Figure 3. Gain @ 2 GHz, 3 V, 60 mA. LSL = 15.5, Nominal = 17.5, USL = 18.5 20 0 0.3 0.5 0.7 0.9 1.1 NF (dB) Figure 4. NF @ 2 GHz, 3 V, 60 mA. Nominal = 0.5, USL = 0.9 Notes: 6. Distribution data sample size is 500 samples taken from 6 different wafers. Future wafers allocated to this product may have nominal values anywhere between the upper and lower limits. 7. Measurements made on production test board. This circuit represents a trade-off between an optimal noise match and a realizeable match based on production test equipment. Circuit losses have been de-embedded from actual measurements. 2 ATF-541M4 Electrical Specifications TA = 25°C, RF parameters measured in a test circuit for a typical device Symbol Parameter and Test Condition Units Min. Typ. Max. Vgs Operational Gate Voltage Vds = 3V, Ids = 60 mA V 0.4 0.58 0.75 Vth Threshold Voltage Vds = 3V, Ids = 4 mA V 0.18 0.36 0.52 Idss Saturated Drain Current Vds = 3V, Vgs = 0V µA — 0.28 5 Gm Transconductance Vds = 3V, gm = ∆Idss/∆Vgs; ∆Vgs = 0.75 – 0.7 = 0.05V mmho 230 398 560 Igss Gate Leakage Current Vgd = Vgs = -3V µA — — 200 NF Noise Figure [1] f = 2 GHz Vds = 3V, Ids = 60 mA Vds = 4V, Ids = 60 mA dB dB — — 0.5 0.5 0.9 — Gain Gain [1] f = 2 GHz Vds = 3V, Ids = 60 mA Vds = 4V, Ids = 60 mA dB dB 15.5 — 17.5 18.1 18.5 — OIP3 Output 3rd Order Intercept Point [1] f = 2 GHz Vds = 3V, Ids = 60 mA Vds = 4V, Ids = 60 mA dBm dBm 33 — 35.8 35.9 — — P1dB 1dB Compressed Output Power [1] f = 2 GHz Vds = 3V, Ids = 60 mA Vds = 4V, Ids = 60 mA dBm dBm — — 21.4 22.1 — — Notes: 1. Measurements obtained using production test board described in Figure 5. Input 50 Ohm Transmission Line Including Gate Bias T (0.3 dB loss) Input Matching Circuit Γ_mag = 0.11 Γ_ang = 141° (0.5 dB loss) DUT Output Matching Circuit Γ_mag = 0.314 Γ_ang = -167° (0.5 dB loss) 50 Ohm Transmission Line Including Drain Bias T (0.3 dB loss) Output Figure 5. Block diagram of 2 GHz production test board used for Noise Figure, Gain, P1dB, OIP3, and OIP3 measurements. This circuit represents a trade-off between an optimal noise match, maximum OIP3 match and associated impedance matching circuit losses. Circuit losses have been deembedded from actual measurements. ATF-541M4 Electrical Specifications (See Notes 2 and 3, as indicated) Symbol Parameter and Test Condition Units Min. Typ. Max. Fmin Minimum Noise Figure [2] f = 900 MHz f = 2 GHz f = 3.9 GHz f = 5.8 GHz Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA dB dB dB dB — — — — 0.16 0.46 0.8 1.17 — — — — Ga Associated Gain [2] f = 900 MHz f = 2 GHz f = 3.9 GHz f = 5.8 GHz Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA dB dB dB dB — — — — 22.4 18.7 14.5 11.9 — — — — OIP3 Output 3rd Order Intercept Point [3] f = 900 MHz f = 900 MHz f = 3.9 GHz f = 5.8 GHz Vds = 3V, Ids = 60 mA Vds = 4V, Ids = 60 mA Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA dBm dBm dBm dBm — — — — 35 35.1 36.6 37.6 — — — — P1dB 1dB Compressed Output Power [3] f = 900 MHz f = 900 MHz f = 3.9 GHz f = 5.8 GHz Vds = 3V, Ids = 60 mA Vds = 4V, Ids = 60 mA Vds = 3V, Ids = 60 mA Vds = 3V, Ids = 60 mA dBm dBm dBm dBm — — — — 19.5 20.8 20.4 19.4 — — — — Notes: 2. Fmin and associated gain at minimum noise figure (Ga) values are based on a set of 16 noise figure measurements made at 16 different impedances using an ATN NP5 test system. From these measurements a true Fmin and Ga is calculated. Refer to the noise parameter application section for more information. 3. P1dB and OIP3 measurements made in an InterContinental Microwave (ICM) test fixture with double stub tuners and bias tees. The input was tuned for minimum noise figure and the output was tuned for maximum OIP3. 3 ATF-541M4 Typical Performance Curves 0.60 40 0.26 0.24 Gain OIP3 P1dB 35 0.55 0.45 dB/dBm 0.50 30 0.20 Fmin (dB) Fmin (dB) 0.22 0.18 0.16 20 0.14 0.40 15 0.12 0.35 10 0.10 0 20 40 60 80 100 0 20 40 Id (mA) 100 30 25 20 15 40 40 60 80 100 Id (mA) Figure 9. Gain, OIP3 & P1dB vs. Ids Tuned for Max OIP3 and Min NF at 900 MHz, Vds = 3V[3]. Notes: 1. Fmin and associated gain at minimum noise figure (Ga) values are based on a set of 16 noise figure measurements made at 16 different impedances using an ATN NP5 test system. From these measurements a true Fmin and Ga is calculated. Refer to the noise parameter application section for more information. 60 80 100 Figure 8. Gain, OIP3 & P1dB vs. Ids Tuned for Max OIP3 and Min NF at 2 GHz, Vds = 3V[2]. 