MOTOROLA MPX7050DP

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SEMICONDUCTOR TECHNICAL DATA
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The new MPX7050 series pressure sensor incorporates all the innovative features of
Motorola’s MPX2000 series family including the patented, single piezoresistive strain
gauge (X–ducer) and on–chip temperature compensation and calibration. In addition, the
MPX7050 series has a high input impedance of typically 10 kΩ for those portable, low
power and battery–operated applications. This device is suitable for those systems in
which users must have a dependable, accurate pressure sensor that will not consume
significant power. The MPX7050 series device is a logical and economical choice for
applications such as portable medical instrumentation, and remote sensing systems with
4 – 20 mAmp transmission.
0 to 50 kPa (0 to 7.25 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Features
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
• Temperature Compensated Over 0°C to +85°C
• Unique Silicon Shear Stress Strain Gauge
• Easy to Use Chip Carrier Package Options
• Available in Differential and Gauge Configurations
• Ratiometric to Supply Voltage
• ± 0.25% Linearity
Application Examples
• Portable Medical Instrumentation
• Remote Sensing Systems
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
VS
3
NOTE: Pin 1 is the notched pin.
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
HIGH
Zin
X–ducer
SENSING
ELEMENT
2
4
PIN NUMBER
Vout+
Vout–
1
Gnd
3
VS
2
+Vout
4
–Vout
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 3
Motorola Sensor Device Data
 Motorola, Inc. 1997
1
MAXIMUM RATINGS
Rating
Symbol
Value
Unit
Overpressure(8) (P1 > P2)
Pmax
200
kPa
Burst Pressure(8) (P1 > P2)
Pburst
500
kPa
Tstg
– 40 to +125
°C
TA
– 40 to +125
°C
Storage Temperature
Operating Temperature
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Symbol
Min
Typ
Max
Unit
Pressure Range(1)
POP
0
—
50
kPa
Supply Voltage(2)
VS
—
10
16
Vdc
Supply Current
Io
—
1.0
—
mAdc
VFSS
38.5
40
41.5
mV
Characteristics
Full Scale Span(3)
Offset(4)
Voff
–1.0
—
1.0
mV
Sensitivity
∆V/∆P
—
0.80
—
mV/kPa
Linearity(5)
—
–0.25
—
0.25
%VFSS
Pressure Hysteresis(5) (0 to 50 kPa)
—
—
± 0.1
—
%VFSS
Temperature Hysteresis(5) (– 40°C to +125°C)
—
—
± 0.5
—
%VFSS
TCVFSS
–1.0
—
1.0
%VFSS
TCVoff
–1.0
—
1.0
mV
Zin
5000
—
15,000
Ω
Zout
2500
—
6000
Ω
Response Time(6) (10% to 90%)
tR
—
1.0
—
ms
Warm–Up
—
—
20
—
ms
Offset Stability(9)
—
—
± 0.5
—
%VFSS
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
Input Impedance
Output Impedance
MECHANICAL CHARACTERISTICS
Symbol
Min
Typ
Max
Unit
Weight (Basic Element Case 344–15)
Characteristics
—
—
2.0
—
Grams
Common Mode Line Pressure(7)
—
—
—
690
kPa
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
LEAST SQUARES FIT
EXAGGERATED
PERFORMANCE
CURVE
RELATIVE VOLTAGE OUTPUT
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
LEAST
SQUARE
DEVIATION
STRAIGHT LINE
DEVIATION
END POINT
STRAIGHT LINE FIT
OFFSET
50
PRESSURE (% FULLSCALE)
0
100
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX7050
series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line.
OUTPUT (mVdc)
40
35
VS = 10 Vdc
TA = 25°C
P1 > P2
30
25
20
SILICONE
DIE COAT
TYP
SPAN
RANGE
(TYP)
MAX
15
10
5
The effects of temperature on Full Scale Span and
Offset are very small and are shown under Operating
Characteristics.
MIN
0
STAINLESS STEEL
METAL COVER
EPOXY
CASE
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
DIE
P1
WIRE BOND
LEAD FRAME
–5
kPa 0
PSI
12.5
1.83
25
3.63
37.5
5.44
50
7.3
OFFSET
(TYP)
DIFFERENTIAL/GAUGE ELEMENT
RTV DIE
BOND
P2
Figure 3. Output versus Pressure Differential
Figure 4. Cross–Sectional Diagram
(not to scale)
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344–15). A silicone gel isolates the die surface and wire bonds from the environment,
while allowing the pressure signal to be transmitted to the silicon diaphragm.
