19-3247; Rev 1; 2/05 Dual Per-Pin Parametric Measurement Units The MAX9951/MAX9952 dual parametric measurement units (PMUs) feature a small package size, wide force and measurement range, and high accuracy, making the devices ideal for automatic test equipment (ATE) and other instrumentation that requires a PMU per pin or per site. The MAX9951/MAX9952 force or measure voltages in the -2V to +7V through -7V to +13V ranges, dependent upon the supply voltage (VCC and VEE). The devices handle supply voltages of up to +30V (VCC to VEE) and a 20V device-under-test (DUT) voltage swing at full current. The MAX9951/MAX9952 also force or measure currents up to ±64mA with a lowest full-scale range of ±2µA. Integrated support circuitry facilitates use of an external buffer amplifier for current ranges greater than ±64mA. A voltage proportional to the measured output voltage or current is provided at the MSR_ output. Integrated comparators, with externally set voltage thresholds, provide detection for both voltage and current levels. The MSR_ and comparator outputs can be placed in a high-impedance state. Separate FORCE and SENSE connections are short-circuit protected for voltages from (VEE - 0.3V) to (VCC + 0.3V). The FORCE output also features a low-leakage, high-impedance state. Integrated voltage clamps limit the force output to levels set externally. The force-current or the measure-current voltage can be offset -0.2V to +4.4V (IOS). This feature allows for the centering of the control or measured signal within the external DAC or ADC range. The MAX9951D/MAX9952D feature an integrated 10kΩ force-sense resistor between FORCE_ and SENSE_. The MAX9951F/MAX9952F have no internal force-sense resistor. These devices are available in a 64-pin, 10mm x 10mm, 0.5mm pitch TQFP package with an exposed 8mm x 8mm die pad on the top (MAX9951) or the bottom (MAX9952) of the package for efficient heat removal. The exposed pad is internally connected to VEE. The MAX9951/MAX9952 are specified over the commercial 0°C to +70°C temperature range. Features ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ ♦ Force Voltage/Measure Current (FVMI) Force Current/Measure Voltage (FIMV) Force Voltage/Measure Voltage (FVMV) Force Current/Measure Current (FIMI) Force Nothing/Measure Voltage (FNMV) Force Nothing/Measure Current (FNMI, Range E Only) Termination/Measure Current Termination/Measure Voltage Five Programmable Current Ranges ±2µA ±20µA ±200µA ±2mA ±64mA -2V to +7V Through -7V to +13V Input-Voltage Range Force-Current/Measure-Current AdjustableVoltage Offset (IOS) Programmable Voltage Clamps at Force Output Low-Leakage, High-Impedance Measure, and Force States 3-Wire Serial Interface Low 6mA (max) Quiescent Current per PMU Ordering Information PART TEMP RANGE PIN-PACKAGE MAX9951DCCB 0°C to +70°C 64 TQFP-EPR MAX9951FCCB* 0°C to +70°C 64 TQFP-EPR MAX9952DCCB 0°C to +70°C 64 TQFP-EP MAX9952FCCB* 0°C to +70°C 64 TQFP-EP *Future product—contact factory for availability. Applications Selector Guide Memory Testers VLSI Testers System-on-a-Chip Testers Structural Testers PART MAX9951DCCB DESCRIPTION Internal 10kΩ force-sense resistor MAX9951FCCB External force-sense resistor MAX9952DCCB Internal 10kΩ force-sense resistor MAX9952FCCB External force-sense resistor Pin Configurations appear at end of data sheet. ________________________________________________________________ Maxim Integrated Products For pricing, delivery, and ordering information, please contact Maxim/Dallas Direct! at 1-888-629-4642, or visit Maxim’s website at www.maxim-ic.com. 1 MAX9951/MAX9952 General Description MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units ABSOLUTE MAXIMUM RATINGS VCC to AGND .......................................................................+20V VEE to AGND.........................................................................-15V VCC to VEE ...........................................................................+32V VL to AGND............................................................................+6V AGND to DGND.....................................................-0.5V to +0.5V Digital Inputs/Outputs ..................................-0.3V to (VL + 0.3V) All Other Pins to AGND ....................(VEE - 0.3V) to (VCC + 0.3V) Continuous Power Dissipation (TA = +70°C) MAX9951_CCB (derate 43.5mW/°C above +70°C) .....3478mW MAX9952_CCB (derate 125mW/°C above +70°C) ...10,000mW θJA MAX9951_CCB .........................................................+8°C/W θJC MAX9951_CCB .........................................................+2°C/W θJA MAX9952_CCB .......................................................+23°C/W θJC MAX9952_CCB .........................................................+8°C/W Junction Temperature ......................................................+150°C Storage Temperature Range .............................-65°C to +150°C Operating Temperature Range (commercial) ........0°C to +70°C Lead Temperature (soldering 10s) ..................................