2.5 30 2.0 25 1.5 20 1.0 40 mA 60 mA 80 mA 15 80 mA 60 mA 40 mA 10 0 20 20 Ids (mA) 0.5 0 0 Ga (dB) Gain OIP3 P1dB Fmin (dB) dB/dBm 80 Figure 7. Fmin vs. Ids at 900 MHz, Vds = 3V[1] 40 35 60 Id (mA) Figure 6. Fmin vs. Ids at 2 GHz, Vds = 3V[1] 4 25 5 0 2 4 6 8 10 12 FREQUENCY (GHz) Figure 10. Fmin vs. Frequency vs. Ids, Vds = 3V[1]. 2. Measurements obtained using production test board described in Figure 5. 3. Input tuned for minimum NF and the output tuned for maximum OIP3 using an InterContinental Microwave (ICM) test fixture, double stub tuners and bias tees. 0 2 4 6 8 10 FREQUENCY (GHz) Figure 11. Ga vs. Frequency vs. Ids, Vds = 3V[1]. 12 ATF-541M4 Typical Performance Curves, continued 30 45 25°C -40°C 85°C 25 2.0 1.5 OIP3 (dBm) GAIN (dB) 15 10 NF (dB) 35 20 30 25 25°C -40°C 85°C 20 5 0 1 2 3 4 5 6 7 0 0 1 2 3 21 20 19 18 1 2 3 4 5 6 7 Figure 13. OIP3 vs. Freq. and Temperature Tuned for Max OIP3 and Min NF at Vds = 3V, Ids = 60 mA[1]. 25°C -40°C 85°C 22 0 4 FREQUENCY (GHz) 23 P1dB (dBm) 0.5 10 0 Figure 12. Gain vs. Freq. and Temperature Tuned for Max OIP3 and Min NF at Vds = 3V, Ids = 60 mA[1]. 5 6 7 FREQUENCY (GHz) Figure 15. P1dB vs. Freq. and Temperature Tuned for Max OIP3 and Min NF at Vds = 3V, Ids = 60 mA[1]. ATF-541M4 Output Reflection Coefficient Parameters Tuned for Maximum Output IP3[1]; VDS = 3V, IDS = 60 mA Gamma[2] Out_Mag. (Degrees) OIP3 P1dB Freq (GHz) Gamma[2] Out_Mag. (Mag) (dBm) (dBm) 0.9 2.0 3.9 5.8 0.006 0.314 0.321 0.027 23 -167 134 89 35.04 35.82 36.60 37.62 19.47 21.36 20.37 19.38 Notes: 1. Input tuned for minimum NF and the output tuned for maximum OIP3 using an InterContinental Microwave (ICM) test fixture, double stub tuners and bias tees. 2. Gamma out is the reflection coefficient of the matching circuit presented to the output of the device. 5 1.0 15 FREQUENCY (GHz) 17 25°C -40°C 85°C 40 0 1 2 3 4 5 6 FREQUENCY (GHz) Figure 14. NF vs. Freq. and Temperature Tuned for Max OIP3 and Min NF at Vds = 3V, Ids = 60 mA[1]. 7 ATF-541M4 Typical Scattering Parameters, VDS = 3V, IDS = 40 mA Freq. GHz Mag. S11 Ang. dB S21 Mag. Ang. Mag. S12 Ang. Mag. S22 Ang. MSG/MAG dB 0.1 0.5 0.9 1.0 1.5 1.9 2.0 2.5 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0 11.0 12.0 13.0 14.0 15.0 16.0 17.0 18.0 0.99 0.88 0.79 0.77 0.73 0.71 0.70 0.69 0.69 0.69 0.70 0.71 0.72 0.73 0.74 0.76 0.77 0.79 0.81 0.83 0.85 0.86 0.89 0.90 -16.4 -71.2 -107.2 -114.0 -137.2 -150.1 -155.1 -168.4 -178.1 166.9 155.0 139.7 129.2 119.3 110.0 100.3 90.5 82.1 72.4 62.2 52.3 42.7 33.1 24.5 27.62 25.51 22.76 22.07 19.26 17.48 16.94 15.19 13.68 11.30 9.44 8.02 6.67 5.54 4.51 3.61 2.80 2.01 1.21 0.37 -0.51 -1.70 -2.59 -3.81 24.03 18.85 13.74 12.69 9.18 7.48 7.03 5.75 4.83 3.67 2.96 2.52 2.16 1.89 1.68 1.52 1.38 1.26 1.15 1.04 0.94 0.82 0.74 0.65 169.5 135.7 115.0 110.9 96.1 87.7 86.4 78.3 71.1 58.3 46.6 34.5 23.9 13.6 3.6 -6.5 -16.9 -27.5 -37.6 -48.8 -59.4 -69.3 -78.2 -86.9 0.01 0.03 0.04 0.04 0.05 0.05 0.05 0.06 0.06 0.07 0.07 0.09 0.10 0.11 0.12 0.13 0.14 0.15 0.16 0.16 0.17 0.17 0.17 0.17 80.2 54.4 41.2 39.0 32.8 30.4 30.6 29.7 29.5 29.3 27.9 25.1 22.3 19.0 15.1 10.5 4.8 -1.7 -8.5 -15.9 -24.1 -31.6 -39.0 -45.9 0.58 0.46 0.34 0.32 0.23 0.19 0.16 0.13 0.11 0.11 0.11 0.12 0.13 0.14 0.16 0.19 0.22 0.27 0.32 0.37 0.44 0.50 0.57 0.62 -10.6 -45.3 -66.5 -71.0 -87.8 -97.9 -101.6 -113.1 -128.4 -152.9 -174.7 173.9 157.8 145.8 135.6 124.6 113.5 102.7 92.5 83.1 74.2 66.0 60.5 55.9 33.81 27.98 25.36 25.01 22.64 21.75 21.48 19.82 19.06 15.14 12.85 11.68 10.34 9.24 8.31 7.74 7.01 6.58 6.19 5.73 5.46 4.53 4.93 4.44 Typical Noise Parameters, VDS = 3V, IDS = 40 mA Fmin dB Γopt Mag. Γopt Ang. Rn/50 0.5 0.9 1.0 1.9 2.0 2.4 3.0 3.9 5.0 5.8 6.0 7.0 8.0 9.0 10.0 0.10 0.12 0.17 0.40 0.41 0.51 0.55 0.64 0.95 1.07 1.10 1.30 1.45 1.57 1.69 0.45 0.41 0.29 0.23 0.22 0.24 0.29 0.34 0.35 0.34 0.40 0.42 0.48 0.55 0.59 8.3 11.3 23.8 89.2 89.9 112.1 140.2 165.4 -173.4 -160.3 -151.2 -139.3 -129.2 -118.0 -101.7 0.06 0.06 0.05 0.05 0.05 0.05 0.05 0.04 0.04 0.05 0.08 0.10 0.13 0.21 0.34 Ga dB 26.17 22.19 21.81 18.72 18.24 17.16 15.91 14.26 12.74 11.72 10.32 9.77 9.46 8.64 8.15 40 35 MSG/MAG and |S21|2 (dB) Freq GHz MSG 30 25 20 15 MAG 10 |S21|2 5 0 -5 -10 0 5 10 15 FREQUENCY (GHz) Figure 16. MSG/MAG and |S21|2 vs. Frequency at 3V, 40 mA. Notes: 1. The Fmin values are based on a set of 16 noise figure measurements made at 16 different impedances using an ATN NP5 test system. From these measurements a true Fmin is calculated. Refer to the noise parameter application section for more information. 2. Refer to the applications section for additional information on the test fixture used for the measurement of the s and noise parameters. 