Semiconductor Qualification Test Report: SiGe HBT-A (QTR: 2013-00227)

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Report Title:
Qualification Test Report
Report Type:
See Attached
Date:
See Attached
QTR: 2013- 00227
Wafer Process: SiGe HBT-A
HMC334
HMC426
HMC469
HMC471
HMC474
HMC474
HMC476
HMC476
HMC478
HMC478
HMC478
HMC479
HMC479
HMC481
HMC481
HMC482
HMC495
HMC496
HMC497
HMC548
HMC548
HMC597
Rev: 03
QTR: 2013- 00227
Wafer Process: SiGe HBT-A
Rev: 03
Introduction
The testing performed for this report is designed to accelerate the predominant failure mode, electro-migration
(EM), for the devices under test. The devices are stressed at high temperature and DC biased to simulate a
lifetime of use at typical operating temperatures. Using the Arrhenius equation, the acceleration factor (AF) is
calculated for the stress testing based on the stress temperature and the typical use operating temperature.
This report is intended to summarize all of the High Temperature Operating Life Test (HTOL) data for the SIGE
HBT-A process. The FIT/MTTF data contained in this report includes all the stress testing performed on this
process to date and will be updated periodically as additional data becomes available. Data sheets for the tested
devices can be found at www.hittite.com.
Glossary of Terms & Definitions:
1.
HTOL: High Temperature Operating Life. This test is used to determine the effects of bias conditions and
temperature on semiconductor devices over time. It simulates the devices’ operating condition in an
accelerated way, through high temperature and/or bias voltage, and is primarily for device qualification and
reliability monitoring. This test was performed in accordance with JEDEC JESD22-A108D.
2. Operating Junction Temp (T oj ): Temperature of the die active circuitry during typical operation.
3. Stress Junction Temp (T sj ): Temperature of the die active circuitry during stress testing.
Rev: 03
QTR: 2013- 00227
Wafer Process: SiGe HBT-A
Qualification Sample Selection:
All qualification devices used were manufactured and tested on standard production processes and met pre-stress
acceptance test requirements.
Summary of Qualification Tests:
HMC481 Qualification (QTR2004-00007)
TEST
QTY IN
QTY OUT
PASS/FAIL
Initial Electrical
96
96
Complete
HTOL, 1000 hours
96
96
Complete
Post Electrical Test
96
96
Pass
QTY IN
QTY OUT
PASS/FAIL
Initial Electrical
81
81
Complete
HTOL, 1000 hours
81
81
Complete
Post Electrical Test
81
81
Pass
NOTES
HMC2169 Qualification (QTR2013-00339)
TEST
NOTES
Rev: 03
QTR: 2013- 00227
Wafer Process: SiGe HBT-A
HMC2170 Qualification (QTR2013-00339)
TEST
QTY IN
QTY OUT
PASS/FAIL
Initial Electrical
81
81
Complete
HTOL, 1000 hours
81
81
Complete
Post Electrical Test
81
81
Pass
NOTES
HMC6XXX (QTR2013-00340)
TEST
QTY IN QTY OUT
PASS / FAIL
Initial Electrical
6
6
Complete
HTOL, 5039 hours
6
6
Complete
Post HTOL Electrical Test
6
6
Pass
NOTES
HMC6XXX (QTR2013-00340)
TEST
QTY IN QTY OUT
PASS / FAIL
Initial Electrical
14
14
Complete
HTOL, 2000 hours
14
14
Complete
Post HTOL Electrical Test
14
14
Pass
NOTES
Rev: 03
QTR: 2013- 00227
Wafer Process: SiGe HBT-A
HMC597 (QTR2013-00360)
TEST
QTY IN QTY OUT
PASS / FAIL
Initial Electrical
318
318
Complete
HTOL, 1000 hours
318
318
Complete
Post HTOL Electrical Test
318
318
Pass
NOTES
QTR: 2013- 00227
Wafer Process: SiGe HBT-A
Rev: 03
SIGE HBT-A Failure Rate Estimate
Based on the HTOL test results, a failure rate estimation was determined using the following
parameters:
With device case temp, T c = 60°C
HMC481 (QTR2004-00007)
Operating Junction Temp (Toj ) = 111°C (384°K)
Stress Junction Temp (Tsj ) = 191°C (464°K)
HMC2169 (QTR2013-00339)
Operating Junction Temp (Toj ) = 81°C (384°K)
Stress Junction Temp (Tsj ) = 131°C (404°K)
HMC2170 (QTR2013-00339)
Operating Junction Temp (Toj ) = 77°C (350°K)
Stress Junction Temp (Tsj ) = 130°C (403°K)
HMC6XXX (QTR2013-00340)
Operating Junction Temp (Toj ) = 69°C (342°K)
Stress Junction Temp (Tsj ) = 99°C (372°K)
HMC597 (QTR2013-00360)
Operating Junction Temp (Toj ) = 69°C (342°K)
Stress Junction Temp (Tsj ) = 125°C (398°K)
Device hours:
HMC481 (QTR2004-00007) = (96 X 1000hrs) = 96,000 hours
HMC2169 (QTR2013-00339) = (81 X 1000hrs) = 81,000 hours
HMC2170 (QTR2013-00339) = (81 X 1000hrs) = 81,000 hours
HMC6XXX (QTR2013-00340) = (6 X 5039hrs) = 30,234 hours
HMC6XXX (QTR2013-00340) = (14 X 2000hrs) = 28,000 hours
HMC597 (QTR2013-00360) = (318 X 1000hrs) = 318,000 hours
For SIGE HBT-A MMIC, Activation Energy = 0.7 eV
QTR: 2013- 00227
Wafer Process: SiGe HBT-A
Rev: 03
Acceleration Factor (AF):
HMC481 (QTR2004-00007) Acceleration Factor = exp[0.7/8.6x10-5(1/384-1/464)] = 65.1
HMC2169 (QTR2013-00339) Acceleration Factor = exp[0.7/8.6x10-5(1/384-1/464)] = 25.8
HMC2170 (QTR2013-00339) Acceleration Factor = exp[0.7/8.6x10-5(1/384-1/464)] = 33.0
HMC6XXX (QTR2013-00340) Acceleration Factor = exp[0.7/8.6x10-5(1/342-1/372)] = 9.0
HMC597 (QTR2013-00360) Acceleration Factor = exp[0.7/8.6x10-5(1/342-1/398)] = 45.9
Equivalent hours = Device hours x Acceleration Factor
Equivalent hours = (96,000 x 65.1)+(81,000 x 25.8)+(81,000 x 33.0)+(30,234 x 9.0)+(28,000 x 9.0)
+(318,000 x 45.9) = 2.61x107 hours
Since there were no failures and we used a time terminated test, F=0, and R = 2F+2 = 2
The failure rate was calculated using Chi Square Statistic:
at 60% and 90% Confidence Level (CL), with 0 units out of spec
and a 60°C package backside temp;
Failure Rate
7
7
-8
7
λ 60 = [(χ2) 60 , 2 ]/(2X 2.61x10 )] = 1.83/ 5.23x10 = 3.50x10 failures/hour or 35.0 FIT, or MTTF = 2.86x10 hours
λ 90 = [(χ2) 90 , 2 ]/(2X 2.61x107 )] = 4.61/ 5.23x107 = 8.82x10-8 failures/hour or 88.2 FIT, or MTTF = 1.13x107 hours