+300°C Stresses beyond those listed under “Absolute Maximum Ratings” may cause permanent damage to the device. These are stress ratings only, and functional operation of the device at these or any other conditions beyond those indicated in the operational sections of the specifications is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. DC ELECTRICAL CHARACTERISTICS (VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25°C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25°C, unless otherwise noted.) (Note 1) PARAMETER SYMBOL CONDITIONS MIN TYP MAX UNITS VCC - 2.5 V FORCE VOLTAGE Force Input Voltage Range VIN0_, VIN1_ Forced Voltage VDUT VEE + 2.5 DUT current at full scale VCC = +12V, VEE = -7V -2 +7 VCC = +18V, VEE = -12V -7 +13 DUT current = 0 VEE + 2.5 Input Bias Current Forced-Voltage Offset -25 Forced-Voltage-Offset Temperature Coefficient Forced-Voltage Gain Error µA +25 ±100 VFGE Nominal gain of +1 -1 Forced-Voltage-Gain Temperature Coefficient Forced-Voltage Linearity Error VCC - 2.5 ±1 VFOS 0.005 Gain and offset errors calibrated out (Notes 2, 3) IMOS (Note 2) mV µV/°C +1 ±10 VFLER V % ppm/°C -0.02 +0.02 %FSR -1 +1 %FSR MEASURE CURRENT Measure-Current Offset Measure-Current-Offset Temperature Coefficient Measure-Current Gain Error ±20 IMGE (Note 4) -1 Measure-Current-Gain Temperature Coefficient Linearity Error 2 ppm/°C +1 ±20 IMLER Gain and offset errors calibrated out (Notes 2, 3, 5) -0.02 _______________________________________________________________________________________ % ppm/°C +0.02 %FSR Dual Per-Pin Parametric Measurement Units (VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25°C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25°C, unless otherwise noted.) (Note 1) PARAMETER SYMBOL Measure-Output-Voltage Range Over Full-Current Range VMSR Current-Sense Amp Offset-Voltage Input VIOS Rejection of OutputMeasure Error Due to Common-Mode Sense Voltage CONDITIONS MIN MAX UNITS VIOS_ = VDUTGND -4 +4 VIOS_ = 4V + VDUTGND 0 +8 -0.2 +4.4 V +0.007 %FSR/V V Relative to VDUTGND CMVRLER (Notes 4 and 6) Measure-Current Range TYP +0.001 Range E, R_E = 500kΩ -2 +2 Range D, R_D = 50kΩ -20 +20 Range C, R_C = 5kΩ -200 +200 Range B, R_B = 500Ω -2 +2 Range A, R_A = 15.6Ω -64 +64 µA mA FORCE CURRENT Input Voltage Range for Setting Forced Current Over Full Range VIN0_, VIN1_ VIOS_ = VDUTGND -4 +4 VIOS_ = 4V + VDUTGND 0 +8 Current-Sense Amp Offset-Voltage Input VIOS Relative to VDUTGND -0.2 +4.4 V +1 %FSR V IOS_ Input Bias Current ±1 Forced-Current Offset (Note 2) -1 Forced-Current-Offset Temperature Coefficient ±20 Forced-Current Gain Error (Note 4) -1 Forced-Current-Gain Temperature Coefficient Forced-Current Linearity Error Rejection of Output Error Due to Common-Mode Load Voltage ppm/°C +1 ±20 IFLER Gain and offset errors calibrated out (Notes 2, 3, 5) -0.02 CMRIOER (Notes 4 and 6) Range E, R_E = 500kΩ Forced-Current Range µA +0.001 -2 % ppm/°C +0.02 %FSR +0.007 %FSR/V +2 Range D, R_D = 50kΩ -20 +20 Range C, R_C = 5kΩ -200 +200 Range B, R_B = 500Ω -2 +2 Range A, R_A = 15.6Ω -64 +64 µA mA _______________________________________________________________________________________ 3 MAX9951/MAX9952 DC ELECTRICAL CHARACTERISTICS (continued) MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units DC ELECTRICAL CHARACTERISTICS (continued) (VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25°C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25°C, unless otherwise noted.) (Note 1) PARAMETER SYMBOL CONDITIONS MIN TYP MAX UNITS +25 mV MEASURE VOLTAGE Measure-Voltage-Offset VMOS -25 Measure-Voltage-Offset Temperature Coefficient Gain Error ±100 VMGER Nominal gain of +1 -1 Measure-Voltage-Gain Temperature Coefficient Measure-Voltage Linearity Error Measure-Output-Voltage Range Over Full DUT Voltage ±0.005 µV/°C +1 ±10 VMLER VMSR Gain and offset errors calibrated out (Notes 2, 3, 5) DUT current at full scale VCC = +12V, VEE = -7V VCC = +18V, VEE = -12V ppm/°C -0.02 +0.02 -2 +7 -7 +13 VEE + 2.5 VCC - 2.5 -1 +1 ILIM- -92 -65 ILIM+ +65 +92 DUT current = 0 % %FSR V FORCE OUTPUT Off-State Leakage Current Short-Circuit Current Limit Force-to-Sense Resistor RFS D option only 8 10 12 nA mA kΩ SENSE INPUT Input Voltage Range Leakage Current F option only VEE + 2.5 VCC - 2.5 V -1 +1 nA VEE + 2.5 VCC - 2.5 V -25 +25 mV COMPARATOR INPUTS Input Voltage Range Offset Voltage Input Bias Current ±1 µA VOLTAGE CLAMPS Input Control Voltage VCLLO_, VCLHI_ Clamp Voltage Accuracy (Note 7) VEE + 2.4 VCC - 2.4 V -100 +100 mV DIGITAL INPUTS Input High Voltage (Note 8) Input Low Voltage (Note 8) VIH VIL VL = 5V +3.5 VL = 3.3V +2.0 VL = 2.5V +1.7 V VL = 5V or 3.3V +0.8 VL = 2.5V +0.7 V Input Current IIN ±1 µA Input Capacitance CIN 3.0 pF 4 _______________________________________________________________________________________ Dual Per-Pin Parametric Measurement Units (VCC = +12V, VEE = -7V, VL = +3.3V, TA = +25°C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25°C, unless otherwise noted.) (Note 1) PARAMETER SYMBOL CONDITIONS MIN TYP MAX UNITS COMPARATOR OUTPUTS Output High Voltage VOH VL = +2.375V to +5.5V, RPUP = 1kΩ Output Low Voltage VOL VL = +2.375V to +5.5V, RPUP = 1kΩ VL - 0.2 V +0.4 V High-Impedance-State Leakage Current ±1 µA High-Impedance-State Output Capacitance 6.0 pF DIGITAL OUTPUTS Output High Voltage VOH IOUT = 1mA, VL = +2.375V to +5.5V, relative to DGND Output Low Voltage VOL IOUT = -1mA, VL = +2.375V to +5.5V, relative to DGND Positive Supply VCC (Note 1) +10 +12 +18 V Negative Supply VEE (Note 1) -15 -7 -5 V +30 V VL - 0.25 V +0.2 V POWER SUPPLY Total Supply Voltage VCC - VEE (Note 9) Logic Supply VL +5.5 V Positive Supply Current ICC No load, clamps enabled 10.0 mA Negative Supply Current IEE No load, clamps enabled 10.0 mA IL No load, all digital inputs at rails 1.2 mA Logic Supply Current +2.375 Analog Ground Current IAGND No load, clamps enabled 0.9 