ETC HA3-5221-5

HA-5221, HA-5222
S E M I C O N D U C T O R
100MHz, Single and Dual Low Noise,
Precision Operational Amplifiers
November 1996
Features
Description
• Gain Bandwidth Product . . . . . . . . . . . . . . . . . . 100MHz
The HA-5221/5222 are single and dual high performance
dielectrically isolated, op amps, featuring precision DC
characteristics while providing excellent AC characteristics.
Designed for audio, video, and other demanding applications,
noise (3.4nV/√Hz at 1kHz), total harmonic distortion
(<0.005%), and DC errors are kept to a minimum.
• Unity Gain Bandwidth . . . . . . . . . . . . . . . . . . . . . 25MHz
• Slew Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25V/µs
• Low Offset Voltage. . . . . . . . . . . . . . . . . . . . . . . . 0.3mV
• High Open Loop Gain . . . . . . . . . . . . . . . . . . . . . 128dB
• Channel Separation at 10kHz . . . . . . . . . . . . . . . 110dB
• Low Noise Voltage at 1kHz . . . . . . . . . . . . . . 3.4nV/√Hz
• High Output Current . . . . . . . . . . . . . . . . . . . . . . . 56mA
• Low Supply Current per Amplifier . . . . . . . . . . . . . 8mA
Applications
• Precision Test Systems
• Active Filtering
• Small Signal Video
The precision performance is shown by low offset voltage
(0.3mV), low bias currents (40nA), low offset currents
(15nA), and high open loop gain (128dB). The combination
of these excellent DC characteristics with the fast settling
time (0.4µs) make the HA-5221/5222 ideally suited for
precision signal conditioning.
The unique design of the HA-5221/5222 gives them
outstanding AC characteristics not normally associated with
precision op amps, high unity gain bandwidth (35MHz) and
high slew rate (25V/µs). Other key specifications include high
CMRR (95dB) and high PSRR (100dB). The combination of
these specifications will allow the HA-5221/5222 to be used in
RF signal conditioning as well as video amplifiers.
• RF Signal Conditioning
For MIL-STD-883C compliant product and Ceramic LCC packaging, consult the HA-5221/5222/883C data sheet. Harris
AnswerFAX (407-724-7800) Document #3716.
Pinouts
Ordering Information
• Accurate Signal Processing
HA-5221
(PDIP, CERDIP, SOIC)
TOP VIEW
HA-5221
(METAL CAN)
TOP VIEW
PART NUMBER
(BRAND)
+BAL
TEMP.
RANGE (oC)
PKG.
NO.
PACKAGE
HA2-5221-5
0 to 75
8 Pin Metal Can
T8.C
HA3-5221-5
0 to 75
8 Ld PDIP
E8.3
HA7-5221-5
0 to 75
8 Ld CERDIP
F8.3A
HA7-5221-9
-40 to 85
8 Ld CERDIP
F8.3A
HA9P5221-5
(H52215)
0 to 75
8 Ld SOIC
M8.15
HA3-5222-5
0 to 75
16 Ld PDIP
E16.3
HA7-5222-5
0 to 75
8 Ld CERDIP
F8.3A
HA7-5222-9
-40 to 85
8 Ld CERDIP
F8.3A
HA9P5222-5
0 to 75
16 Ld SOIC
M16.3
HA9P5222-9
-40 to 85
16 Ld SOIC
M16.3
8
-BAL 1
-IN
8 +BAL
+
+IN 3
V-
-BAL 1
7 V+
7 V+
2
6 OUT
5 NC
4
-IN
2
6 OUT
+
5 NC
+IN 3
4
V-
HA-5222 (PDIP, SOIC)
TOP VIEW
HA-5222 (CERDIP)
TOP VIEW
OUT1 1
16 V+
NC 2
15 NC
-IN1 3
14 NC
OUT 1 1
13 NC
-IN 1 2
12 OUT2
+IN 1 3
+IN1 4
+
V- 5
11 NC
NC 6
7 OUT 2
+
6 -IN 2
+
5 +IN 2
10 -IN2
NC 7
NC 8
V- 4
8 V+
+
9 +IN2
CAUTION: These devices are sensitive to electrostatic discharge. Users should follow proper IC Handling Procedures.