6 20 ATF-541M4 Typical Scattering Parameters, VDS = 3V, IDS = 60 mA Freq. GHz Mag. S11 Ang. dB S21 Mag. Ang. Mag. S12 Ang. Mag. S22 Ang. MSG/MAG dB 0.1 0.5 0.9 1.0 1.5 1.9 2.0 2.5 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0 11.0 12.0 13.0 14.0 15.0 16.0 17.0 18.0 0.99 0.87 0.78 0.76 0.72 0.70 0.70 0.69 0.69 0.69 0.70 0.71 0.71 0.73 0.74 0.76 0.77 0.79 0.80 0.83 0.85 0.86 0.90 0.90 -17.6 -74.7 -110.7 -117.6 -140.1 -152.6 -157.5 -170.4 -179.9 165.7 153.8 138.8 128.6 118.6 109.2 99.9 89.7 81.5 71.8 61.7 52.2 42.1 33.2 24.3 28.36 26.04 23.13 22.42 19.54 17.73 17.19 15.45 13.91 11.53 9.66 8.25 6.89 5.76 4.72 3.80 3.03 2.23 1.45 0.58 -0.31 -1.41 -2.34 -3.53 26.18 20.03 14.34 13.22 9.49 7.70 7.24 5.92 4.96 3.77 3.04 2.58 2.21 1.94 1.72 1.55 1.42 1.29 1.18 1.07 0.96 0.85 0.76 0.67 168.9 133.9 113.5 109.4 95.1 86.9 85.7 77.9 70.8 58.3 46.8 34.8 24.4 14.3 4.4 -5.7 -16.0 -26.3 -36.3 -47.4 -58.1 -67.9 -76.8 -84.8 0.01 0.03 0.04 0.04 0.05 0.05 0.05 0.05 0.06 0.07 0.08 0.09 0.10 0.11 0.12 0.13 0.14 0.15 0.16 0.17 0.17 0.17 0.17 0.17 85.1 54.2 41.8 40.2 34.6 32.8 33.5 34.1 33.4 32.8 32.0 28.2 25.1 21.1 16.6 11.2 5.5 -1.1 -8.7 -15.6 -23.4 -31.6 -38.7 -45.8 0.54 0.41 0.30 0.28 0.20 0.17 0.14 0.12 0.10 0.10 0.09 0.11 0.12 0.14 0.17 0.19 0.23 0.27 0.32 0.38 0.44 0.49 0.57 0.62 -11.3 -48.1 -70.1 -74.9 -92.5 -103.3 -108.9 -122.4 -138.7 -164.1 174.9 162.9 149.1 138.7 129.5 119.3 108.8 98.6 89.2 80.3 71.7 64.3 58.8 54.7 34.18 28.25 25.54 25.19 22.78 21.88 21.61 20.73 19.17 15.26 13.21 11.80 10.30 9.42 8.46 7.86 7.21 6.73 6.11 5.98 5.54 4.75 5.73 4.51 Typical Noise Parameters, VDS = 3V, IDS = 60 mA Fmin dB Γopt Mag. Γopt Ang. Rn/50 0.5 0.9 1.0 1.9 2.0 2.4 3.0 3.9 5.0 5.8 6.0 7.0 8.0 9.0 10.0 0.12 0.16 0.19 0.45 0.46 0.57 0.62 0.80 1.02 1.17 1.22 1.41 1.49 1.69 1.87 0.37 0.34 0.21 0.22 0.21 0.23 0.30 0.35 0.43 0.46 0.51 0.52 0.54 0.56 0.61 13.2 10.9 30.8 102.9 104.2 125.2 149.0 173.1 -168.3 -155.8 -146.4 -137.0 -129.5 -115.1 -99.8 0.05 0.06 0.04 0.05 0.05 0.05 0.04 0.04 0.05 0.06 0.09 0.11 0.15 0.25 0.40 Ga dB 27.06 22.88 22.44 19.17 18.69 17.57 16.26 14.54 12.97 11.85 10.98 10.03 9.66 8.82 8.32 40 35 MSG/MAG and |S21|2 (dB) Freq GHz MSG 30 25 20 15 MAG 10 |S21|2 5 0 -5 -10 0 5 10 15 FREQUENCY (GHz) Figure 17. MSG/MAG and |S21|2 vs. Frequency at 3V, 60 mA. Notes: 1. The Fmin values are based on a set of 16 noise figure measurements made at 16 different impedances using an ATN NP5 test system. From these measurements a true Fmin is calculated. Refer to the noise parameter application section for more information. 2. Refer to the applications section for additional information on the test fixture used for the measurement of the s and noise parameters. 7 20 ATF-541M4 Typical Scattering Parameters, VDS = 3V, IDS = 80 mA Freq. GHz Mag. S11 Ang. dB S21 Mag. Ang. Mag. S12 Ang. Mag. S22 Ang. MSG/MAG dB 0.1 0.5 0.9 1.0 1.5 1.9 2.0 2.5 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0 11.0 12.0 13.0 14.0 15.0 16.0 17.0 18.0 0.97 0.85 0.77 0.75 0.71 0.70 0.69 0.69 0.69 0.69 0.70 0.70 0.72 0.73 0.74 0.76 0.76 0.79 0.80 0.83 0.85 0.86 0.89 0.89 -17.9 -76.2 -112.1 -119.2 -142.2 -154.9 -159.5 -171.1 179.5 165.2 153.3 138.3 127.8 118.0 109.1 99.3 89.7 80.9 71.9 61.8 52.1 41.6 32.9 24.3 28.61 26.21 23.27 22.55 19.65 17.83 17.30 15.53 14.00 11.62 9.75 8.33 6.97 5.84 4.82 3.89 3.11 2.29 1.56 0.73 -0.18 -1.22 -2.18 -3.36 26.94 20.44 14.57 13.42 9.60 7.79 7.33 5.98 5.01 3.81 3.07 2.61 2.23 1.96 1.74 1.56 1.43 1.30 1.20 1.09 0.98 0.87 0.78 0.68 168.8 133.6 113.2 109.1 95.0 86.9 85.8 78.0 71.0 58.5 47.2 35.3 25.0 14.8 5.2 -4.9 -15.1 -25.2 -35.3 -46.6 -56.2 -67.1 -75.9 -83.6 0.01 0.03 0.04 0.04 0.04 0.05 0.05 0.05 0.06 0.06 0.07 0.09 0.10 0.11 0.12 0.13 0.14 0.15 0.16 0.17 0.17 0.17 0.17 0.17 79.8 54.7 43.1 41.5 36.3 34.8 35.8 36.0 35.8 35.0 33.7 29.6 26.6 22.3 17.8 12.1 6.1 -0.4 -7.8 -15.0 -23.3 -31.0 -39.1 -45.5 0.50 0.39 0.28 0.26 0.19 0.16 0.13 0.11 0.10 0.10 0.10 0.11 0.12 0.14 0.17 0.19 0.23 0.27 0.32 0.37 0.44 0.49 0.57 0.62 -11.6 -49.1 -71.5 -76.4 -94.6 -105.8 -112.9 -127.2 -144.2 -170.0 168.7 156.1 143.5 133.6 125.1 115.7 105.6 95.7 86.7 78.3 70.0 63.1 57.7 53.6 34.30 28.33 25.61 25.26 23.80 21.93 21.66 20.78 19.22 14.97 13.05 11.67 10.52 9.47 8.52 7.88 7.03 6.75 6.21 6.12 5.66 4.89 5.21 4.07 Typical Noise Parameters, VDS = 3V, IDS = 80 mA Fmin dB Γopt Mag. Γopt Ang. Rn/50 0.5 0.9 1.0 1.9 2.0 2.4 3.0 3.9 5.0 5.8 6.0 7.0 8.0 9.0 10.0 0.21 0.25 0.28 0.53 0.56 0.64 0.72 0.81 1.03 1.33 1.40 