Semiconductor Qualification Test Report: GaAs HBT-C (QTR: 2013-00253)

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Report Title:
Qualification Test Report
Report Type:
See Attached
Date:
See Attached
QTR: 2013- 00253
Wafer Process: GaAs HBT-C
HMC475
HMC580
HMC589
HMC894
HMC899
HMC935
Rev: 01
QTR: 2013- 00253
Wafer Process: GaAs HBT-C
Rev: 01
Introduction
The testing performed for this report is designed to accelerate the predominant failure mode, electro-migration
(EM), for the devices under test. The devices are stressed at high temperature and DC biased to simulate a lifetime
of use at typical operating temperatures. Using the Arrhenius equation, the acceleration factor (AF) is calculated for
the stress testing based on the stress temperature and the typical use operating temperature.
This report is intended to summarize all of the High Temperature Operating Life Test (HTOL) data for the GaAs
HBT-C process. The FIT/MTTF data contained in this report includes all the stress testing performed on this
process to date and will be updated periodically as additional data becomes available. Data sheets for the tested
devices can be found at www.hittite.com.
Glossary of Terms & Definitions:
1. HTOL: High Temperature Operating Life. This test is used to determine the effects of bias conditions and
temperature on semiconductor devices over time. It simulates the devices’ operating condition in an accelerated
way, through high temperature and/or bias voltage, and is primarily for device qualification and reliability
monitoring. This test was performed in accordance with JEDEC JESD22-A108.
2. Operating Junction Temp (T oj ): Temperature of the die active circuitry during typical operation.
3. Stress Junction Temp (T sj ): Temperature of the die active circuitry during stress testing.
QTR: 2013- 00253
Wafer Process: GaAs HBT-C
Rev: 01
Qualification Sample Selection:
All qualification devices used were manufactured and tested on standard production processes and met pre-stress
acceptance test requirements.
Summary of Qualification Tests:
HMC890 (QTR2013-00020)
TEST
QTY IN
QTY OUT
PASS/FAIL
Initial Electrical
81
81
Complete
HTOL, 1000 hours
81
81
Complete
Post HTOL Electrical Test
81
81
Pass
Bond Pull
10
10
Pass
Die Shear
10
10
Pass
SEM Inspection
5
5
Pass
Metal and Dielectric Thickness
5
5
Pass
NOTES
QTR: 2013- 00253
Wafer Process: GaAs HBT-C
Rev: 01
GaAs HBT-C Failure Rate Estimate
Based on the HTOL test results, a failure rate estimation was determined using the following
parameters:
With device ambient case temp, Tc = 60°C
HMC890 (QTR2013-00020)
Operating Junction Temp (T oj ) =95°C(368 °K)
Stress Junction Temp (T sj ) = 150 °C(423 °K)
Device hours:
HMC890 (QTR2013-00020) = (81 X 1000hrs) = 81,000 hours
For GaAs HBT-C MMIC, Activation Energy = 1.36 eV
Acceleration Factor (AF):
HMC890 (QTR2013-00020) Acceleration Factor = exp[1.36/8.6 e-5(1/368-1/423)] = 267.1
Equivalent hours = Device hours x Acceleration Factor
Equivalent hours = (81,000x267.1) = 2.16x107 hours
QTR: 2013- 00253
Wafer Process: GaAs HBT-C
Rev: 01
Since there were no failures and we used a time terminated test, F=0, and R = 2F+2 = 2
The failure rate was calculated using Chi Square Statistic:
at 60% and 90% Confidence Level (CL), with 0 units out of spec
and a 60°C package backside temp;
Failure Rate
λ 60 = [(χ2) 60 , 2 ]/(2X 2.16x107 )] = 1.8/ 4.32x107 = 4.23x10-8 failures/hour or 42 FIT or MTTF = 2.36x107 Hours
λ 90 = [(χ2) 90 , 2 ]/(2X 2.16x107 )] = 4.6/ 4.32x107 = 1.07x10-7 failures/hour or 107 FIT or MTTF = 9.38x106 Hours