KAF-6303E Performance Specification KAF- 6303E 3072 (H) x 2048 (V) Pixel Enhanced Response Full-Frame CCD Image Sensor Performance Specification Eastman Kodak Company Image Sensor Solutions Rochester, New York 14650-2010 Revision 2 October 15, 2001 Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] KAF-6303E Performance Specification TABLE OF CONTENTS 1.1 Features.............................................................................................................................................. 3 1.2 Description......................................................................................................................................... 3 1.3 Image Acquisition.............................................................................................................................. 4 1.4 Charge Transport ............................................................................................................................... 4 1.5 Output Structure..................................................................................................................................4 1.6 Dark Reference Pixels .......................................................................................................................4 1.7 Dummy Pixels. ...................................................................................................................................4 2.1 Package Drawing ............................................................................................................................... 5 2.2 Pin Description .................................................................................................................................. 6 3.1 Absolute Maximum Ratings .............................................................................................................. 7 3.2 DC Operating Conditions .................................................................................................................. 8 3.3 AC Operating Conditions .................................................................................................................. 9 3.4 AC Timing Conditions ...................................................................................................................... 9 4.1 Performance Specifications ............................................................................................................. 11 4.2 Typical Performance Characteristics Spectral Response ................................................................ 12 4.3 Defect Classification........................................................................................................................ 13 5.1 Quality Assurance and Reliability ................................................................................................... 14 5.2 Ordering Information ....................................................................................................................... 14 Revision Changes ................................................................................................................................. 15 FIGURES Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Functional Block Diagram Package Diagram Package Pin Designations Recommended Output Structure Load Diagram Timing Diagrams 3 5 6 8 10 Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 2 Revision No. 2 KAF-6303E Performance Specification 1.1 current without compromising charge capacity. The transparent gate results in spectral response increased ten times at 400nm, compared to a front side illuminated standard polysilicon gate technology. The sensitivity is increased 50% over the rest of the visible wavelengths. Features = 6M Pixel Area CCD = 3072H x 2048V (9 µm) Pixels Transparent Gate True Two Phase Technology = = = = 1.2 (Enhanced Spectral Response) 27.65mm H x 18.48mm V Photosensitive Area 2-Phase Register Clocking 100% Fill Factor Low Dark Current ( <10pA/cm2 @ 25oC) Total chip size is 29.0 mm x 19.1 mm and is housed in a 26-pin, 0.88” wide DIL ceramic package with 0.1” pin spacing. The sensor consists of 3088 parallel (vertical) CCD shift registers each 2056 elements long. These registers act as both the photosensitive elements and as the transport circuits that allow the image to be sequentially read out of the sensor. The elements of these registers are arranged into a 3072 x 2048 photosensitive array surrounded by a light shielded dark reference of 16 columns and 8 rows. The parallel (vertical) CCD registers transfer the image one line at a time into a single 3100 element (horizontal) CCD shift register. The horizontal register transfers the charge to a single output amplifier. The output amplifier is a two-stage source follower that converts the photo-generated charge to a voltage for each pixel . Description The KAF-6303E is a high performance monochrome area CCD (charge-coupled device) image sensor with 3072H x 2048V photo active pixels designed