1.59 1.79 2.01 2.20 0.23 0.20 0.11 0.21 0.20 0.26 0.32 0.38 0.41 0.42 0.46 0.47 0.53 0.59 0.63 24.4 17.8 60.8 121.1 124.5 142.6 159.7 179.2 -153.7 -152.5 -143.4 -139.1 -127.3 -113.4 -97.9 0.05 0.06 0.04 0.05 0.05 0.05 0.05 0.05 0.05 0.07 0.10 0.13 0.19 0.31 0.5 Ga dB 27.83 23.58 23.43 19.57 19.13 18.05 16.60 14.81 13.21 12.20 11.35 10.24 9.84 9.00 8.46 40 35 MSG/MAG and |S21|2 (dB) Freq GHz MSG 30 25 20 15 MAG 10 2 5 |S21| 0 -5 -10 0 5 10 15 FREQUENCY (GHz) Figure 18. MSG/MAG and |S21|2 vs. Frequency at 3V, 80 mA. Notes: 1. The Fmin values are based on a set of 16 noise figure measurements made at 16 different impedances using an ATN NP5 test system. From these measurements a true Fmin is calculated. Refer to the noise parameter application section for more information. 2. Refer to the applications section for additional information on the test fixture used for the measurement of the s and noise parameters. 8 20 ATF-541M4 Typical Scattering Parameters, VDS = 4V, IDS = 60 mA Freq. GHz Mag. S11 Ang. dB S21 Mag. Ang. Mag. S12 Ang. Mag. S22 Ang. MSG/MAG dB 0.1 0.5 0.9 1.0 1.5 1.9 2.0 2.5 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0 11.0 12.0 13.0 14.0 15.0 16.0 17.0 18.0 0.99 0.87 0.78 0.76 0.72 0.70 0.69 0.69 0.69 0.69 0.70 0.70 0.72 0.73 0.75 0.76 0.77 0.79 0.81 0.83 0.85 0.87 0.90 0.90 -17.5 -74.8 -110.7 -117.5 -141.4 -154.3 -159.0 -170.1 -179.6 165.9 153.9 138.8 128.6 118.8 109.5 99.9 90.1 81.5 71.6 62.2 51.9 42.1 32.7 24.2 28.39 26.07 23.18 22.47 19.60 17.79 17.25 15.50 13.98 11.60 9.72 8.31 6.96 5.82 4.80 3.89 3.07 2.27 1.47 0.68 -0.28 -1.39 -2.28 -3.52 26.27 20.12 14.42 13.29 9.55 7.75 7.29 5.96 5.00 3.80 3.06 2.60 2.23 1.95 1.74 1.56 1.42 1.30 1.19 1.08 0.97 0.85 0.77 0.67 168.9 133.9 113.6 109.4 95.1 86.9 85.6 77.7 70.6 57.9 46.4 34.4 23.9 13.5 3.6 -6.6 -17.1 -27.6 -37.8 -48.9 -59.6 -69.7 -78.7 -87.4 0.01 0.03 0.04 0.04 0.04 0.05 0.05 0.051 0.05 0.06 0.07 0.08 0.09 0.10 0.11 0.13 0.14 0.15 0.16 0.17 0.17 0.17 0.18 0.17 81.0 54.5 41.6 39.4 35.2 33.3 33.7 34.2 33.1 33.2 32.4 29.5 26.4 22.7 18.2 13.4 7.2 0.6 -6.5 -13.9 -21.7 -29.9 -37.8 -44.8 0.56 0.44 0.32 0.29 0.21 0.18 0.14 0.11 0.10 0.09 0.09 0.10 0.12 0.13 0.14 0.17 0.20 0.24 0.29 0.35 0.42 0.48 0.55 0.61 -10.7 -44.7 -64.3 -68.3 -82.7 -91.2 -93.8 -103.7 -117.7 -141.7 -166.9 -175.8 163.3 149.1 138.2 126.7 114.9 103.7 93.3 84.3 75.0 67.0 61.1 56.4 34.19 28.27 25.57 25.21 23.78 21.90 21.64 20.68 17.98 15.13 13.17 11.68 10.53 9.44 8.76 8.01 7.30 6.91 6.54 6.22 5.73 5.20 6.31 5.96 Typical Noise Parameters, VDS = 4V, IDS = 60 mA Fmin dB Γopt Mag. Γopt Ang. Rn/50 0.5 0.9 1.0 1.9 2.0 2.4 3.0 3.9 5.0 5.8 6.0 7.0 8.0 9.0 10.0 0.13 0.16 0.20 0.45 0.47 0.57 0.63 0.73 1.05 1.21 1.23 1.43 1.61 1.80 2.01 0.36 0.35 0.22 0.22 0.20 0.24 0.29 0.35 0.37 0.38 0.41 0.45 0.51 0.57 0.61 14.2 13.3 33.7 101.6 102.7 126.0 148.9 172.3 -168.4 -155.9 -151.0 -139.9 -129.9 -114.8 -99.2 0.05 0.06 0.05 0.05 0.06 0.05 0.05 0.04 0.05 0.06 0.08 0.11 0.15 0.26 0.41 Ga dB 27.18 22.95 22.51 19.14 18.66 17.61 16.26 14.58 13.04 12.01 11.05 10.11 9.76 8.95 8.44 40 35 MSG/MAG and |S21|2 (dB) Freq GHz MSG 30 25 20 MAG 15 10 |S21|2 5 0 -5 -10 0 5 10 15 FREQUENCY (GHz) Figure 19. MSG/MAG and |S21|2 vs. Frequency at 4V, 60 mA. Notes: 1. The Fmin values are based on a set of 16 noise figure measurements made at 16 different impedances using an ATN NP5 test system. From these measurements a true Fmin is calculated. Refer to the noise parameter application section for more information. 2. Refer to the applications section for additional information on the test fixture used for the measurement of the s and noise parameters. 9 20 S and Noise Parameter Measurements The position of the reference planes used for the measurement of both S and Noise Parameter measurements is shown in Figure 20. The reference plane can be described as being at the center of both the gate and drain pads. S and noise parameters are measured with a 50 ohm microstrip test fixture made with a 0.010" thickness aluminum substrate. Both source leads are connected directly to ground via a 0.010" thickness metal rib which provides a very low inductance path to ground for both source leads. The inductance associated with the addition of printed circuit board plated through holes and source bypass capacitors must be added to the computer circuit simulation to properly model the effect of grounding the source leads in a typical amplifier design. Reference Plane Source Pin 3 Drain Pin 4 Sx Source Pin 1 Gate Pin 2 Microstrip Transmission Lines