mA Digital Ground Current IDGND No load, all digital inputs at rails 1.4 mA Power-Supply Rejection Ratio PSRR 1MHz, measured at force output 20 60Hz, measured at force output 85 dB _______________________________________________________________________________________ 5 MAX9951/MAX9952 DC ELECTRICAL CHARACTERISTICS (continued) MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units AC ELECTRICAL CHARACTERISTICS (VCC = +12V, VEE = -7V, VL = +3.3V, CCM = 120pF, CL = 100pF, TA = +25°C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25°C, unless otherwise noted.) (Note 1) PARAMETER SYMBOL CONDITIONS MIN TYP MAX UNITS 30 µs 55 µs FORCE VOLTAGE (Notes 10, 11) Settling Time Range E, R_E = 500kΩ 150 Range D, R_D = 50kΩ 50 Range C, R_C = 5kΩ 20 Range B, R_B = 500Ω 20 Range A, R_A = 15.6Ω 25 FORCE VOLTAGE/MEASURE CURRENT (Notes 10, 11) Settling Time Range Change Switching Range E, R_E = 500kΩ 500 Range D, R_D = 50kΩ 100 Range C, R_C = 5kΩ 30 Range B, R_B = 500Ω 25 Range A, R_A = 15.6Ω 25 In addition to force-voltage and measure-current settling times, range A to range B, R_A = 15.6Ω, R_B = 500Ω 12 µs FORCE CURRENT/MEASURE VOLTAGE (Notes 10, 11) Settling Time Range Change Switching Range E, R_E = 500kΩ 2500 Range D, R_D = 50kΩ 350 Range C, R_C = 5kΩ 30 60 µs Range B, R_B = 500Ω 25 Range A, R_A = 15.6Ω 25 In addition to force-current and measure-voltage settling times, range A to range B, R_A = 15.6Ω, R_B = 500Ω 12 µs 0.2 µs SENSE INPUT TO MEASURE OUTPUT PATH Propagation Delay CLMSR = 100pF MEASURE OUTPUT Maximum Stable Load Capacitance 1000 pF COMPARATORS (CLCOMP = 20pF, RPUP = 1kΩ) 50mV overdrive, 1VP-P, measured from inputthreshold zero crossing to 50% of output voltage (Note 12) 75 Rise Time 20% to 80% 60 ns Fall Time 80% to 20% 5 ns Propagation Delay ns SERIAL PORT (VL = +3.3V, CDOUT = 10pF) Serial Clock Frequency fSCLK SCLK Pulse-Width High tCH 12 ns SCLK Pulse-Width Low tCL 12 ns 6 (Note 13) 20 _______________________________________________________________________________________ MHz Dual Per-Pin Parametric Measurement Units (VCC = +12V, VEE = -7V, VL = +3.3V, CCM = 120pF, CL = 100pF, TA = +25°C, unless otherwise noted. Specifications at TA = TMIN and TA = TMAX are guaranteed by design and characterization. Typical values are at TA = +25°C, unless otherwise noted.) (Note 1) PARAMETER SYMBOL SCLK Fall to DOUT Valid tDO CONDITIONS MIN TYP MAX UNITS 22 ns CS Low to SCLK High Setup tCSS0 10 ns SCLK High to CS High Hold tCSH1 22 ns SCLK High to CS Low Hold tCSH0 0 ns CS High to SCLK High Setup tCSS1 5 ns tDS 10 ns DIN to SCLK High Setup DIN to SCLK High Hold 0 ns CS Pulse-Width High tCSWH 10 ns CS Pulse-Width Low tCSWL 10 ns LOAD Pulse-Width Low tLDW 20 ns VDD High to CS Low (Power-Up) tDH (Note 12) (Note 12) 500 ns Note 1: The device operates properly with different supply voltages with equally different voltage swings. Note 2: Interpret errors expressed in terms of %FSR (percent of full-scale range) as a percentage of the end-point-to-end-point range, i.e., for the ±64mA range, the full-scale range = 128mA, and a 1% error = 1.28mA. Note 3: Case must be maintained ±5°C for linearity specifications. Note 4: Tested in range C. Note 5: Current linearity specifications are maintained to within 700mV of the clamp voltages when the clamps are enabled. Note 6: Specified as the percent of full-scale range change at the output per volt change in the DUT voltage. Note 7: VCLLO_ and VCLHI_ should differ by at least 700mV. Note 8: The digital interface accepts +5V, +3.3V, and +2.5V CMOS logic levels. The voltage at VL adjusts the threshold. Note 9: Guaranteed by design. Note 10: Settling times are to 0.1% of FSR. Cx_ = 60pF. Note 11: All settling times are specified using a single compensation capacitor (Cx_) across all current-sense resistors. Use an individual capacitor across each sense resistor for better performance across all current ranges, particularly the lower ranges. Note 12: The propagation delay time is only guaranteed over the force-voltage output range. Propagation delay is measured by holding VSENSE_ steady and transitioning THMAX_ or THMIN_. Note 13: Maximum serial clock frequency may diminish at VL < +3.3V. _______________________________________________________________________________________ 7 MAX9951/MAX9952 AC ELECTRICAL CHARACTERISTICS (continued) Typical Operating Characteristics (VCC = +12V, VEE = -7V, CL = 100pF, CCM_ = 120pF, CCX_ = 60pF, RL to +2.5V, range A: R_A = 15.6Ω, RL = 70.3Ω; range B: R_B = 500Ω, RL = 2.25kΩ; range C: R_C = 5kΩ, RL = 22.5kΩ; range D: R_D = 50kΩ, RL = 225kΩ; range E: R_E = 500kΩ, RL = 2.25MΩ, TA = +25°C.) TRANSIENT RESPONSE FVMI MODE, RANGES A, B, C TRANSIENT RESPONSE FVMI MODE, RANGE D MAX9551 toc01 TRANSIENT RESPONSE FVMI MODE, RANGE E MAX9551 toc02 MAX9551 toc03 IN_ 5V/div IN_ 5V/div IN_ 5V/div 0 0 0 FORCE_ 5V/div FORCE_ 5V/div FORCE_ 5V/div 0 0 0 20µs/div 100µs/div 1ms/div TRANSIENT RESPONSE FVMV MODE, RANGE C TRANSIENT RESPONSE FIMI MODE, RANGES A, B, C TRANSIENT RESPONSE FIMI MODE, RANGE D MAX9551 toc04 MAX9551 toc05 MAX9551 toc06 IN_ 5V/div IN_ 5V/div IN_ 5V/div 0 0 0 FORCE_ 5V/div FORCE_ 5V/div FORCE_ 5V/div 0 0 0 20µs/div 20µs/div TRANSIENT RESPONSE FIMI MODE, RANGE E TRANSIENT RESPONSE FIMI MODE, RANGE C MAX9551 toc07 100µs/div IOS vs. POWER SUPPLIES MAX9551 toc08 IN_ 5V/div IN_ 5V/div 0 0 FORCE_ 5V/div FORCE_ 5V/div 0 0 MAX9951 toc09 20 VCC 15 VOLTAGE (V) MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units 11.2 10 4.4 5 0 3.2 IOS (MAX) IOS (MIN) -5 VEE -10 -15 2ms/div 8 1.8 -0.2 40µs/div _______________________________________________________________________________________ -7 Dual Per-Pin Parametric Measurement Units PIN MAX9951 MAX9952 NAME FUNCTION 1 48 SENSEA PMU-A Sense Input. A Kelvin connection to the DUT. Provides the feedback signal in FVMI mode and the measured signal in FIMV mode for PMU-A. 2 47 FORCEA PMU-A Driver Output. Forces a current or voltage to the DUT for PMU-A. 3 46 CCA PMU-A Compensation Capacitor Connection. Provides compensation for the PMU-A main amplifier. Connect a 120pF capacitor from CCA to CCOMA. 