for a wide range of image sensing applications in the 0.3 nm to 1.0 nm wavelength band. Typical applications include military, scientific, and industrial imaging. A 74dB dynamic range is possible operating at room temperature. The sensor is built with a true two-phase CCD technology. This technology simplifies the support circuits that drive the sensor and reduces the dark 4 Dark lines φ= V 1 φ= V 2 KA F - 6303E U sable Active Image Area 3072(H) x 2048(V) Guard 9 x 9 µm pixels 3:2 aspect ratio V rd φR V dd V out V ss 4 Dark lines 3072 Active Pixels/Line 10 Dark 6 Dark φ H1 φ H2 2 Inactive 10 Inactive Sub V og Figure 1 - Functional Block Diagram Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 3 Revision No. 2 KAF-6303E Performance Specification 1.3 1.5 Image Acquisition Charge presented to the floating diffusion (FD) is converted into a voltage and current amplified in order to drive off-chip loads. The resulting voltage change seen at the output is linearly related to the amount of charge placed on FD. Once the signal has been sampled by the system electronics, the reset gate (φR) is clocked to remove the signal and FD is reset to the potential applied by Vrd. More signal at the floating diffusion reduces the voltage seen at the output pin. In order to activate the output structure, an off-chip load must be added to the Vout pin of the device - see Figure 4. An electronic representation of an image is formed when incident photons falling on the sensor plane create electron-hole pairs within the sensor. These photon induced electrons are collected locally by the formation of potential wells at each photogate or pixel site. The number of electrons collected is linearly dependent on light level and exposure time and non-linearly dependent on wavelength. When the pixel's capacity is reached, excess electrons will leak into the adjacent pixels within the same column. This is termed blooming. During the integration period, the φV1 and φV2 register clocks are held at a constant (low) level. See Figure 5. - Timing Diagrams. 1.4 Output Structure 1.6 Dark Reference Pixels Surrounding the peripheral of the device is a border of light shielded pixels. This includes 6 leading and 10 trailing pixels on every line excluding dummy pixels. There are also 4 full dark lines at the start of every frame and 4 full dark lines at the end of each frame. Under normal circumstances, these pixels do not respond to light. However, dark reference pixels in close proximity to an active pixel, or the outer bounds of the chip (including the first two lines out), can scavenge signal depending on light intensity and wavelength and therefore will not represent the true dark signal. Charge Transport Referring again to Figure 5 - Timing Diagrams, the integrated charge from each photogate is transported to the output using a two step process. Each line (row) of charge is first transported from the vertical CCD's to the horizontal CCD register using the φV1 and φV2 register clocks. The horizontal CCD is presented a new line on the falling edge of φV2 while φH1 is held high. The horizontal CCD's then transport each line, pixel by pixel, to the output structure by alternately clocking the φH1 and φH2 pins in a complementary fashion. On each falling edge of φH2 a new charge packet is transferred onto a floating diffusion and sensed by the output amplifier 1.7 Dummy Pixels Within the horizontal shift register are 10 leading and 2 trailing additional shift phases which are not associated with a column of pixels from the vertical register. These pixels contain only horizontal shift register dark current signal and do not respond to light. A few leading dummy pixels may scavenge false signal depending on operating conditions. Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 4 Revision No. 2 KAF-6303E Performance Specification 2.1 Package Drawing Figure 2 - Package Drawing Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 5 Revision No. 2 KAF-6303E Performance Specification 2.2 Pin Description Pin Symbol 1, 13, 14, 15, 26 2 Vsub Description Pin Symbol Substrate (Ground) 10 φH1 Horizontal CCD Clock - Phase 1 Vout Video Output 11 Horizontal CCD Clock - Phase 2 3 Vdd Amplifier Supply φH2 φV1 4 Vrd Reset Drain φV2 Vertical CCD Clock - Phase 2 5 6 7, 8, 9, 12 φR Vss N/C Reset Clock Amplifier Supply Return No connection (open pin) 16, 17, 22, 23 18, 19, 20, 21 24 25 Pin 1 Vguard Vog Description Vertical CCD Clock - Phase 1 Guard Ring Output Gate 26 Vsub Vsub 1 Vout 2 Vdd 3 24 Vguard 4 23 φ V1 φR 5 22 φ V1 Vss 6 21 φ V2 N/C 7 20 φ V2 N/C 8 19 φ V2 N/C 9 18 φ V2 φ H1 10 17 φ V1 φ H2 11 16 φ V1 N/C 12 15 Vsub Vsub 13 14 Vsub Vrd 25 Vog Pixel 1,1 Figure 3 - Package Pin Designations Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 6 Revision No. 2 KAF-6303E Performance Specification 3.1 Absolute Maximum Ratings Description Symbol Diode Pin Voltages Gate Pin Voltages - Type 1 Gate Pin Voltages - Type 2 Inter-Gate Voltages Output Bias Current Output Load Capacitance Storage Temperature Humidity Vdiode Vgate1 Vgate2 Vg-g Iout Cload T RH Notes: 1. 