Figure 20. Noise Parameter Applications Information The Fmin values are based on a set of 16 noise figure measurements made at 16 different impedances using an ATN NP5 test system. From these measurements, a true Fmin is calculated. Fmin represents the true minimum noise figure of the device when the device is presented with an impedance matching network that transforms the 10 source impedance, typically 50Ω, to an impedance represented by the reflection coefficient Γo. The designer must design a matching network that will present Γo to the device with minimal associated circuit losses. The noise figure of the completed amplifier is equal to the noise figure of the device plus the losses of the matching network preceding the device. The noise figure of the device is equal to Fmin only when the device is presented with Γo. If the reflection coefficient of the matching network is other than Γo, then the noise figure of the device will be greater than Fmin based on the following equation. NF = Fmin + 4 Rn |Γs – Γo | 2 Zo (|1 + Γo| 2) (1 - |Γs| 2) Where Rn/Zo is the normalized noise resistance, Γo is the optimum reflection coefficient required to produce Fmin and Γs is the reflection coefficient of the source impedance actually presented to the device. The losses of the matching networks are non-zero and they will also add to the noise figure of the device creating a higher amplifier noise figure. The losses of the matching networks are related to the Q of the components and associated printed circuit board loss. Γo is typically fairly low at higher frequencies and increases as frequency is lowered. Larger gate width devices will typically have a lower Γo as compared to narrower gate width devices. Typically for FETs , the higher Γo usually infers that an impedance much higher than 50Ω is required for the device to produce Fmin. At VHF frequencies and even lower L Band frequencies, the required impedance can be in the vicinity of several thousand ohms. Matching to such a high impedance requires very hi-Q components in order to minimize circuit losses. As an example at 900 MHz, when airwwound coils (Q>100) are used for matching networks, the loss can still be up to 0.25 dB which will add directly to the noise figure of the device. Using muiltilayer molded inductors with Qs in the 30 to 50 range results in additional loss over the airwound coil. Losses as high as 0.5 dB or greater add to the typical 0.15 dB Fmin of the device creating an amplifier noise figure of nearly 0.65 dB. SMT Assembly The package can be soldered using either lead-bearing or leadfree alloys (higher peak temperatures). Reliable assembly of surface mount components is a complex process that involves many material, process, and equipment factors, including: method of heating (e.g. IR or vapor phase reflow, wave soldering, etc) circuit board material, conductor thickness and pattern, type of solder alloy, and the thermal conductivity and thermal mass of components. Components with a low mass, such as the Minipak 1412 package, will reach solder reflow temperatures faster than those with a greater mass. The recommended leaded solder time-temperature profile is shown in Figure 21. This profile is representative of an IR reflow type of surface mount assembly process. After ramping up from room temperature, the circuit board with components attached to it (held in place with solder paste) passes through one or more preheat zones. The preheat zones increase the temperature of the board and components to prevent thermal shock and begin evaporating solvents from the solder paste. The reflow zone briefly elevates the temperature sufficiently to produce a reflow of the solder. The recommended lead-free reflow profile is shown in Figure 22. The rates of change of temperature for the ramp-up and cooldown zones are chosen to be low enough to not cause deformation of board or damage to components due to thermal shock. The maximum temperature in the reflow zone (Tmax) should not exceed 235° C for leaded solder. Electrostatic Sensitivity FETs and RFICs are electrostatic discharge (ESD) sensitive devices. Agilent devices are manufactured using a very robust and reliable PHEMT process, however, permanent damage may occur to these devices if they are subjected to high-energy electrostatic discharges. Electrostatic charges as high as several thousand volts (which readily accumulate on the human body and on test equipment) can discharge without detection and may result in failure or