5, 15, 34, 44 5, 15, 34, 44 VEE Negative Analog-Supply Input 4, 14, 35, 45 4, 14, 35, 45 VCC Positive Analog-Supply Input 6 43 CCOMA Common Connection of CMA and CXA for PMU-A 7 42 RAAS PMU-A Range Setting Resistor-Sense Connection 8 41 RAA 9 40 RAB PMU-A Range B Setting Resistor Connection 10 39 RAC PMU-A Range C Setting Resistor Connection 11 38 RAD PMU-A Range D Setting Resistor Connection 12 37 RAE PMU-A Range E Setting Resistor Connection 13 36 RAX PMU-A Current-Range Sense-Resistor Connection. Connects to the external current range sense resistor for PMU-A. 16 33 EXTSELA 17 32 DUTLA PMU-A Window Comparator Lower Comparator Output. A high output indicates that the sensed voltage at the window comparator is above VTHMINA. DUTLA is an open-drain output. 18 31 DUTHA PMU-A Window Comparator Higher Comparator Output. A high output indicates that the sensed voltage at the window comparator is below VTHMAXA. DUTHA is an open-drain output. 19 30 HI-ZA INSELA PMU-A Range A Setting Resistor Connection PMU-A External Current-Range Selector. Selects the external current range for PMU-A. MSRA Tri-State Control Input. A logic-low places MSRA in a high-impedance state. Input Select PMU-A. INSELA is a logic input that selects between IN0A and IN1A. Force INSELA low to select IN0A. INSELA is NANDed with control register bit INMODEA. 20 29 21 28 TEMP Temperature Output. VTEMP = 10mV/°C. TDIE(°C) = (100)VTEMP - 273. 22 27 DGND Digital Ground 23 26 VL 24 25 DOUT 25 24 DIN 26 23 LOAD Logic-Supply Voltage Input. The voltage applied at VL sets the upper logic-voltage level. Serial-Data Output. A standard SPI™-compatible output. Data appears at DOUT MSB first. Serial-Data Input. Load data into DIN MSB first. Serial-Port Load Input. A logic-low asynchronously loads data from the input registers into the PMU registers. SPI is a trademark of Motorola, Inc. _______________________________________________________________________________________ 9 MAX9951/MAX9952 Pin Description MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units Pin Description (continued) PIN MAX9951 MAX9952 10 NAME FUNCTION 27 22 SCLK 28 21 CS Serial-Clock Input. SCLK accepts external clock frequencies up to 20MHz. 29 20 INSELB 30 19 HI-ZB 31 18 DUTHB PMU-B Window Comparator Higher Comparator Output. A high output indicates that the sensed voltage at the window comparator is below VTHMAXB. DUTHB is an open-drain output. 32 17 DUTLB PMU-B Window Comparator Lower Comparator Output. A high output indicates that the sensed voltage at the window comparator is above VTHMINB. DUTLB is an open-drain output. 33 16 EXTSELB 36 13 RBX PMU-B Current-Range Sense-Resistor Connection. Connects to the external current-range sense resistor for PMU-B. 37 12 RBE PMU-B Range E Setting Resistor Connection 38 11 RBD PMU-B Range D Setting Resistor Connection 39 10 RBC PMU-B Range C Setting Resistor Connection 40 9 RBB PMU-B Range B Setting Resistor Connection 41 8 RBA PMU-B Range A Setting Resistor Connection 42 7 RBAS 43 6 CCOMB 46 3 CCB 47 2 FORCEB PMU-B Driver Output. Forces a current or voltage to the DUT for PMU-B. 48 1 SENSEB PMU-B Sense Input. A Kelvin connection to the DUT. Provides the feedback signal in FVMI mode and the measured signal in FIMV mode for PMU-B. 49 64 THMAXB PMU-B Window Comparator Upper Threshold Voltage Input. Sets the upper voltage threshold for the PMU-B window comparator. 50 63 THMINB PMU-B Window Comparator Lower Threshold Voltage Input. Sets the lower voltage threshold for the PMU-B window comparator. 51 62 CLHIB PMU-B Upper-Clamp Voltage Input. Sets the upper-clamp voltage level. 52 61 CLLOB PMU-B Lower-Clamp Voltage Input. Sets the lower-clamp voltage level. 53 60 IN0B Force-Threshold Current Input for PMU-B. Sets the forced voltage in FV mode or the forced current in FI mode. 54 59 IN1B Force-Threshold Voltage Input for PMU-B. Sets the forced voltage in FV mode or the forced current in FI mode Chip-Select Input. Force CS low to enable the serial interface. Input Select PMU-B. INSELB is a logic input that selects between IN0B and IN1B. Force INSELB low to select IN0B. INSELB is NANDed with control register bit INMODEB. MSRB Tri-State Control Input. A logic-low places MSRB in a high-impedance state. PMU-B External Current-Range Selector. Selects the external current range for PMU-B. PMU-B Range A Setting Resistor-Sense Connection Common Connection of CMB and CXB for PMU-B PMU-B Compensation Capacitor Connection. Provides compensation for the PMU-B main amplifier. Connect a 120pF capacitor from CCB to CCOMB. ______________________________________________________________________________________ Dual Per-Pin Parametric Measurement Units PIN MAX9951 MAX9952 NAME FUNCTION 55 58 MSRB PMU-B Measurement Output. Provides a voltage equal to the SENSE voltage in FIMV mode, and provides a voltage proportional to the DUT current in FVMI mode for PMU-B. Force HI-ZB low to place MSRB in a high-impedance state. 