2. 3. 4. 5. 6. 7. Min. 0 -16 0 0 5 Max. 20 16 16 16 -10 15 70 90 Units Notes V V V V mA pF o C % 1, 2 1, 3 1, 4 5 6 6 7 Referenced to pin Vsub. Includes pins: Vrd, Vdd, Vss, Vout, Vguard. Includes pins: φV1, φV2, φH1, φH2. Includes pins: φR, Vog. Voltage difference between overlapping gates. Includes: φV1 to φV2, φH1 to φH2, φV2 to φH1, φH2 to Vog. Avoid shorting output pins to ground or any low impedance source during operation. T=25°C. Excessive humidity will degrade MTTF. CAUTION: This device contains limited protection against Electrostatic Discharge (ESD). Devices should be handled in accordance with strict ESD control procedures for Class 0 devices. Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 7 Revision No. 2 KAF-6303E Performance Specification 3.2 DC Operating Conditions Description Reset Drain Output Amplifier Return Output Amplifier Supply Substrate Output Gate Guard Ring Video Output Current Symbol Min. Nom. Max. Vrd Vss Vdd Vsub Vog Vguard Iout 10.5 1.5 14.5 0 3.75 8.0 11 2.0 15 0 4.0 10.0 -5 11.5 2.5 15.5 0 5.0 12.0 -10 Units V V V V V V mA Max DC Current (mA) 0.01 0.45 Iout 0.01 0.01 0.01 - Notes 1 Notes: 1. An output load sink must be applied to Vout to activate output amplifier - see Figure below. +15V 0.1uF ~5ma Vout 2N3904 or equivalent Buffered Output 140Ω 1k Ω Figure 4 - Recommended Output Structure Load Diagram Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 8 Revision No. 2 KAF-6303E Performance Specification 3.3 AC Operating Condition Description Symbol Level Vertical CCD Clock - Phase 1 φV1 Vertical CCD Clock - Phase 2 φV2 Horizontal CCD Clock - Phase 1 φH1 Horizontal CCD Clock - Phase 2 φH2 Reset Clock φR Low High Low High Low High Low High Low High Min. Nom. -10.5 0.5 -10.5 0.5 -6.0 4.0 -6.0 4.0 -4.0 3.5 Max. -10.0 1.0 -10.0 1.0 -4.0 6.0 -4.0 6.0 -3.0 4.0 Units -9.5 1.5 -9.5 1.5 -3.5 6.5 -3.5 6.5 -2.0 5.0 V V V V V V V V V V Effective Capacitance 820 nF (all φV1 pins) 820 nF (all φV2 pins) 400 pF Notes 400 pF 10pF Notes: 1. All pins draw less than 10uA DC current. 2. Capacitance values relative to VSUB. 3.4 AC Timing Conditions Description Symbol φH1, φH2 Clock Frequency φV1, φV2 Clock Frequency Pixel Period (1 Count) φH1, φH2 Setup Time φV1, φV2 Clock Pulse Width Reset Clock Pulse Width Readout Time Integration Time Line Time Min. Nom. Max. Units Notes 15 50 MHz kHz ns us us ns ms 1, 2, 3 1, 2, 3 67 0.5 10 10 531 4 25 250 1 20 20 1719 258.2 836 fH fV te tφHS tφV tφR treadout tint tline us 2 4 5 6 7 Notes: 1. 50% duty cycle values. 2. CTE may degrade above the nominal frequency. 3. Rise and fall times (10/90% levels) should be limited to 5-10% of clock period. Cross-over of register clocks should be between 40-60% of amplitude. 4. φR should be clocked continuously. 5. 6. 7. treadout = ( 2056 * tline ) Integration time is user specified. Longer integration times will degrade noise performance. tline = ( 3* tφV ) + tφHS + ( 3100 * te ) + te Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 9 Revision No. 2 KAF-6303E Performance Specification Frame Timing tint tReadout 1 Frame = 2056 Lines φ V1 φ V2 Line 1 2 2055 2056 φ H1 φ H2 Line Timing Detail Pixel Timing Detail t φR 1 line t φV φV1 tφV φR φH1 φV2 te tφHS φH1 te 1 count φH2 Vpix φH2 Vout 3100 counts Vsat Vdark φR Vodc Vsub Line Content 1-10 11-16 16 - 3088 Photoactive Pixels 3089-3098 3099-3100 Dummy Pixels Vsat Vdark Vpix Vodc Vsub Saturated pixel video output signal Video output signal in no light situation, not zero due to Jdark Pixel video output signal level, more electrons =more negative* Video level offset with respect to vsub Analog Ground * See Image Aquisition section (page 4) Dark Reference Pixels Figure 5 - Timing Diagrams Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 10 Revision No. 2 KAF-6303E Performance Specification 4.1 Performance Specifications All values measured at 25°C, and nominal operating conditions. These parameters exclude defective pixels. Description Saturation Signal Vertical CCD capacity Horizontal CCD capacity Output Node capacity Red Quantum Efficiency (λ=650nm) Green Quantum Efficiency (λ=550nm) Blue Quantum Efficiency (λ=450nm) Symbol Min. Nom. Max. Units Nsat 85000 170000 190000 100000 200000 220000 120000 240000 240000 electrons / pixel 52 42 32 65 52 40 75 62 48 % % % 1 2 % 2 Rr Rg Rb Notes 1 Photoresponse Non-Linearity PRNL Photoresponse Non-Uniformity PRNU 1 3 % 3 Dark Signal Jdark 15 3.5 50 10 electrons / pixel / sec pA/cm2 4 6.3 15 74 7.5 50 Dark Signal Doubling Temperature Dark Signal Non-Uniformity Dynamic Range 5 DSNU DR 70 0.99997 o C electrons / pixel / sec dB 5 6 Charge Transfer Efficiency CTE Output Amplifier DC Offset Output Amplifier Bandwidth Vodc f-3dB 9.5 10.5 45 11.5 V Mhz 7 8 Vout/Ne~ Zout ne~ 9 175 10 200 15 11 250 20 uV/e~ Ohms electrons 9 Output Amplifier Sensitivity Output Amplifier output Impedance Noise Floor 0.99999 Notes: 1. 2. 3. 4. 5. 6. 7. 8. 