Order this document by MPX2300D/D SEMICONDUCTOR TECHNICAL DATA " !& #$$&# $!# !# $"!$ $ #$$&# ""%! $ Motorola has developed a low cost, high volume, miniature pressure sensor package which is ideal as a sub–module component or a disposable unit. The unique concept of the Chip Pak allows great flexibility in system design while allowing an economic solution for the designer. This new chip carrier package uses Motorola’s unique sensor die with its patented, piezoresistive implant technology, along with the added feature of on–chip, thin–film temperature compensation and calibration. PRESSURE SENSORS Features: • Low Cost • Patented piezoresistive strain gauge implant, temperature compensation and calibration all integrated on a single, monolithic sensor die. • Pressure Range Available: 0–300 mmHg • Polysulfone (Mindell S–1000) Case Material (Medical, Class VI Approved) CHIP PAK ELEMENT CASE 423–03 Style 1 Motorola is offering the Chip Pak option package. Application–specific parts will have an “SPX” prefix, followed by a four digit number, unique to the specific customer. Devices will be shipped in a tape and reel packaging. NOTE: The die and wire bonds are exposed on the front side of the Chip Pak (pressure is applied to the backside of the device). Front side die and wire protection must be provided in the customer’s housing. Use caution when handling the devices during all processes. Pin Number, Style 1 1 2 3 4 VS S+ S– Ground MAXIMUM RATINGS Rating Symbol Value Unit Pmax 125 PSI Burst Pressure Pburst 1000 kPa Supply Voltage VSmax 10 Vdc Tstg 85 °C TA + 15 to + 40 °C Overpressure (Backside) Storage Temperature Operating Temperature Motorola’s MPX2300D Pressure Sensors. Motorola’s MPX2300D pressure sensor has been designed for medical usage by combining the performance of Motorola’s shear stress pressure sensor design and the use of biomedically approved materials. Materials with a proven history in medical situations have been chosen to provide a sensor that can be used with confidence in applications, such as invasive blood pressure monitoring. It can be sterilized using ethylene oxide. The portions of the pressure sensor that are required to be biomedically approved are the rigid housing and the gel coating. The rigid housing is molded from a white, medical grade polysulfone that has passed extensive biological testing including: tissue culture test, rabbit implant, hemolysis, intracutaneous test in rabbits, and system toxicity, USP. A silicone dielectric gel that has been used extensively in implants covers the silicon piezoresistive sensing element. The gel is a nontoxic, nonallergenic polymer system which passes pyrogen testing, as well as meeting all USP XX Biological Testing Class VI requirements. The properties of the gel allow it to transmit pressure uniformly to the diaphragm surface, while isolating the internal electrical connections from the corrosive effects of fluids, such as saline solution. The gel provides electrical isolation sufficient to withstand defibrillation testing, as specified in the proposed Association for the Advancement of Medical Instrumentation (AAMI) Standard for blood pressure transducers. A biomedically approved opaque filler in the gel prevents bright operating room lights from affecting the performance of the sensor. REV 1 Sensor Motorola Motorola, Inc. 1995 Device Data 1 MPX2300D OPERATING CHARACTERISTICS (VS = 6 Vdc, TA = 25°C unless otherwise noted) Characteristics Symbol Min Typ Max Unit POP 0 — 300 mmHg Supply Voltage(8) VS — 6.0 10 Vdc Supply Current Io — 1.0 — mAdc Voff – 0.75 — 0.75 mV — 4.95 5.0 5.05 µV/V/mmHg VFSS 2.976 3.006 3.036 mV — – 2.0 — 2.0 TCS – 0.1 — + 0.1 %/°C TCVFSS – 0.1 — + 0.1 %/°C TCVoff – 9.0 — + 9.0 µV/°C Zin 1800 — 4500 Ω Output Impedance Zout 270 — 330 Ω RCAL (150 kΩ)(9) RCAL 97 100 103 mmHg Response Time(5) (10% to 90%) tR — 