degradation in performance and reliability. These parameters are typical for a surface mount assembly process for the ATF-541M4. As a general guideline, the circuit board and components should only be exposed to the minimum temperatures and times the necessary to achieve a uniform reflow of solder. Electronic devices may be subjected to ESD damage in any of the following areas: 250 TMAX TEMPERATURE (°C) 200 150 Reflow Zone 100 Preheat Zone Cool Down Zone 50 0 0 60 120 180 240 • Storage & handling • Inspection • Assembly & testing • In-circuit use The ATF-541M4 is an ESD Class 1 device. Therefore, proper ESD precautions are recommended when handling, inspecting, testing, and assembling these devices to avoid damage. Any user-accessible points in wireless equipment (e.g. antenna or battery terminals) provide an opportunity for ESD damage. For circuit applications in which the ATF-541M4 is used as an input or output stage with close coupling to an external antenna, the device should be protected from high voltage spikes due to human contact with the antenna. A good practice, illustrated in Figure 23, is to place a shunt inductor or RF choke at the antenna connection to protect the receiver and transmitter circuits. It is often advantageous to integrate the RF choke into the design of the diplexer or T/R switch control circuitry. 300 TIME (seconds) Figure 21. Leaded Solder Reflow Profile. 350 Peak Temperature Min. 240°C Max. 255°C TEMPERATURE (°C) 300 250 221 150 100 Preheat 130 – 170°C Min. 60s Max. 150s 50 0 0 30 60 90 120 150 180 210 TIME (seconds) Figure 22. Lead-free Solder Reflow Profile. 11 Figure 23. In-circuit ESD Protection. Reflow Time Min. 60s Max. 90s 200 240 270 300 330 360 ATF-541M4 Applications Information Introduction Agilent Technologies’s ATF-541M4 is a low noise enhancement mode PHEMT designed for use in low cost commercial applications in the VHF through 6 GHz frequency range. As opposed to a typical depletion mode PHEMT where the gate must be made negative with respect to the source for proper operation, an enhancement mode PHEMT requires that the gate be made more positive than the source for normal operation. Therefore a negative power supply voltage is not required for an enhancement mode device. Biasing an enhancement mode PHEMT is much like biasing the typical bipolar junction transistor. Instead of a 0.7V base to emitter voltage, the ATF-541M4 enhancement mode PHEMT requires a nominal 0.58V potential between the gate and source for a nominal drain current of 60 mA. Matching Networks The techniques for impedance matching an enhancement mode device are very similar to those for matching a depletion mode device. The only difference is in the method of supplying gate bias. S and Noise Parameters for various bias conditions are listed in this data sheet. The circuit shown in Figure 1 shows a typical LNA circuit normally used for 900 and 1900 MHz applications. (Consult the Agilent Technologies web site for application notes covering specific designs and applications). High pass impedance matching networks consisting of L1/C1 and L4/C4 provide the appropriate match for noise figure, gain, S11 and S22. The high pass structure also provides low frequency gain reduction which can be beneficial from the standpoint of improving out-of-band rejection. 12 Capacitors C2 and C5 provide a low impedance in-band RF bypass for the matching networks. Resistors R3 and R4 provide a very important low frequency termination for the device. The resistive termination improves low frequency stability. Capacitors C3 and C6 provide the RF bypass for resistors R3 and R4. Their value should be chosen carefully as C3 and C6 also provide a termination for low frequency mixing products. These mixing products are as a result of two or more in-band signals mixing and producing third order in-band distortion products. The low frequency or difference mixing products are terminated by C3 and C6. For best suppression of third order distortion products based on the CDMA 1.25 MHz signal spacing, C3 and C6 should be 0.1 uF in value. Smaller values of capacitance will not suppress the generation of the 1.25 MHz difference signal and as a result will show up as poorer two tone IP3 results. C4 C1 INPUT Q1 Zo L1 L4 L2 R4 OUTPUT Zo L3 C2 C5 R3 R5 R1 C3 C6 R2 Whereas a depletion mode PHEMT pulls maximum drain current when Vgs = 0V, an enhancement mode PHEMT pulls only a small amount of leakage current when Vgs = 0V. Only when Vgs is increased above