The MPX7050 series pressure sensor operating charac-
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
Motorola Sensor Device Data
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The Motorola
Part Number
MPX pressure sensor is designed to operate with positive
differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Pressure (P1)
Side Identifier
Case Type
MPX7050D
344–15C
Stainless Steel Cap
MPX7050DP
344C–01
Side with Part Marking
MPX7050GP
344B–01
Side with Port Attached
MPX7050GVP
344D–01
Stainless Steel Cap
MPX7050GS
344E–01
Side with Port Attached
MPX7050GVS
344A–01
Stainless Steel Cap
MPX7050GSX
344F–01
Side with Port Attached
MPX7050GVSX
344G–01
Stainless Steel Cap
ORDERING INFORMATION
MPX7050 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
D i T
Device
Type
O i
Options
C
T
Case
Type
Order Number
Device Marking
Basic Element
Differential
Case 344–15
MPX7050D
MPX7050D
Ported Elements
Differential, Dual Ported
Case 344C–01
MPX7050DP
MPX7050DP
Gauge
Case 344B–01
MPX7050GP
MPX7050GP
Gauge, Vacuum
Case 344D–01
MPX7050GVP
MPX7050GVP
Gauge, Stove Pipe
Case 344E–01
MPX7050GS
MPX7050D
Gauge, Vacuum Stove Pipe
Case 344A–01
MPX7050GVS
MPX7050D
Gauge, Axial
Case 344F–01
MPX7050GSX
MPX7050D
Gauge, Vacuum Axial
Case 344G–01
MPX7050GVSX
MPX7050D
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
C
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
POSITIVE
PRESSURE (P1)
R
M
B
–A–
DIM
A
B
C
D
F
G
J
L
M
N
R
N
1
PIN 1
2
3
L
4
–T–
SEATING
PLANE
J
POSITIVE
PRESSURE
(P1)
G
F
D
4 PL
0.136 (0.005)
M
T A
M
INCHES
MIN
MAX
0.595
0.630
0.514
0.534
0.200
0.220
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.695
0.725
30_ NOM
0.475
0.495
0.430
0.450
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
15.11
16.00
13.06
13.56
5.08
5.59
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.40
17.65
18.42
30_ NOM
12.07
12.57
10.92
11.43
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344–15
ISSUE W
PORT #2
VACUUM
PRESSURE
(P2)
–B–
C
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
A
POSITIVE
PRESSURE
(P1)
PIN 1
V
1 2
3 4
K
J
N
R
SEATING
PLANE
S
–T–
G
F
D 4 PL
0.13 (0.005)
M
T B
M
DIM
A
B
C
D
F
G
J
K
N
R
S
V
INCHES
MIN
MAX
0.690
0.720
0.245
0.255
0.780
0.820
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.345
0.375
0.300
0.310
0.178
0.186
0.220
0.240
0.182
0.194
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
17.53
18.28
6.22
6.48
19.81
20.82
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.41
8.76
9.53
7.62
7.87
4.52
4.72
5.59
6.10
4.62
4.93
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344A–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
SEATING
PLANE
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
–T–
U
L
R
H
N
PORT #1
POSITIVE
PRESSURE
(P1)
–Q–
B
1 2
3 4
PIN 1
K
–P–
0.25 (0.010)
T Q
M
S
S
J
F
G
D 4 PL
0.13 (0.005)
C
M
T S
S
Q
S
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.305
0.325
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.230
0.250
0.220
0.240
0.910 BSC
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
7.75
8.26
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
5.84
6.35
5.59
6.10
23.11 BSC
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344B–01
ISSUE B
PORT #1
R
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
V
W
L
H
PORT #2
N
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
–Q–
B
SEATING
PLANE
SEATING
PLANE
1 2 3 4
PIN 1
K
–P–
–T–
–T–
0.25 (0.010)
M
T Q
S
S
F
J
G
D 4 PL
C
0.13 (0.005)
M
T S
S
Q
S
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
V
W
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.405
0.435
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.063
0.083
0.220
0.240
0.910 BSC
0.248
0.278
0.310
0.330
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
10.29
11.05
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
1.60
2.11
5.59
6.10
23.11 BSC
6.30
7.06
7.87
8.38
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344C–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
L
SEATING
PLANE
–T–
R
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
H
PORT #2
VACUUM
(P2)
POSITIVE
PRESSURE
(P1)
N
–Q–
B
1 2
3 4
K
PIN 1
S
C
J
F
–P–
0.25 (0.010)
M
T Q
G
D 4 PL
0.13 (0.005)
S
M
T S
S
Q
S
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.305
0.325
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.158
0.230
0.250
0.220
0.240
0.910 BSC
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
7.75
8.26
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
5.84
6.35
5.59
6.10
23.11 BSC
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344D–01
ISSUE B
PORT #1
POSITIVE
PRESSURE
(P1)
–B–
C
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
A
BACK SIDE
VACUUM
(P2)
DIM
A
B
C
D
F
G
J
K
N
R
S
V
V
4 3
2 1
PIN 1
K
J
N
R
SEATING
PLANE
S
–T–
INCHES
MIN
MAX
0.690
0.720
0.245
0.255
0.780
0.820
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.345
0.375
0.300
0.310
0.178
0.186
0.220
0.240
0.182
0.194
MILLIMETERS
MIN
MAX
17.53
18.28
6.22
6.48
19.81
20.82
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.41
8.76
9.53
7.62
7.87
4.52
4.72
5.59
6.10
4.62
4.93
G
F
D 4 PL
0.13 (0.005)
M
T B
M
STYLE 1:
PIN 1.