56 57 AGND Analog Ground 57 56 IOS 58 55 MSRA PMU-A Measurement Output. Provides a voltage equal to the SENSE voltage in FIMV mode, and provides a voltage proportional to the DUT current in FVMI mode for PMU-A. Force HI-ZA low to place MSRA in a high-impedance state. 59 54 IN1A Force-Threshold Voltage Input for PMU-A. Sets the forced voltage in FV mode or the forced current in FI mode. 60 53 IN0A Force-Threshold Current Input for PMU-A. Sets the forced voltage in FV mode or the forced current in FI mode. 61 52 CLLOA PMU-A Lower-Clamp Voltage Input. Sets the lower-clamp voltage level. 62 51 CLHIA PMU-A Upper-Clamp Voltage Input. Sets the upper-clamp voltage level. 63 50 THMINA PMU-A Window Comparator Lower Threshold Voltage Input. Sets the lower voltage threshold for the PMU-A window comparator. 64 49 THMAXA PMU-A Window Comparator Upper Threshold Voltage Input. Sets the upper voltage threshold for the PMU-A window comparator. Offset-Voltage Input. Sets an offset voltage for the internal current-sense amplifiers of both channels. ______________________________________________________________________________________ 11 MAX9951/MAX9952 Pin Description (continued) Dual Per-Pin Parametric Measurement Units MAX9951/MAX9952 Functional Diagram TO EXTERNAL CURRENT BOOSTER FOR HIGHEST RANGE CX_ RE RD RC RB CM_ VEE VCC IN1_ IN0_ VL RA CC_ CCOM_ EXTSEL_ R_X R_E R_D R_C R_B R_A 1 0 RANGE RESISTOR SELECT FORCE_ INSEL_ 1.5MΩ DGND CLLO_ CLENABLE_ RS2_ RS1_ HI-ZFORCE_ INMODE_ RS0_ IOS 1 CLHI_ CS 0 SCLK SERIAL INTERFACE LOAD FMODE_ DIN MMODE_ 1.5MΩ HI-ZMEAS_ VL DISABLE_ DOUT RFS* 10 TO OTHER PMU CHANNEL 1 HI-Z_ MSR_ 0 SENSE_ THMAX_ DUTH_ MAX9951 MAX9952 DUTL_ THMIN_ AGND DGND *RFS INTERNAL TO MAX9951D/MAX9952D ONLY 12 ______________________________________________________________________________________ Dual Per-Pin Parametric Measurement Units Serial Interface The MAX9951/MAX9952 force or measure voltages in the -2V to +7V through -7V to +13V ranges, dependent upon the supply voltage range (VCC and VEE). These devices also force or measure currents up to ±64mA, with a lowest full-scale range of ±2µA. Use an external buffer amplifier for current ranges greater than ±64mA. MSR_ presents a voltage proportional to the measured voltage or current. Place MSR_ in a low-leakage, highimpedance state by forcing HI-Z_ low. Integrated comparators with externally programmable voltage thresholds provide “too low” (DUTL_) and “too high” (DUTH_) voltage-monitoring outputs. Each comparator output features a selectable high-impedance state. The devices feature separate FORCE_ and SENSE_ connections and are fully protected against short circuits. The FORCE_ output has two voltage clamps, negative (CLLO_) and positive (CLHI_), to limit the voltage to externally provided levels. Two control-voltage inputs, selected independently of the PMU mode, allow for greater flexibility. The MAX9951/MAX9952 use a standard 3-wire SPI/QSPI™/MICROWIRE™-compatible serial port. Once the input data register fills, the data becomes available at DOUT MSB first. This data output allows for daisy-chaining multiple devices. Figures 1, 2, and 3 show the serial interface timing diagrams. Serial Port Operation The serial interface has two ranks (Figure 4). Each PMU has an input register that loads from the serial port shift register. Each PMU also has a PMU register that loads from the input register. Data does not affect the PMU until it reaches the PMU register. This register configuration permits loading of the PMU data into the input register at one time and then latching the input register data into the PMU register later, at which time the PMU function changes accordingly. The register configuration also provides the ability to change the state of the PMU asynchronously, with respect to the loading of that PMU’s data into the serial port. Thus, the PMU easily updates simultaneously with other PMUs or other devices. CS INPUT REGISTER(S) UPDATED SCLK DIN DOUT ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; D0 D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; Q0 Q1 Q2 Q3 Q4 Q5 Q6 Q7 Q8 Q9 Q10 Q11 Q12 Q13 Q14 Q15 FIRST BIT FROM PREVIOUS WRITE LAST BIT FROM PREVIOUS WRITE LOAD PMU REGISTERS UPDATED Figure 1. Serial Port Timing with Asynchronous Load QSPI is a trademark of Motorola, Inc. MICROWIRE is a trademark of National Semiconductor Corp. ______________________________________________________________________________________ 13 MAX9951/MAX9952 Detailed Description MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units CS INPUT AND PMU REGISTER(S) UPDATED SCLK ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; DIN D0 DOUT D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; ;;;;; Q0 Q1 Q2 Q3 Q4 Q5 Q6 Q7 Q8 Q9 Q10 Q11 Q12 Q13 Q14 Q15 LAST BIT FROM PREVIOUS WRITE FIRST BIT FROM PREVIOUS WRITE LOAD LOAD = 0 Figure 2. Serial Port Timing with Synchronous Load tCH SCLK tCL tCSSO tCSS1 tCSH1 tCSHO CS tCSWH tDH tDS DIN DOUT D0 D0last D1 D1last D2 D3 D4 D5 D2last D3last D4last D5last D14 D14last D15 D15last tDO tLDW LOAD Figure 3. Detailed Serial Port Timing Diagram 14 ______________________________________________________________________________________ Dual Per-Pin Parametric Measurement Units CS SCLK DIN SHIFT REGISTER /16 4 CONTROL DECODE BIT NAME INMODE DOUT 12 INPUT REGISTER A INPUT REGISTER B 14 FMODE 13 MMODE 12 RS2 11 RS1 10 RS0 12 12 LOAD BIT 15 (MSB) PMU REGISTER A PMU REGISTER B 12 12 TO PMUA TO PMUB CLENABLE 8 HI-ZFORCE 7 HI-ZMSR 6 DISABLE 5 B2 4 B1 3 A2 2 A1 1 C2 0 (LSB) C1 Figure 4. Dual PMU Serial Port Block Diagram Use LOAD to asynchronously load all input registers into the PMU registers. If LOAD remains low when data latches into an input register, the data also transfers to the PMU register. 