1.0 — ms Temperature Error Band — 0 — 85 °C Stability(6) — — ± 0.5 — %VFSS Symbol Min Typ Max Unit Weight (Case 423) — — 170 — mg Warm–Up — — 15 — Sec Pressure Range Zero Pressure Offset Sensitivity Full Scale Span(1) Linearity + Hysteresis Temperature Effect on Sensitivity Temperature Effect on Full Scale Span Temperature Effect on Offset(4) Input Impedance MECHANICAL CHARACTERISTICS Characteristics NOTES: 1. Measured at 6.0 Vdc excitation for 100 mmHg pressure differential. VFSS and FSS are like terms representing the algebraic difference between full scale output and zero pressure offset. 2. Maximum deviation from end–point straight line fit at 0 and 300 mmHg. 3. Slope of end–point straight line fit to full scale span at 0°C and + 85°C relative to + 25°C. 4. Slope of end–point straight line fit to zero pressure offset at 0°C and + 85°C relative to + 25°C. 5. For a 0 to 300 mmHg pressure step change. 6. Stability is defined as the maximum difference in output at any pressure within POP and temperature within +10°C to + 85°C after: a. 1000 temperature cycles, –40°C to +125°C. b. 1.5 million pressure cycles, 0 to 300 mmHg. 7. Operating characteristics based on positive pressure differential relative to the vacuum side (gauge/differential). 8. Recommended voltage supply: 6 V ± 0.2 V, regulated. Sensor output is ratiometric to the voltage supply. Supply voltages above +10 V may induce additional error due to device self–heating. 9. Offset measurement with respect to the measured sensitivity when a 150k ohm resistor is connected to VS and S+ output. 2 Motorola Sensor Device Data MPX2300D PACKAGE DIMENSIONS A M RADIUS R C Z L F N B S 1 2 3 V 4 K Q Z W –X– 0.36 (0.014) M T X Y 0.13 (0.005) M T M –T– 23 PL J D G U H –Y– E NOTE 4 SECTION Z–Z FRONT VIEW NOTES: 10. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 11. CONTROLLING DIMENSION: INCH. 12. 24 UNITS PER STRIP AT 8.89 (0.350) PITCH. 13. OVERALL LENGTH OF STRIP EQUALS 212.7-214.00 (8.375-8.425). AC F AA AB AD BACK VIEW DIM A B C D E F G H J K L M N Q R S U V W AA AB AC AD STYLE 1: PIN 1. 2. 3. 4. INCHES MIN MAX 0.240 0.260 0.350 0.370 0.140 0.150 0.012 0.020 0.088 0.102 0.123 0.128 0.045 0.055 0.037 0.047 0.007 0.011 0.120 0.140 0.095 0.105 0.165 0.175 0.223 0.239 0.055 0.065 0.048 0.052 0.745 0.755 0.175 BSC 0.105 0.115 0.050 BSC 0.095 0.107 0.015 0.035 0.120 0.175 0.100 0.115 MILLIMETERS MIN MAX 6.10 6.60 8.89 9.40 3.56 3.81 0.30 0.51 2.24 2.59 3.12 3.25 1.14 1.40 0.94 1.19 0.18 0.28 3.05 3.56 2.41 2.67 4.19 4.45 5.66 6.07 1.40 1.65 1.22 1.32 18.92 19.18 4.44 BSC 2.67 2.92 1.27 BSC 2.41 2.72 0.38 0.89 3.05 4.45 2.54 2.92 VCC +OUT –OUT GROUND CASE 423–03 ISSUE B Motorola Sensor Device Data 3 MPX2300D PACKAGE DIMENSIONS — CONTINUED A M C L F N B 1 2 3 V 4 K –T– D G J H FRONT VIEW E END VIEW NOTES: 14. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 15. CONTROLLING DIMENSION: INCH. AC F AA AB AD STYLE 1: PIN 5. 6. 7. 8. BACK VIEW VCC +OUT –OUT GROUND DIM A B C D E F G H J K L M N Q R V AA AB AC AD INCHES MIN MAX 0.240 0.260 0.350 0.370 0.140 0.150 0.012 0.020 0.088 0.102 0.123 0.128 0.045 0.055 0.037 0.047 0.007 0.011 0.120 0.140 0.095 0.105 0.165 0.175 0.223 0.239 0.055 0.065 0.048 0.052 0.105 0.115 0.095 0.107 0.015 0.035 0.120 0.175 0.100 0.115 MILLIMETERS MIN MAX 6.10 6.60 8.89 9.40 3.56 3.81 0.30 0.51 2.24 2.59 3.12 3.25 1.14 1.40 0.94 1.19 0.18 0.28 3.05 3.56 2.41 2.67 4.19 4.45 5.66 6.07 1.40 1.65 1.22 1.32 2.67 2.92 2.41 2.72 0.38 0.89 3.05 4.45 2.54 2.92 CASE 423A–01 ISSUE O Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different applications. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. 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ASIA PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Center, No. 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 4 ◊ *MPX2300D/D* Motorola Sensor Device Data MPX2300D/D