Copyright
© Harris Corporation 1996
3-506
File Number
2915.2
HA-5221, HA-5222
Absolute Maximum Ratings
Thermal Information
Supply Voltage Between V+ and V- Terminals . . . . . . . . . . . . . . 35V
Differential Input Voltage (Note 1). . . . . . . . . . . . . . . . . . . . . . . . . 5V
Output Current Short Circuit Duration . . . . . . . . . . . . . . . . Indefinite
Thermal Resistance (Typical, Note 2)
θJA (oC/W) θJC (oC/W)
Metal Can Package . . . . . . . . . . . . . . . . .
165
80
CERDIP Package (HA7-5221). . . . . . . . .
135
50
CERDIP Package (HA7-5222). . . . . . . . .
115
30
8 Ld PDIP Package . . . . . . . . . . . . . . . . .
92
N/A
8 Ld SOIC Package . . . . . . . . . . . . . . . . .
157
N/A
16 Ld PDIP Package . . . . . . . . . . . . . . . .
85
N/A
16 Ld SOIC Package . . . . . . . . . . . . . . . .
95
N/A
Maximum Junction Temperature (Hermetic Package) . . . . . . . . 175oC
Maximum Junction Temperature (Plastic Package) . . . . . . . . 150oC
Maximum Storage Temperature Range . . . . . . . . . -65oC to 150oC
Maximum Lead Temperature (Soldering 10s) . . . . . . . . . . . . . 300oC
(SOIC - Lead Tips Only)
Operating Conditions
Temperature Range
HA-5221/5222-9 . . . . . . . . . . . . . . . . . . . . . . . . . . -40oC to 85oC
HA-5221/5222-5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0oC to 75oC
CAUTION: Stresses above those listed in “Absolute Maximum Ratings” may cause permanent damage to the device. This is a stress only rating and operation
of the device at these or any other conditions above those indicated in the operational sections of this specification is not implied.
NOTES:
1. Input is protected by back-to-back zener diodes. See applications section.
2. θJA is measured with the component mounted on an evaluation PC board in free air.
Electrical Specifications
VSUPPLY = ±15V, Unless Otherwise Specified
HA-5221-9, HA-5222-9
HA-5221-5, HA-5222-5
TEMP.
(oC)
MIN
TYP
MAX
MIN
TYP
MAX
UNITS
25
-
0.30
0.75
-
0.30
0.75
mV
Full
-
0.35
1.5
-
0.35
1.5
mV
Average Offset Voltage Drift
Full
-
0.5
-
-
0.5
-
µV/oC
Input Bias Current
25
-
40
80
-
40
100
nA
Full
-
70
200
-
70
200
nA
25
-
15
50
-
15
100
nA
Full
-
30
150
-
30
150
nA
25
-
400
750
-
400
750
µV
Full
-
-
1500
-
-
1500
µV
Common Mode Range
25
±12
-
-
±12
-
-
V
Differential Input Resistance
25
-
70
-
-
70
-
kΩ
PARAMETER
TEST CONDITIONS
INPUT CHARACTERISTICS
Input Offset Voltage
Input Offset Current
Input Offset Voltage Match
Input Noise Voltage
f = 0.1Hz to 10Hz
25
-
0.25
-
-
0.25
-
µVP-P
Input Noise Voltage
f = 10Hz
25
-
6.2
10
-
6.2
10
nV/√Hz
Density (Notes 3, 12)
f = 100Hz
25
-
3.6
6
-
3.6
6
nV/√Hz
f = 1000Hz
25
-
3.4
4.0
-
3.4
4.0
nV/√Hz
Input Noise Current
f = 10Hz
25
-
4.7
8.0
-
4.7
8.0
pA/√Hz
Density (Notes 3, 12
f = 100Hz
25
-
1.8
2.8
-
1.8
2.8
pA/√Hz
f = 1000Hz
25
-
0.97
1.8
-
0.97
1.8
pA/√Hz
Note 4
25
-
<0.005
-
-
<0.005
-
%
THD+N
3-507
HA-5221, HA-5222
VSUPPLY = ±15V, Unless Otherwise Specified (Continued)
Electrical Specifications
HA-5221-9, HA-5222-9
PARAMETER
TEST CONDITIONS
HA-5221-5, HA-5222-5
TEMP.
