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SEMICONDUCTOR TECHNICAL DATA
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005
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INTEGRATED
PRESSURE SENSOR
15 to 115 kPa (2.2 to 16.7 psi)
0.2 to 4.8 V Output
Motorola’s MPXAZ4115A series sensor integrates on–chip, bipolar op amp circuitry and
thin film resistor networks to provide a high output signal and temperature compensation.
The small form factor and high reliability of on–chip integration make the Motorola pressure
sensor a logical and economical choice for the system designer.
The MPXAZ4115A series piezoresistive transducer is a state–of–the–art, monolithic,
signal conditioned, silicon pressure sensor. This sensor combines advanced
micromachining techniques, thin film metallization, and bipolar semiconductor processing to
provide an accurate, high level analog output signal that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure
sensor chip.
SMALL OUTLINE PACKAGE
MPXAZ4115AC6U
CASE 482A
Features
• Resistant to high humidity and common automotive media
• 1.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller–
Based Systems
• Temperature Compensated from –40° to +125°C
• Durable Thermoplastic (PPS) Surface Mount Package
Application Examples
MPXAZ4115A6U
CASE 482
• Aviation Altimeters
• Industrial Controls
• Engine Control
PIN NUMBER
• Weather Stations and Weather Reporting Devices
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N/C
5
N/C
2
VS
6
N/C
3
Gnd
7
N/C
4
Vout
8
N/C
1
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NOTE: Pins 1, 5, 6, 7, and 8 are not
device connections. Do not connect to
external circuitry or ground. Pin 1 is
noted by the notch in the lead.
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Figure 1. Fully Integrated Pressure Sensor Schematic
Rev 0
Motorola Sensor Device Data
Motorola, Inc. 2001
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MAXIMUM RATINGS(NOTE)
Symbol
Value
Units
Maximum Pressure (P1 P2)
Parametrics
Pmax
400
kPa
Storage Temperature
Tstg
–40° to +125°
°C
Operating Temperature
TA
–40° to +125°
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 P2. Decoupling circuit shown in Figure 3
required to meet Electrical Specifications.)
Characteristic
Pressure Range
Supply
Voltage(1)
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Supply Current
Symbol
Min
Typ
Max
Unit
POP
15
—
115
kPa
VS
4.85
5.1
5.35
Vdc
Io
—
7.0
10
mAdc
Minimum Pressure Offset(2)
@ VS = 5.1 Volts
(0 to 85°C)
Voff
0.135
0.204
0.273
Vdc
Full Scale Output(3)
@ VS = 5.1 Volts
(0 to 85°C)
VFSO
4.725
4.794
4.863
Vdc
Full Scale Span(4)
@ VS = 5.1 Volts
(0 to 85°C)
VFSS
4.521
4.590
4.659
Vdc
Accuracy(5)
(0 to 85°C)
—
—
—
±1.5
%VFSS
V/P
—
45.9
—
mV/kPa
Response Time(6)
tR
—
1.0
—
ms
Output Source Current at Full Scale Output
Io+
—
0.1
—
mAdc
—
—
20
—
ms
—
—
±0.5
—
%VFSS
Sensitivity
Warm–Up
Offset
Time(7)
Stability(8)
NOTES:
1. Device is ratiometric within this specified excitation range.
2. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span
at 25°C due to all sources of error including the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential
pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25°C.
• TcSpan:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Warm–up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.
8. Offset Stability is the product’s output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test.
2
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Motorola Sensor Device Data
Freescale Semiconductor, Inc.
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005
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Figure 3. Recommended power supply decoupling
and output filtering.
For additional output filtering, please refer to
Application Note AN1646.
Figure 2. Cross Sectional Diagram SOP
(not to scale)
Figure 2 illustrates the absolute sensing chip in the basic
chip carrier (Case 482).
Figure 3 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended.
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Figure 4. Output versus Absolute Pressure
Figure 4 shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves
are shown for operation over a temperature range of 0 to
85°C using the decoupling circuit shown in Figure 3. The
output will saturate outside of the specified pressure range.
A gel die coat isolates the die surface and wire bonds
from the environment, while allowing the pressure signal
Motorola Sensor Device Data
to be transmitted to the sensor diaphragm. The gel die
coat and durable polymer package provide a media resistant barrier that allows the sensor to operate reliably in
high humidity conditions as well as environments containing common automotive media. Contact the factory for
more information regarding media compatibility in your
specific application.
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Transfer Function (MPXAZ4115A)
Nominal Transfer Value: Vout = VS x (0.009 x P – 0.095)
± (Pressure Error x Temp. Factor x 0.009 x VS)
VS = 5.1 ± 0.25 Vdc
Temperature Error Band
MPXAZ4115A Series
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NOTE: The Temperature Multiplier is a linear response from 0°C to –40°C and from 85°C to 125°C
Pressure Error Band
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ORDERING INFORMATION — SMALL OUTLINE PACKAGE
Device Type
Options
Case No.
Basic Element
Absolute, Element Only
482
MPXAZ4115A6U
Rails
MPXAZ4115A
Absolute, Element Only
482
MPXAZ4115A6T1
Tape and Reel
MPXAZ4115A
Absolute, Axial Port
482A
MPXAZ4115AC6U
Rails
MPXAZ4115A
Absolute, Axial Port
482A
MPXAZ4115AC6T1
Tape and Reel
MPXAZ4115A
Ported Element
4
MPX Series Order No.
Packing Options
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Marking
Motorola Sensor Device Data
Freescale Semiconductor, Inc.
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INFORMATION FOR USING THE SMALL OUTLINE PACKAGE (CASE 482)
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS
Surface mount board layout is a critical portion of the total
design. The footprint for the surface mount packages must
be the correct size to ensure proper solder connection interface between the board and the package. With the correct
fottprint, the packages will self–align when subjected to a
solder reflow process. It is always recommended to design
boards with a solder mask layer to avoid bridging and shorting between solder pads.
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Figure 5. SOP Footprint (Case 482)
Motorola Sensor Device Data
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SMALL OUTLINE PACKAGE DIMENSIONS
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6
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Motorola Sensor Device Data
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or
guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the
application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental
damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications
and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application
by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are
not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications
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are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
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MPXAZ4115A/D