Vto, the device threshold voltage, will drain current start to flow. At a Vds of 3V and a nominal Vgs of 0.58V, the drain current Id will be approximately 60 mA. The data sheet suggests a minimum and maximum Vgs over which the desired amount of drain current will be achieved. It is also important to note that if the gate terminal is left open circuited, the device will pull some amount of drain current due to leakage current creating a voltage differential between the gate and source terminals. Passive Biasing Passive biasing of the ATF-541M4 is accomplished by the use of a voltage divider consisting of R1 and R2 connected to the gate of the device. The voltage for the divider is derived from the drain voltage. This provides a form of voltage feedback (through the use of R3) to help keep drain current constant. Resistor R5 (approximately 10KΩ) is added to limit the gate current of enhancement mode devices such as the ATF-541M4. This is especially important when the device is driven to P1dB or Psat. Vdd Figure 1. Typical ATF-541M4 LNA with Passive Biasing. Bias Networks One of the major advantages of the enhancement mode technology is that it allows the designer to be able to dc ground the source leads and then merely apply a positive voltage on the gate to set the desired amount of quiescent drain current Id. Resistor R3 is calculated based on desired Vds , Ids and available power supply voltage. R3 = VDD – Vds Ids + IBB (1) p VDD is the power supply voltage. Vds is the device drain to source voltage. Ids is the desired drain current. IBB is the current flowing through the R1/R2 resistor voltage divider network. The value of resistors R1 and R2 are calculated with the following formulas R1 = R2 = Vgs IBB (2) p (Vds – Vgs) R1 Vgs (3) p Example Circuit VDD = 5 V Vds = 3 V Ids = 60 mA Vgs = 0.58 V Choose IBB to be at least 10X the maximum expected gate leakage current. IBB was chosen to be 2 mA for this example. Using equations (1), (2), and (3) the resistors are calculated as follows R1 = 290Ω R2 = 1210Ω R3 = 32.3Ω Active Bias Active biasing provides a means of keeping the quiescent bias point constant over temperature and constant over lot to lot variations in device dc performance. The advantage of the active biasing of an enhancement mode PHEMT versus a depletion mode PHEMT is that a negative power source is not required. The techniques of active biasing an enhancement mode device are very similar to those used to bias a bipolar junction transistor. C4 C1 Q1 Zo L4 L2 R5 OUTPUT Zo L1 L3 C2 C5 R4 C3 R6 C7 C6 Q2 Vdd R7 R3 R1 R2 Figure 2. Typical ATF-541M4 LNA with Active Biasing. 13 VE = Vds + (Ids • R4) (1) VDD – VE Ids (2) R3 = p VB = VE – VBE (3) R1 V R1 + R2 DD (4) VDD = IBB (R1 + R2) (5) VB = Rearranging equation (4) provides the following formula R2 = calculates the value of resistor R3 which determines the drain current Ids. In the example R3=23.3Ω. Equation (3) calculates the voltage required at the junction of resistors R1 and R2. This voltage plus the step-up of the base emitter junction determines the regulated Vds. Equations (4) and (5) are solved simultaneously to determine the value of resistors R1 and R2. In the example R1=1450Ω and R2 =1050Ω. Resistor R7 is chosen to be 1 kΩ. This resistor keeps a small amount of current flowing through Q2 to help maintain bias stability. R6 is chosen to be 10 KΩ. This value of resistance is high enough to limit Q1 gate current in the presence of high RF drive levels as experienced when Q1 is driven to the P1dB gain compression point. C7 provides a low frequency bypass to keep noise from Q2 effecting the operation of Q1. C7 is typically 0.1 µF. p R1 (VDD – VB) VB (4A) p and rearranging equation (5) provides the follow formula R1 = IBB An active bias scheme is shown in Figure 2. INPUT R1 and R2 provide a constant voltage source at the base of a PNP transistor at Q2. The constant voltage at the base of Q2 is raised by 0.7 volts at the emitter. The constant emitter voltage plus the regulated VDD supply are present across resistor R3. Constant voltage across R3 provides a constant current supply for the drain current. Resistors R1 and R2 are used to set the desired Vds. The combined series value of these resistors also sets the amount of extra current consumed by the bias network. The equations that describe the circuit’s operation are as follows. VDD V – VB 1 + DD VB ( 9 ) (5A) p Example Circuit VDD = 5 V Vds = 3 V Ids = 60 mA R4 = 10Ω VBE = 0.7 V Equation (1) calculates the required