(oC)
MIN
TYP
MAX
MIN
TYP
MAX
UNITS
25
106
128
-
106
128
-
dB
Full
100
120
-
100
120
-
dB
TRANSFER CHARACTERISTICS
Large Signal Voltage Gain
Note 5
CMRR
VCM = ±10V
Full
86
95
-
86
95
-
dB
Unity Gain Bandwidth
-3dB
25
-
35
-
-
35
-
MHz
Gain Bandwidth Product
1kHz to 400kHz
25
-
100
-
-
100
-
MHz
Full
1
-
-
1
-
-
V/V
RL = 333Ω
Full
±10
-
-
±10
-
-
V
RL = 1kΩ
25
±12
±12.5
-
±12
±12.5
-
V
RL = 1kΩ
Full
±11.5
±12.1
-
±11.5
±12.1
-
V
VOUT = ±10V
Full
±30
±56
-
±30
±56
-
mA
25
-
10
-
-
10
-
Ω
Minimum Stable Gain
OUTPUT CHARACTERISTICS
Output Voltage Swing
Output Current
Output Resistance
Full Power Bandwidth
Note 6
25
239
398
-
239
398
-
kHz
Channel Separation
Note 7
25
-
110
-
-
110
-
dB
TRANSIENT RESPONSE (Note 11)
Slew Rate
Notes 8, 12
Full
15
25
-
15
25
-
V/µs
Rise Time
Notes 9, 12
Full
-
13
20
-
13
20
ns
Overshoot
Notes 9, 12
Full
-
28
50
-
28
50
%
Settling Time (Note 10)
0.1%
25
-
0.4
-
-
0.4
-
µs
0.01%
25
-
1.5
-
-
1.5
-
µs
VS = ±10V to ±20V
Full
86
100
-
86
100
-
dB
Full
-
8
11
-
8
11
mA/Op Amp
POWER SUPPLY
PSRR
Supply Current
NOTES:
3. Refer to typical performance curve in data sheet.
4. AVCL = 10, fO = 1kHz, VO = 5VRMS, RL = 600Ω, 10Hz to 100kHz, Minimum resolution of test equipment is 0.005%.
5. VOUT = 0 to ±10V, RL = 1kΩ, CL = 50pF.
Slew Rate
6. Full Power Bandwidth is calculated by: FPBW = ---------------------------, V PEAK = 10V .
2πV PEAK
7. HA-5222 only, f = 10kHz, RL = 1kΩ, CL = 50pF.
8. VOUT = ±2.5V, RL = 1kΩ, CL = 50pF.
9. VOUT = ±100mV, RL = 1kΩ, CL = 50pF.
10. Settling time is specified for a 10V step and AV = -1.
11. See Test Circuits.
12. Guaranteed by characterization.
3-508
HA-5221, HA-5222
Test Circuits and Waveforms
VIN
+
VOUT
-
1kΩ
50pF
FIGURE 1. TRANSIENT RESPONSE TEST CIRCUIT
100mV
2.5V
VIN
0V
0V
-100mV
-2.5V
2.5V
100mV
VOUT
0V
0V
-100mV
-2.5V
VOUT = 2.5V
Vertical Scale = 2V/Div.,
Horizontal Scale = 200ns/Div.
VOUT = ±100mV
Vertical Scale = 100mV/Div.,
Horizontal Scale = 200ns/Div.
FIGURE 2. LARGE SIGNAL RESPONSE
FIGURE 3. SMALL SIGNAL RESPONSE
VSETTLE
5K
5K
2K
2K
VIN
+
VOUT
13. AV = -1.
14. Feedback and summing resistors must be matched (0.1%).
15. HP5082-2810 clipping diodes recommended.
16. Tektronix P6201 FET probe used at settling point.
FIGURE 4. SETTLING TIME TEST CIRCUIT
3-509
3-510
V-
C6
D1
R26
CC5
V+
R24
QN43
R25
R9
QN44
QN45
R23
QN57
+V
-V
QP28
QN58
QP15
QN46
QP29
R8
Schematic Diagram
QP49
QN50
QP54
R7
R27
QN33
QP13
QN27
QP48
QN47
QP51
-IN
QN2
QP24
QN25
R13
R21
D4
QP22
CC1
QN41
D5
QP21
+BAL
+IN
QN1
CC3
QP31
R1B
R1A
QP26
R19
QP23
R18
QN39
R3
QN5
QN3 D2
QN4
R17
QN38
QN55
R4
QN6
D3
QN37
R16
QN59
QP52
QP12
R12
-BAL
QN36
QN14
QP30
R2B
R2A
R15
QN35
CC7
CC4
R10
R14
QN32
QN8
QP7
QP16
QN34
R32
R11
QP62
QP9
R33
QN61
QP53
QP11
R35
OUT
R34
QN10
HA-5221, HA-5222
HA-5221, HA-5222
Application Information
Operation at Various Supply Voltages
Saturation Recovery
The HA-5221/5222 operates over a wide range of supply
voltages with little variation in performance. The supplies
may be varied from ±5V to ±15V. See typical performance
curves for variations in supply current, slew rate and output
voltage swing.