9. For pixel binning applications, electron capacity up to 330000 can be achieved with modified CCD inputs. Each sensor may have to be optimized individually for these applications. Some performance parameters may be compromised to achieve the largest signals. Worst case deviation from straight line fit, between 1% and 90% of Vsat. One Sigma deviation of a 128x128 sample when CCD illuminated uniformly. Average of all pixels with no illumination at 25oC. Average dark signal of any of 12 x 8 blocks within the sensor. (each block is 128 x 128 pixels) o 20log (Nsat / ne~) at nominal operating frequency and 25 C. Video level offset with respect to ground Last output amplifier stage only. Assumes 10pF off-chip load.. o Output noise at 25 C, nominal operating frequency, and tint = 0. Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 11 Revision No. 2 KAF-6303E Performance Specification 4.2 Typical Performance Characteristics Spectral Response 0.7 0.6 Quantum Efficiency 0.5 0.4 0.3 0.2 0.1 0 400 500 600 700 800 900 1000 1100 Wavelength (nm) Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 12 Revision No. 2 KAF-6303E Performance Specification 4.3 Cosmetic Classification Defect tests performed at T=25oC Class C1 C2 C3 Point Defects Total ≤35 ≤45 ≤90 Cluster Defects Zone A ≤14 ≤22 ≤45 Total ≤5 ≤18 ≤36 Maximum Cluster Size Zone A ≤2 ≤9 ≤18 Column Defects Total 0 ≤5 ≤9 2 5 5 1,2048 Zone A 0 0 ≤4 3072,2048 1024,1536 2048,1536 Zone A Center 1024 x 1024 Pixels 2048,512 1024,512 1,1 3072,1 Point Defect Dark: A pixel which deviates by more than 6% from neighboring pixels when illuminated to 70% of saturation, OR Bright: A Pixel with dark current > 10,000 e/pixel/sec at 25°C. Cluster Defect A grouping of not more than “Maximum Cluster Size” defects Column Defect A grouping of >5 contiguous point defects along a single column, OR A column containing a pixel with dark current > 30,000e/pixel/sec, OR A column that does not meet the CTE specification for all exposures less than the specified Max sat. signal level and greater than 2 Ke, OR A pixel which loses more than 250 e under 2Ke illumination. Neighboring pixels The surrounding 128 x 128 pixels or ±64 columns/rows. Defect Separation Column and cluster defects are separated by no less than two (2) pixels in any direction (excluding single pixel defects). Defect Region Exclusion Defect region excludes the outer two (2) rows and columns at each side/end of the sensor. Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 13 Revision No. 2 KAF-6303E Performance Specification 5.1 Quality Assurance and Reliability 5.1.1 Quality Strategy: All devices will conform to the specifications stated in this document. This is accomplished through a combination of statistical process control and inspection at key points of the production process. 5.1.2 Replacement: All devices are warranted against failure in accordance with the terms of Terms of Sale. 5.1.3 Cleanliness: Devices are shipped free of contamination, scratches, etc. that would cause a visible defect. 5.1.4 ESD Precautions: Devices are shipped in a static-safe container and should only be handled at static-safe work stations. 5.1.5 Reliability: Information concerning the quality assurance and reliability testing procedures and results are available from the Image Sensor Solutions and can be supplied upon request. 5.1.6 Test Data Retention: Devices have an identifying number of traceable to a test data file. Test data is kept for a period of 2 years after date of shipment. 5.2 Ordering Information See Appendix 1 for available part numbers Address all inquiries and purchase orders to: Image Sensor Solutions Eastman Kodak Company Rochester, New York 14650-2010 Phone: (716) 722-4385 Fax: (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] Eastman Kodak reserves the right to change any information contained herein without notice. All information furnished by Eastman Kodak is believed to be accurate. WARNING: LIFE SUPPORT APPLICATIONS POLICY Kodak image sensors are not authorized for and should not be used within Life Support Systems without the specific written consent of the Eastman Kodak Company. Product warranty is limited to replacement of defective components and does not cover injury or property or other consequential damages. Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 14 Revision No. 2 KAF-6303E Performance Specification Revision Changes Revision Number 0 1 2 Description of Changes Original formal version. Added UV Enhancement class (Section 4.3). Removed Appendix 1 Available Part Numbers. Added Revision Changes. Revised Class 1 cosmetic specification. (Page 13) Removed UV Enhanced device. (Page 13) Revised ESD classification to Class 0 HBM. This is not a change to the device, simply defining more accurately using updated classifications. (Page 7) Eastman Kodak Company - Image Sensor Solutions - Rochester, NY 14650-2010 Phone (716) 722-4385 Fax (716) 477-4947 Web: www.kodak.com/go/imagers E-mail: [email protected] 15 Revision No. 2