9 MAX9951/MAX9952 Table 1. Bit Order Table 2. Address Bit (BIT 3) A2 (BIT 2) A1 The MAX9951/MAX9952 use the bit order, MSB first in and first out, as shown in Table 1. 0 0 Do not update any input register (NOP). 0 1 Only update input register A. PMU Control 1 0 Only update input register B. 1 1 Update both input registers with the same data. Bit Order Programming both PMUs with the same data requires a 16-bit word. Programming each PMU with separate data requires two 16-bit words. The address bits specify which input registers the shiftregister loads. Table 2 describes the function of the address bits. Bits C1 and C2 specify how the data loads into the second rank PMU registers. These 2 control bits serve a similar function as the LOAD input. The specified actions occur when CS goes high, whereas the LOAD input loads the PMU register at anytime. When either C1 or C2 is low, the corresponding PMU register is transparent. Table 3 describes the function of the 2 control bits. The NOP operation requires A1 = A2 = C1 = C2 = 0. In this case, the data transfers through the shift register without changing the state of the device. OPERATION Table 3. Control Bit (BIT 1) C2 (BIT 0) C1 0 0 Data stays in input register. 0 1 Transfer PMU-A input register to PMU register. 1 0 Transfer PMU-B input register to PMU register. 1 1 Transfer both input registers to the PMU registers. OPERATION ______________________________________________________________________________________ 15 MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units C1 = C2 = 0 allows for data transfer from the shift register to the input register without transferring data to the PMU register (unless LOAD is low). This permits the latching of data into the PMU register at a later time by LOAD or subsequent command. Table 4 summarizes the possible control and address bit combinations. When asynchronously latching only one PMU’s data, the input register of the other PMU maintains the same data. Therefore, loading both PMU registers would update the one PMU with new data while the other PMU remains in its current state. Mode Selection Four bits from the control word select between the various force-measure modes of operation. INMODE selects between the two input analog control voltages. FMODE selects whether the PMU forces a voltage or a current. MMODE selects whether the DUT current or DUT voltage is directed to MSR_. HI-ZFORCE places the driver amplifier in a high-output-impedance state. Table 5 describes the various force and measure modes of operation. Table 4. PMU Operation Using Control and Address Bits BIT (3:2) 16 BIT (1:0) PMU-A OPERATION PMU-B OPERATION A2 A1 C2 C1 0 0 0 0 0 0 0 1 Transfer PMU register A from input register A. NOP. 0 0 1 0 NOP. Transfer PMU register B from input register B. 0 0 1 1 Transfer PMU register A from input register A. Transfer PMU register B from input register B. 0 1 0 0 Transfer input register A from shift register. NOP. 0 1 0 1 Transfer input register A and PMU register A from shift register. NOP. 0 1 1 0 Transfer input register A from shift register. Transfer PMU register B from input register B. 0 1 1 1 Transfer input register A and PMU register A from shift register. Transfer PMU register B from input register B. 1 0 0 0 NOP. Transfer input register B from shift register. 1 0 0 1 Transfer PMU register A from input register A. Transfer input register B from shift register. NOP: data just passes through 1 0 1 0 NOP. Transfer input register B and PMU register B from shift register. 1 0 1 1 Transfer PMU register A from input register A. Transfer input register B and PMU register B from shift register. 1 1 0 0 Transfer input register A from shift register. Transfer input register B from shift register. 1 1 0 1 Transfer input register A and PMU register A from shift register. Transfer input register B from shift register. 1 1 1 0 Transfer input register A from shift register. Transfer input register B and PMU register B from shift register. 1 1 1 1 Transfer input register A and PMU register A from shift register. Transfer input register B and PMU register B from shift register. ______________________________________________________________________________________ Dual Per-Pin Parametric Measurement Units (BIT 15) IN MODE* (BIT 14) F MODE (BIT 13) M MODE (BIT 8) HI-ZFORCE PMU MODE FORCE OUTPUT MEASURE OUTPUT ACTIVE INPUT 0 0 1 1 FVMI Voltage IDUT VIN0 1 0 1 1 FVMI Voltage IDUT VIN1 0 0 0 1 FVMV Voltage VDUT VIN0 1 0 0 1 FVMV Voltage VDUT VIN1 0 1 1 1 FIMI Current IDUT VIN0 1 1 1 1 FIMI Current IDUT VIN1 0 1 0 1 FIMV Current VDUT VIN0 1 1 0 1 FIMV Current VDUT VIN1 X 0 1 0 FNMI (range E only) HighImpedance IDUT X X 0 0 0 FNMV HighImpedance VDUT X 0 1 0 0 Termination Voltage VDUT VIN0 1 1 0 0 Termination Voltage VDUT VIN1 0 1 1 0 Termination Voltage IDUT VIN0 1 1 1 0 Termination Voltage IDUT VIN1 MAX9951/MAX9952 Table 5. PMU Force-Measure Mode Selection *INSEL = 0 Table 6. Current-Range Selection (BIT 12) (BIT 11) (BIT 10) RS2 RS1 RS0 Current-Range Selection RANGE NOMINAL RESISTOR VALUE (Ω) Three bits from the control word, RS0, RS1, and RS2, control the full-scale current range for either FI (force current) or MI (measure current). Table 6 describes the full-scale current-range control. 