When an op amp is over driven, output devices can saturate
and sometimes take a long time to recover. By clamping the
input, output saturation can be avoided. If output saturation
can not be avoided, the maximum recovery time when overdriven into the positive rail is 10.6µs. When driven into the
negative rail the maximum recovery time is 3.8µs.
Offset Adjustment
The following diagram shows the offset voltage adjustment
configuration for the HA-5221. By moving the potentiometer
wiper towards pin 8 (+BAL), the op amps output voltage will
increase; towards pin 1 (-BAL) decreases the output voltage.
A 20kΩ trim pot will allow an offset voltage adjustment of
about 10mV.
Input Protection
The HA-5221/5222 has built in back-to-back protection
diodes which limit the maximum allowable differential input
voltage to approximately 5V. If the HA-5221/5222 will be
used in circuits where the maximum differential voltage may
be exceeded, then current limiting resistors must be used.
The input current should be limited to a maximum of 10mA.
+15V
RLIMIT
2
7
RP
1
8
2
PC Board Layout Guidelines
Capacitive Loading Considerations
When driving capacitive loads >80pF, a small resistor, 50Ω
to 100Ω, should be connected in series with the output and
inside the feedback loop.
Typical Performance Curves
When designing with the HA-5221 or the HA-5222, good
high frequency (RF) techniques should be used when building a PC board. Use of ground plane is recommended.
Power supply decoupling is very important. A 0.01µF to
0.1µF high quality ceramic capacitor at each power supply
pin with a 2.2µF to 10µF tantalum close by will provide excellent decoupling. Chip capacitors produce the best results
due to ease of placement next to the op amp and basically
no lead inductance. If leaded capacitors are used, the leads
should be kept as short as possible to minimize lead inductance.
VS = ±15V, TA = 25oC
12
RL = 1K, CL = 50pF
9
AV = +1, RL = 1K, CL = 50pF
GAIN
60
40
20
180
0
135
PHASE
90
45
0
100K
1M
10M
PHASE MARGIN (DEGREES)
GAIN (dB)
100
GAIN (dB)
120
10K
3
+
-15V
1K
VOUT
+
6
4
80
6
RLIMIT
6
3
GAIN
0
-3
-6
180
PHASE
90
45
10K
100M
FREQUENCY (Hz)
135
100K
1M
10M
0
100M
FREQUENCY (Hz)
FIGURE 5. OPEN LOOP GAIN AND PHASE vs FREQUENCY
FIGURE 6. CLOSED LOOP GAIN vs FREQUENCY
3-511
PHASE MARGIN (DEGREES)
3
∆VIN
HA-5221, HA-5222
AV = -1, RL = 1K, CL = 50pF
6
3
GAIN
0
180
PHASE
135
90
45
0
10K
1M
40
20
AV = -1000
RL = 1K, CL = 50pF
AV = -100
AV = -10
0
AV = -10
135
90
45
0
10K
100K
10M
1M
100M
FREQUENCY (Hz)
FIGURE 7. CLOSED LOOP GAIN vs FREQUENCY
FIGURE 8. VARIOUS CLOSED LOOP GAINS vs FREQUENCY
AV = +1, RL = 1K
AV = +1, RL = 1K
100
80
80
PSRR (dB)
100
60
40
20
0
-PSRR
60
40
20
+PSRR
0
10K
100K
1M
10M
100M
10K
100K
1M
10M
100M
FREQUENCY (Hz)
FREQUENCY (Hz)
FIGURE 9. CMRR vs FREQUENCY
FIGURE 10. PSRR vs FREQUENCY
20
300
RL = 1K
18
250
16
OFFSET VOLTAGE (µV)
OPEN LOOP GAIN (V/µV)
