Freescale Semiconductor Technical Data MPXM2010 Rev 4, 09/2005 10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors MPXM2010 SERIES The MPXM2010 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output – directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. FREESCALE PREFERRED DEVICE 0 to 10 kPa (0 to 1.45 psi) 25 mV FULL SCALE SPAN (TYPICAL) Features • • • • Temperature Compensated Over 0°C to +85°C Available in Easy-to-Use Tape & Reel Ratiometric to Supply Voltage Gauge Ported & Non Ported Options Application Examples • Respiratory Diagnostics • Air Movement Control • Controllers • Pressure Switching MPXM2010D/DT1 CASE 1320-02 Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip. ORDERING INFORMATION Device Type/Order No. Options MPXM2010GS/GST1 CASE 1320A-02 Case No. MPXM2010D Non-ported 1320 MPXM2010DT1 Non-ported, Tape and Reel 1320 MPXM2010GS Ported 1320A 1 GND 3 VS MPXM2010GST1 Ported, Tape and Reel 1320A 2 +Vout 4 –Vout PIN NUMBERS VS 3 Thin Film Temperature Compensation and Calibration Circuitry Sensing Element 2 4 +Vout –Vout 1 GND Figure 1. Fully Integrated Pressure Sensor Schematic © Freescale Semiconductor, Inc., 2005. All rights reserved. VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. NOTE: Preferred devices are Freescale recommended choices for future use and best overall value. Table 1. Maximum Ratings(1) Rating Symbol Value Unit Maximum Pressure PMAX 75 kPa Storage Temperature TSTG –40° to +125° °C TA –40° to +125° °C Operating Temperature 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPXM2010 2 Sensors Freescale Semiconductor Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25°C.) Characteristic Symbol Min Typ Max Unit POP 0 — 10 kPa VS — 10 16 Vdc Io — 6.0 — mAdc VFSS 24 25 26 mV Voff –1.0 — 1.0 mV ∆V/∆P — 2.5 — mV/kPa — –1.0 — 1.0 %VFSS — — ±0.1 — %VFSS — — ±0.5 — %VFSS TCVFSS –1.0 — 1.0 %VFSS TCVoff –1.0 — 1.0 mV Input Impedance Zin 1000 — 2550 Ω Output Impedance Zout 1400 — 3000 Ω tR — 1.0 — ms — — 20 — ms — — ±0.5 — %VFSS Pressure Range(1) Supply Voltage (2) Supply Current Full Scale Span (3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis (5) (0 to 10 kPa) Temperature Hysteresis5 (–40°C to +125°C) (5) Temperature Effect on Full Scale Span Temperature Effect on Offset(5) Response Time (6) (10% to 90%) Warm-Up Offset Stability(7) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescale's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. MPXM2010 Sensors Freescale Semiconductor 3 Least Square Deviation Least Squares Fit Relative Voltage Output Exaggerated Performance Curve Straight Line Deviation End Point Straight Line Fit Offset 0 50 100 Pressure (% Full Scale) Figure 2. Linearity Specification Comparison ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2010 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. VS = 10 Vdc TA = 25°C 30 25 Output (mVdc) A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. 20 TYP 15 Span Range (Typical) MAX 10 5 MIN 0 -5 kPa PSI 2.5 0.362 5 0.725 7.5 1.09 10 1.45 Offset (Typical) Figure 3. Output versus Pressure Differential MPXM2010 4 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1320-02 ISSUE B MPXM2010 Sensors Freescale Semiconductor 5 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320-02 ISSUE B MPXM2010 6 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PIN 4 PIN 1 PAGE 1 OF 2 CASE 1320A-02 ISSUE A MPXM2010 Sensors Freescale Semiconductor 7 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320A-02 ISSUE A MPXM2010 8 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com E-mail: [email protected] USA/Europe or Locations Not Listed: Freescale Semiconductor Technical Information Center, CH370 1300 N. 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