0 0 X ±2µA R_E = 500k Clamp Enable 0 1 0 ±20µA R_D = 50k 0 1 1 ±200µA R_C = 5k 1 0 0 ±2mA R_B = 500 1 X 1 ±64mA R_A = 15.6 The CLENABLE bit enables the force-output-voltage clamps when high and disables the clamps when low. There is hysteresis equal to approximately 5% of the current range for clamp. 1 1 0 External — Table 7. MSR_ Output Truth Table (BIT 7) HI-ZMSR HI-Z_ MSR_ 1 1 Measure output enabled 0 1 High-Impedance 1 0 High-Impedance 0 0 High-Impedance Measure Output High-Impedance Control MSR_ attains a low-leakage, high-impedance state by using the HI-ZMSR control bit, or the HI-Z_ input. HI-Z_ is internally pulled up to VL with a 1.5MΩ resistor. The 2 bits are logically ANDed together to control the MSR_ output. HI-Z_ allows external multiplexing among several PMU MSR_ outputs without using the serial interface. Table 7 explains the various output modes for the MSR_ output. Digital Output (DOUT) The digital output follows the last output of the serialshift register and clocks out on the falling edge of SCLK. DOUT serially shifts the first bit of the incoming serial data word 16.5 clock cycles later. This allows for daisy-chaining additional devices using DOUT and the same clock. ______________________________________________________________________________________ 17 MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units “Quick Load” Using Chip Select If CS goes low and then returns high without any clock activity, the data from the input registers latch into the PMU registers. This extra function is not standard for SPI/QSPI/MICROWIRE interfaces. The quick load mimics the function of LOAD without forcing LOAD low. Comparators Two comparators configured as a window comparator monitor MSR_. THMAX_ and THMIN_ set the high and low thresholds that determine the window. Both outputs are open drain and share a single disable control that places the outputs in a high-impedance, low-leakage state. Table 8 describes the comparator output states of the MAX9951/MAX9952. Applications Information In force-voltage (FV) mode, the voltage at FORCE_ is directly proportional to the input control voltage. In force-current (FI) mode, the current flowing out of FORCE_ is proportional to the input control voltage. Positive current flows out of the PMU. In force-nothing (FN) mode, FORCE_ is high impedance. In measure-current (MI) mode, the voltage at MSR_ is directly proportional to the current exiting FORCE_. Positive current flows out of the PMU. In measure-voltage (MV) mode, the voltage at MSR_ is directly proportional to the voltage at SENSE_. Current-Sense-Amplifier Offset-Voltage Input and convert the sensed DUT current to the MSR_ output voltage (MI). When IOS equals zero relative to DUTGND (the GND voltage at the DUT, which the levelsetting DACs and the ADC are presumed to use as a ground reference), the nominal voltage range that corresponds to ±full-scale current is -4V to +4V. Any voltage applied to IOS adds directly to this control input/measure output voltage range, i.e., applying +4V to IOS forces the voltage range that corresponds to ±full-scale current from 0 to +8V. The following equations determine the minimum and maximum currents for each current range corresponding to the input voltage or measure voltage: VMAXCURRENT = VIOS + 4V VMINCURRENT = VIOS - 4V Choose IOS so the limits of MSR_ do not go closer than 2.8V to either VEE or VCC. For example, with supplies of +10V and -5V, limit the MSR_ output to -2.2V and +7.2V. Therefore, set IOS between +1.8V and +3.2V. MSR_ could clip if IOS is not within this range. Use these general equations for the limits on IOS: Minimum VIOS = VEE + 6.8V Maximum VIOS = VCC - 6.8V Current Booster for Highest Current Range An external buffer amplifier can be used to provide a current range greater than the MAX9951/MAX9952 maximum ±64mA output current (Figure 5). This function operates as follows: IOS is a buffered input to the current-sense amplifiers. The current-sense amplifiers convert the input control voltage (IN0_ or IN1_) to the forced DUT current (FI), REXT RA Table 8. Comparator Truth Table RE (BIT 6) DISABLE CONDITION DUTH DUTL 0 X High-Z High-Z 1 VMSR > VTHMAX and VTHMIN 0 1 1 VTHMAX > VMSR > VTHMIN 1 1 1 VTHMAX and VTHMIN > VMSR 1 0 1 VTHMIN > VMSR > VTHMAX* 0 0 EXTSEL_ R_X CCOM_ VIN_ R_A R_E 50Ω FORCE_ MAIN AMP MAX9951 MAX9952 *VTHMAX > VTHMIN constitutes normal operation. This condition, however, has VTHMIN > VTHMAX and does not cause any problems with the operation of the comparators. CURRENT- x 4 SENSE AMP MSR_ SENSE_ PMU Figure 5. External Current Boost 18 ______________________________________________________________________________________ DUT Dual Per-Pin Parametric Measurement Units Voltage Clamps The voltage clamps limit FORCE_ and operate over the entire specified current range. Set the clamp voltages externally at CLHI_ and CLLO_. The voltage at FORCE_ triggers the clamps independent of the voltage at SENSE_. When enabled, the clamps function in FI mode only. Use clamp voltages of 0.7V above and below the FORCE_ voltage range to ensure proper operation of the PMU. Current Limit The FORCE_ current-limiting circuitry, 92mA (maximum), ensures a