2.
3.
4.
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344E–01
ISSUE B
Motorola Sensor Device Data
7
PACKAGE DIMENSIONS — CONTINUED
–T–
C
A
E
–Q–
U
N
V
B
R
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
0.25 (0.010)
M
T Q
M
4
3
2
1
S
K
F
J
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
U
V
INCHES
MIN
MAX
1.080
1.120
0.740
0.760
0.630
0.650
0.016
0.020
0.160
0.180
0.048
0.064
0.100 BSC
0.014
0.016
0.220
0.240
0.070
0.080
0.150
0.160
0.150
0.160
0.440
0.460
0.695
0.725
0.840
0.860
0.182
0.194
MILLIMETERS
MIN
MAX
27.43
28.45
18.80
19.30
16.00
16.51
0.41
0.51
4.06
4.57
1.22
1.63
2.54 BSC
0.36
0.41
5.59
6.10
1.78
2.03
3.81
4.06
3.81
4.06
11.18
11.68
17.65
18.42
21.34
21.84
4.62
4.92
G
D 4 PL
0.13 (0.005)
T P
M
S
Q
STYLE 1:
PIN 1.
2.
3.
4.
S
GROUND
V (+) OUT
V SUPPLY
V (–) OUT
CASE 344F–01
ISSUE B
–T–
C
A
E
–Q–
U
POSITIVE
PRESSURE
(P1)
N
V
B
R
PIN 1
PORT #2
VACUUM
(P2)
–P–
0.25 (0.010)
M
T Q
M
1
2
3
4
S
K
J
F
G
D 4 PL
0.13 (0.005)
M
T P
S
Q
S
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
U
V
INCHES
MIN
MAX
1.080
1.120
0.740
0.760
0.630
0.650
0.016
0.020
0.160
0.180
0.048
0.064
0.100 BSC
0.014
0.016
0.220
0.240
0.070
0.080
0.150
0.160
0.150
0.160
0.440
0.460
0.695
0.725
0.840
0.860
0.182
0.194
STYLE 1:
PIN 1.
2.
3.
4.
MILLIMETERS
MIN
MAX
27.43
28.45
18.80
19.30
16.00
16.51
0.41
0.51
4.06
4.57
1.22
1.63
2.54 BSC
0.36
0.41
5.59
6.10
1.78
2.03
3.81
4.06
3.81
4.06
11.18
11.68
17.65
18.42
21.34
21.84
4.62
4.92
GROUND
V (+) OUT
V SUPPLY
V (–) OUT
CASE 344G–01
ISSUE B
8
Motorola Sensor Device Data
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other
applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola
and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees
arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola and
are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
Motorola Sensor Device Data
9
Mfax is a trademark of Motorola, Inc.
How to reach us:
USA / EUROPE / Locations Not Listed: Motorola Literature Distribution;
P.O. Box 5405, Denver, Colorado 80217. 303–675–2140 or 1–800–441–2447
JAPAN: Nippon Motorola Ltd.; Tatsumi–SPD–JLDC, 6F Seibu–Butsuryu–Center,
3–14–2 Tatsumi Koto–Ku, Tokyo 135, Japan. 81–3–3521–8315
Mfax: [email protected] – TOUCHTONE 602–244–6609
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– US & Canada ONLY 1–800–774–1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852–26629298
INTERNET: http://motorola.com/sps
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MPX7050/D
Motorola Sensor Device
Data