180
AV = -100
AV = -1000
100M
10M
60
FREQUENCY (Hz)
120
CMRR (dB)
100K
80
PHASE MARGIN (DEGREES)
9
CLOSED LOOP GAIN (dB)
VS = ±15V, TA = 25oC (Continued)
PHASE MARGIN (DEGREES)
GAIN (dB)
Typical Performance Curves
14
12
10
8
6
4
200
150
100
50
0
-50
2
0
-60
-40
-20
0
20
40
60
80
100
-100
-60
120
FIGURE 11. OPEN LOOP GAIN vs TEMPERATURE
-40
-20
0
20
40
60
80
TEMPERATURE (oC)
TEMPERATURE (oC)
FIGURE 12. OFFSET VOLTAGE vs TEMPERATURE
(4 REPRESENTATIVE UNITS)
3-512
100
120
HA-5221, HA-5222
Typical Performance Curves
VS = ±15V, TA = 25oC (Continued)
14
RL = 600Ω
PEAK OUTPUT VOLTAGE (V)
13.5
BIAS CURRENT (nA)
160
140
120
100
80
60
40
20
13
12.5
12
11.5
11
10.5
0
-20
-40
-60
10
-40
-20
0
20
40
60
80
100
-60
120
-40
-20
0
TEMPERATURE (oC)
20
40
60
80
100
120
TEMPERATURE (oC)
FIGURE 13. BIAS CURRENT vs TEMPERATURE
(4 REPRESENTATIVE UNITS)
FIGURE 14. OUTPUT VOLTAGE SWING vs TEMPERATURE
70
AV = +1, RL = 1K, CL = 50pF
1.05
OFFSET VOLTAGE CHANGE (µV)
SLEW RATE (NORMALIZED TO 1 AT 25oC)
1.1
1
0.95
0.9
0.85
0.8
-60
-40
-20
0
20
40
60
80
100
60
HA-5222
50
40
30
20
HA-5221
10
0
120
0
1
TEMPERATURE (oC)
2
3
4
5
TIME AFTER POWER UP (MINUTES)
FIGURE 15. SLEW RATE vs TEMPERATURE
FIGURE 16. OFFSET VOLTAGE WARM-UP DRIFT
(CERDIP PACKAGES)
AV = +1, RL = 2K, CL = 50pF
34
32
+SLEW RATE
30
8.25
SLEW RATE (V/µs)
SUPPLY CURRENT PER AMPLIFIER (mA)
36
8.5
8
28
26
24
-SLEW RATE
22
20
18
16
7.75
14
12
7.5
10
5
7
9
11
13
15
17
5
SUPPLY VOLTAGE (±V)
7
9
11
13
15
SUPPLY VOLTAGE (±V)
FIGURE 17. SUPPLY CURRENT vs SUPPLY VOLTAGE
FIGURE 18. SLEW RATE vs SUPPLY VOLTAGE
3-513
17
HA-5221, HA-5222
Typical Performance Curves
VS = ±15V, TA = 25oC (Continued)
15
10
5
16
24
14
21
12
18
10
15
8
12
6
9
4
VOLTAGE NOISE
2
CURRENT NOISE 3
0
1K
10K
0
0
5
7
9
11
13
SUPPLY VOLTAGE (±V)
15
1
17
10
FREQUENCY (Hz)
FIGURE 20. NOISE CHARACTERISTICS
CMRR AND PSRR (dB)
OFFSET CURRENT (nA)
FIGURE 19. OUTPUT VOLTAGE SWING vs SUPPLY VOLTAGE
100
90
80
70
60
50
40
30
20
10
0
-10
-20
-30
-40
-50
-60
-70
-80
-90
-100
-60
-40
-20
0
20
40
60
80
100
120
115
114
113
112
111
110
109
108
107
106
105
104
103
102
101
100
99
98
97
96
95
-60
+PSRR
-PSRR
CMRR
-40
-20
TEMPERATURE (oC)
60
80
100
120
40
100
35
80
BANDWIDTH
30
60
25
40
20
20
15
OUTPUT CURRENT (mA)
AV = +1, RL = 1K
PHASE MARGIN (DEGREE)
BANDWIDTH (MHz)
40
130
120
100
110
90
70
50
0
10
20
FIGURE 22. CMRR AND PSRR vs TEMPERATURE
45
1
0
TEMPERATURE (oC)
FIGURE 21. OFFSET CURRENT vs TEMPERATURE
(4 REPRESENTATIVE UNITS)
PHASE MARGIN
100
6
CURRENT NOISE (pA/√Hz)
RL = 600Ω
VOLTAGE NOISE (nV/√Hz)
PEAK OUTPUT VOLTAGE SWING (V)
20
1000
0
1
2
3
4
TIME AFTER SHORT CIRCUIT (MINUTES)
LOAD CAPACITANCE (pF)
FIGURE 23. BANDWIDTH AND PHASE MARGIN vs LOAD
CAPACITANCE
FIGURE 24. SHORT CIRCUIT OUTPUT CURRENT vs TIME
3-514
5
HA-5221, HA-5222
Typical Performance Curves
VS = ±15V, TA = 25oC (Continued)
Vertical Scale = 1mV/Div.; Horizontal Scale = 1s/Div.
