MEMS Airflow Sensor D6F-10A, -20A, -50A Compact, intelligent sensor featuring MEMS technology for precision mass airflow measurement • Precision mass airflow up to 50 LPM • Stable output across full scale • Manifold mounting feature with NBR ‘O’ ring option • Compact size 78 (L) x 30 (W) x 30 (H) mm • Low power consumption • RoHS Compliant Ordering Information Description Mass Flow Sensor Case Applicable Gas Flow Range** Connection Type Thermoplastic resin / Aluminum alloy Air* 0 – 10 LPM Right-angle manifold mount connection 0 – 20 LPM D6F-50A5-000 0 – 10 LPM Straight RC1/4 (1/4” BSPT) D6F-10A6-000 threaded pipe* D6F-20A6-000 0 – 50 LPM --- D6F-20A5-000 0 – 50 LPM 0 – 20 LPM Cable Connector Assembly Model D6F-10A5-000 --- D6F-50A6-000 --- --- D6F-CABLE1 Note: Cable Assembly is sold separately. * Contact Omron for other gases or thread types. **Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm. ■ Application Examples • • • • Industrial processes Medical Respirators and Ventilators MiG and TiG welding systems Anesthesia Delivery • Mass flow controllers • Scientific / test equipment • Fuel cell controls Rating ■ Absolute maximum rating Item Symbol Ratings Unit Power supply VCC 26.4 VDC Output voltage VOUT 6 VDC ■ Electrical Performance Item Term Condition MIN MAX Unit Power supply VCC — 10.8 26.4 VDC Operating temperature TOPR No condensation or icing -10 60 °C Output voltage (max.) VOH VCC = 12 to 24VDC IOH = 0.5mA 5 5.7 VDC Output voltage (min.) VOL VCC = 12 to 24VDC IOL = -0.5mA 0 1 VDC MEMS Airflow Sensor D6F-10A, -20A, -50A 23 Characteristics Model D6F-10A@-000 D6F-20A@-000 D6F-50A@-000 Flow rate @ 0°C and 101.3 kPa 0-10 L/min 0-20 L/min 0-50 L/min Joint type* Manifold mount with ‘O’ Ring (A5 type) or Rc 1/4 (1/4” BSPT threaded)(A6 type)** Case material Thermoplastic resin Applicable Gas** Air Electrical Connection Connector (3 wire) Withstand Pressure (max.) 500 kPa (about 72.5 psi) Accuracy ±3% F.S. max, 25°C Operating Temperature -10 to +60°C (with no icing or condensation) Storage Temperature -30 to +80°C (with no icing or condensation) Operating Humidity 85%RH max. (with no icing or condensation) Output Signal 1 to 5 VDC, Analog Output (non-linear output) Current Consumption 15 mA max. (No-Load with VCC = 12 to 24 VDC, VSS = 0V and 25°C) Insulation Resistance 20MΩ min. at 500 VDC, between lead terminal and case Dielectric Strength 500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and the base Response Time (reference) 150 mS, typical * Contact Omron for other thread types (A6) ** Contact Omron for other gases. Operating Characteristics 6.0 5.0 5.0 5.0 4.0 3.0 2.0 1.0 Output voltage(V) 6.0 Output voltage(V) Output voltage(V) D6F-50A D6F-20A D6F-10A 6.0 4.0 3.0 2.0 2.0 4.0 6.0 8.0 0.0 10.0 2.0 0.0 0.0 0.0 3.0 1.0 1.0 0.0 4.0 4.0 8.0 12.0 16.0 20.0 0.0 10.0 20.0 30.0 40.0 50.0 Flow rate(L/min) Flow rate(L/min) Flow rate(L/min) D6F-10A Flow Rate L/min (normal) 0 2 4 6 8 10 Output Voltage (VDC) 1.00 ±0.12 1.75 ±0.12 2.60 ±0.12 3.45 ±0.12 4.25 ±0.12 5.00 ±0.12 D6F-20A Flow Rate L/min (normal) 0 4 8 12 16 20 Output Voltage (VDC) 1.00 ±0.12 1.93 ±0.12 2.87 ±0.12 3.70 ±0.12 4.41 ±0.12 5.00 ±0.12 D6F-50A Flow Rate L/min (normal) 0 10 20 30 40 50 Output Voltage (VDC) 1.00 ±0.12 2.45 ±0.12 3.51 ±0.12 4.20 ±0.12 4.66 ±0.12 5.00 ±0.12 24 MEMS Airflow Sensor D6F-10A, -20A, -50A Test Results (typical performance) D6F-20A@ (5 samples, repeated 10 times each) 1.0 0.8 Repeatability (%F.S.) 0.6 0.4 0.2 0.0 -0.2 -0.4 -0.6 -0.8 -1.0 0 2 4 6 8 10 12 14 16 18 20 Flow Rate (lpm) Installation: D6F-@A5-000 Recommendation for right-angle, manifold mount connection; Recommended ‘O’ ring for sealing inlet and outlet orifice; Use M3 panhead screws for mounting, and tighten them to a maximum torque of 0.59 N•m. Please seal INLET and OUTLET with ‘O’ rings. Please install the product as shown below. Incorrect mounting may cause product failure and make it impossible to obtain correct measurements. • Material: NBR70 (recommended for all applications including medical and food processing.) • Example part number: JASO part number: CO 0003 • Alternative manufacturers with similar DO and W dimensions may be used Outlet O ring 5.8 1.9 ± 0.07 Inlet MEMS Airflow Sensor D6F-10A, -20A, -50A 25 Dimensions Unit: mm D6F-10A5-000, D6F-20A5-000, D6F-50A5-000 14±0.1 Four, 3.2-dia. holes Mounting Hole Dimensions Four, M3 1: Vcc 2: Vout 3: GND 3.4 78±0.5 66±0.2 66±0.05 Enlarged view 5.7 30.4 Two, 5-dia holes 6 14±0.05 30±0.5 30±0.5 D6F-10A6-000, D6F-20A6-000, and D6F-50A6-000 Mounting Hole Dimensions 12±0.2 1: Vcc Two, M3 2: Vout 3: GND 3.4 78±0.5 66±0.05 66±0.2 Enlarged view 5.7 30.4 Two, M3 screws (Effective depth: 4.5) Tapered pipe thread Two, Rc1/4 (1/4” BPST - British Standard Pipe, Threaded) 6 12±0.05 30±0.5 30±0.5 Applicable Cable for D6F-@A@-000 (Optional - sold separately) part number: D6F-CABLE1 200±35 100±15 Brown wire Black wire Blue wire Housing: Molex - 51021 1. Vcc Terminal: Molex - 50079 2. Vout Wire: 26-28 AWG 3. GND Note: Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information” for correct use. 26 MEMS Airflow Sensor D6F-10A, -20A, -50A MEMO MEMS Airflow Sensor D6F-10A, -20A, -50A All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527. OMRON ON-LINE OMRON ELECTRONIC COMPONENTS LLC Global - http://www.omron.com USA - http://www.components.omron.com 55 E. Commerce Drive, Suite B Schaumburg, IL 60173 847-882-2288 Cat. No. X305-E-1 10/10 MEMS Airflow Sensor Specifications subject to change without notice D6F-10A, -20A, -50A Printed in USA