voltage at the emitter of the PNP transistor based on desired Vds and Ids through resistor R4 to be 3.6V. Equation (2) Maximum Suggested Gate Current The maximum suggested gate current for the ATF-541M4 is 2 mA. Incorporating resistor R5 in the passive bias network or resistor R6 in the active bias network safely limits gate current to 500 µA at P1dB drive levels. In order to minimize component count in the passive biased amplifier circuit, the 3 resistor bias circuit consisting of R1, R2, and R5 can be simplified if desired. R5 can be removed if R1 is replaced with a 4.7KΩ resistor and if R2 is replaced with a 27KΩ resistor. This combination should limit gate current to a safe level. For Further Information The information presented here is an introduction to the use of the ATF-541M4 enhancement mode PHEMT. More detailed application circuit information is available from Agilent Technologies. Consult the web page or your local Agilent Technologies sales representative. ATF-541M4 Minipak Model INSIDE Package VAR VAR1 K=5 Z2=85 Z1=30 Var Egn GATE Port G Num=1 C C1 C=0.28 pF TLINP TL3 Z=Z2 Ohm L=23.6 mil K=K A=0.000 F=1 GHz TanD=0.001 TLINP TL1 Z=Z2/2 Ohm L=22 mil K=K A=0.000 F=1 GHz TanD=0.001 TLINP TL2 Z=Z2/2 Ohm L=20 0 mil K=K A=0.000 F=1 GHz TanD=0.001 L L6 L=0.147 nH R=0.001 L L1 L=0.234 nH R=0.001 GaAsFET FET1 Mode1=MESFETM1 Mode=Nonlinear C C2 C=0.046 pF SOURCE Port S1 Num=2 L TLINP L4 TL9 L=0.281 nH Z=Z2 Ohm R=0.001 L=11 mil K=K A=0.000 F=1 GHz TanD=0.001 MSub L L7 L=0.234 nH R=0.001 MSUB MSub2 H=25.0 mil Er=9.6 Mur=1 Cond=1.0E+50 Hu=3.9e+034 mil T=0.15 mil TanD=0 Rough=0 mil SOURCE TLINP TL7 Z=Z2/2 Ohm L=5.2 mil K=K A=0.000 F=1 GHz TanD=0.001 TLINP TL5 Z=Z2 Ohm L=27.5 mil K=K A=0.000 F=1 GHz TanD=0.001 Port S2 Num=4 DRAIN Port D Num=3 This model can be used as a design tool. It has been tested on ADS for various specifications. However, for more precise and accurate design, please refer to the measured data in this data sheet. For future improvements, Agilent reserves the right to change these models without prior notice. ATF-541M4 Die Model Advanced_Curtice2_Model MESFETM1 NFET=yes Rf= PFET=no Gscap=2 Vto=0.3 Cgs=1.732 pF Beta=0.888 Cgd=0.255 pF Lambda=72e-3 Gdcap=2 Alpha=13 Fc=0.65 Tau= Rgd=0.25 Ohm Tnom=16.85 Rd=1.0125 Ohm Idstc= Rg=1.7 Ohm Ucrit=-0.72 Vgexp=1.91 Rs=0.3375 Ohm Gamds=1e-4 Ld= Vtotc= Lg=0.188 nH Betatce= Ls= Rgs=0.25 Ohm Cds=0.273 pF Rc=195 Ohm 14 Crf=0.1 F Gsfwd= Gsrev= Gdfwd= Gdrev= R1= R2= Vbi=0.95 Vbr= Vjr= Is= Ir= Imax= Xti= Eg= N= Fnc=1 MHz R=0.08 P=0.2 C=0.1 Taumdl=no wVgfwd= wBvgs= wBvgd= wBvds= wldsmax= wPmax= AllParams= Ordering Information Part Number No. of Devices Container ATF-541M4-TR1 3000 7” Reel ATF-541M4-TR2 10000 13” Reel ATF-541M4-BLK 100 antistatic bag MiniPak Package Outline Drawing Solder Pad Dimensions 1.44 (0.058) 1.40 (0.056) 3 4 Rx 1.20 (0.048) 1.16 (0.046) 2 1 1.12 (0.045) 1.08 (0.043) 0.82 (0.033) 0.78 (0.031) 0.32 (0.013) 0.28 (0.011) 0.00 Top view 0.00 -0.07 (-0.003) -0.03 (-0.001) 0.70 (0.028) 0.58 (0.023) Side view Dimensions are in millimeteres (inches) 15 0.92 (0.037) 0.88 (0.035) 0.42 (0.017) 1.32 (0.053) 0.38 (0.015) 1.28 (0.051) Bottom view -0.07 (-0.003) -0.03 (-0.001) Device Orientation for Outline 4T, MiniPak 1412 REEL TOP VIEW END VIEW 4 mm CARRIER TAPE Rx Rx Rx Rx 8 mm USER FEED DIRECTION Note: Rx represents Package Marking Code. Device orientation is indicated by package marking. COVER TAPE Tape Dimensions P P2 D P0 E F W C B0 A0 D1 t1 (CARRIER TAPE THICKNESS) Tt (COVER TAPE THICKNESS) K0 5° MAX. A0 DESCRIPTION 5° MAX. B0 SYMBOL SIZE (mm) SIZE (INCHES) CAVITY LENGTH WIDTH DEPTH PITCH BOTTOM HOLE DIAMETER A0 B0 K0 P D1 1.30 ± 0.05 1.53 ± 0.05 0.80 ± 0.05 4.00 ± 0.10 0.50 ± 0.05 0.051 ± 0.002 0.060 ± 0.002 0.031 ± 0.002 0.157 ± 0.004 0.020 ± 0.002 PERFORATION DIAMETER PITCH POSITION D P0 E 1.50 ± 0.10 4.00 ± 0.10 1.75 ± 0.10 0.060 ± 0.004 0.157 ± 0.004 0.069 ± 0.004 CARRIER TAPE WIDTH THICKNESS W t1 8.00 + 0.30 - 0.10 0.254 ± 0.02 0.315 + 0.012 - 0.004 0.010 ± 0.0008 COVER TAPE WIDTH TAPE THICKNESS C Tt 5.40 ± 0.10 0.062 ± 0.001 0.213 ± 0.004 0.0024 ± 0.00004 DISTANCE CAVITY TO PERFORATION (WIDTH DIRECTION) F 3.50 ± 0.05 0.138 ± 0.002 CAVITY TO PERFORATION (LENGTH DIRECTION) P2 2.00 ± 0.05 0.079 ± 0.002 For product information and a complete list of Agilent contacts and distributors, please go to our web site. www.agilent.com/semiconductors E-mail: [email protected] Data subject to change. Copyright © 2002 Agilent Technologies, Inc. March 6, 2002 5988-4025EN