AV = +25,000; EN = 0.168µVP-P RTI
Vertical Scale = 10mV/Div.; Horizontal Scale = 1s/Div.
AV = +25,000; EN = 1.5µVP-P RTI
FIGURE 25. 0.1Hz TO 10Hz NOISE
18
18
AV = +1, RL = 1K, CL = 15pF, THD ≤ 0.01%
VS = ±18
14
12
VS = ±15
10
8
6
VS = ±10
4
2
AV = +1, THD ≤ 0.01%, f = 1kHz
14
VS = ±15
12
10
VS = ±10
8
6
4
VS = ±5
VS = ±5
2
0
10K
100K
1M
0
10
10M
100
1K
10K
LOAD RESISTANCE (Ω)
FREQUENCY (Hz)
FIGURE 27. OUTPUT VOLTAGE SWING vs FREQUENCY
FIGURE 28. OUTPUT VOLTAGE SWING vs LOAD RESISTANCE
10
100K
9.5
CHANNEL SEPARATION (dB)
SUPPLY CURRENT PER AMPLIFIER (mA)
VS = ±18
16
PEAK OUTPUT VOLTAGE (V)
PEAK OUTPUT VOLTAGE (V)
16
FIGURE 26. 0.1Hz TO 1MHz
9
8.5
8
7.5
7
6.5
1K
+
20
0
-20
-40
-60
100K
1K
VO1
+
1K
1K
VO2
1K
1K
 VO 2 
C.S. = 20 LOG  -------------------- 
 100VO 1 
-80
-100
-120
6
-60
-40
-20
0
20
40
60
80
100
10K
120
TEMPERATURE (oC)
100K
1M
10M
FREQUENCY (Hz)
FIGURE 29. SUPPLY CURRENT/AMPLIFIER vs TEMPERATURE
FIGURE 30. CHANNEL SEPARATION vs FREQUENCY
(HA-5222 ONLY)
3-515
100M
HA-5221, HA-5222
Die Characteristics
DIE DIMENSIONS:
SUBSTRATE POTENTIAL (Powered Up):
72 mils x 94 mils x 19 mils
1840µm x 2400µm x 483µm
VTRANSISTOR COUNT:
METALLIZATION:
62
Type: Al, 1% Cu
Thickness: 16kÅ ±2kÅ
PROCESS:
Bipolar Dielectric Isolation
PASSIVATION:
Type: Nitride (Si3N4) over Silox (SiO2, 5% Phos.)
Silox Thickness: 12kÅ ±2kÅ
Nitride Thickness: 3.5kÅ ±1.5kÅ
Metallization Mask Layout
HA-5221
V-
+IN
-IN
-BAL
+BAL
OUT
V+
3-516
HA-5221, HA-5222
Die Characteristics
DIE DIMENSIONS:
SUBSTRATE POTENTIAL (Powered Up):
78 mils x 185 mils x 19 mils
1980µm x 4690µm x 483µm
VTRANSISTOR COUNT:
METALLIZATION:
128
Type: Al, 1% Cu
Thickness: 16kÅ ±2kÅ
PROCESS:
Bipolar Dielectric Isolation
PASSIVATION:
Type: Nitride (Si3N4) over Silox (SiO2 5% Phos.)
Silox Thickness: 12kÅ ±2kÅ
Nitride Thickness: 3.5kÅ ±1.5kÅ
Metallization Mask Layout
HA-5222
OUT1
V+
-IN1
+IN1
VOUT2
-IN2
+IN2
3-517