well-behaved MSR_ output for currents between the full current range and the current limits. For currents greater than the full-scale current, the MSR_ voltage is greater than +4V, and for currents less than the full-scale current, the MSR_ voltage is less than -4V. Additionally, serial interface bit B2 enables a range-sensitive current limit of 2.5 times the nominal current range. Table 9 shows the current-limit operation. Independent Control of the Feedback Switch and the Measure Switch Two single-pole-double-throw (SPDT) switches determine the mode of operation of the PMU. One switch determines whether the sensed DUT current or DUT voltage feeds back to the input, and thus determines whether the MAX9951/MAX9952 force current or voltage. The other switch determines whether MSR_ senses the DUT current or DUT voltage. Independent control of these switches and the HIZFORCE state permits flexible modes of operation beyond the traditional force-voltage/measure-current (FVMI) and force-current/measure-voltage (FIMV) modes. The MAX9951/MAX9952 support the following eight modes: • FVMI • FIMV • FVMV • FIMI • FNMV • FNMI (range E only) • Terminate/Measure V • Terminate/Measure I Figure 6 shows the internal path structure for force-voltage/measure-current mode. In force-voltage/measurecurrent mode, the current across the appropriate external sense resistor (R_A to R_E) provides a voltage at MSR_. SENSE_ samples the voltage at the DUT and feeds the buffered result back to the negative input of the voltage amplifier. The voltage at MSR_ is proportional to the FORCE_ current in accordance with the following formula: VMSR_ = IFORCE_ x RSENSE x 4 Figure 7 shows the internal path structure for the forcecurrent/measure-voltage mode. In force-current/measure-voltage mode, the appropriate external sense resistor (R_A to R_E) provides a feedback voltage to IN1_ RSENSE FORCE_ DUT Table 9. Current Limit AV = +4 FMODE RANGE B2 (BIT 5) X Any 0 65mA to 92mA 0 A 1 65mA to 92mA 0 B 1 5mA 0 C 1 500µA 0 D 1 50µA 0 E 1 5µA CURRENT LIMIT SENSE_ DUTGND MSR_ Figure 6. Force-Voltage/Measure-Current Functional Diagram ______________________________________________________________________________________ 19 MAX9951/MAX9952 A digital output decoded from the range select bits, EXTSEL_, indicates when to activate the booster. CCOM_ serves as an input to an external buffer through an internal 50Ω current-limit series resistor. Connect the external buffer output to the external current-sense resistor, REXT, and to R_X. Connect the other side of R_X to FORCE_. Ensure that the external switch is low leakage. MAX9951/MAX9952 Dual Per-Pin Parametric Measurement Units VDUT_ IN1_ RSENSE VCC - 2.5V FORCE_ VCC - 5V DUT AV = +4 IDUT_ SENSE_ DUTGND VEE + 5V MSR_ VEE + 2.5V IMIN Figure 7. Force-Current/Measure-Voltage Functional Diagram the inverting input of the voltage amplifier. SENSE_ samples the voltage at the DUT and provides a buffered result at MSR_. High-Impedance States The FORCE_, MSR_, and comparator outputs feature individual high-impedance control that places them into a high-impedance, low-leakage state. The high-impedance state allows busing of MSR_ and comparator outputs with other PMU measure and comparator outputs. The FORCE_ output high-impedance state allows for additional modes of operation as described in Table 5 and can eliminate the need for a series relay in some applications. The FORCE_, MSR_, and comparator outputs power up in the high-impedance state. Input Source Selection Either one of two input signals, IN0_ or IN1_, can control both the forced voltage and the forced current. In this case, the two input signals represent alternate forcing values that can be selected either with the serial interface or INSEL_. Alternatively, each input signal can be dedicated to control a single forcing function (i.e., voltage or current). Short-Circuit Protection FORCE_ and SENSE_ input can withstand a short to any voltage between the supply rails. 20 IMAX Figure 8. PMU Force-Output Capability Mode and Range Change Transients The MAX9951/MAX9952 feature make-before-break switching to minimize glitches. The integrated voltage clamps also reduce glitching at the output. DUT Voltage Swing vs. DUT Current and Power-Supply Voltages Several factors limit the actual DUT voltage that the PMU delivers: • The overhead required by the device amplifiers and other integrated circuitry; this is typically 2.5V from each rail independent of load. • The voltage drop across the current-range select resistor and internal circuitry in series with the sense resistor. At full current, the combined voltage drop is typically 2.5V. • Variations in the power supplies. • Variation of DUT ground vs. PMU ground. Neglecting the effects of the third and fourth items, Figure 8 demonstrates the force-output capabilities of the PMU. For zero DUT current, the DUT voltage swings from (VEE + 2.5V) to (VCC - 2.5V). For larger positive DUT currents, the positive swing drops off linearly until it reaches (VCC - 5V) at full current. Similarly, for larger negative DUT currents, the negative voltage swing drops off linearly until it reaches (VEE + 5V) at full current. ______________________________________________________________________________________ Dual Per-Pin Parametric Measurement Units Settling Times and Compensation Capacitors The data in the Electrical Characteristics table reflects the circuit shown in the Functional Diagram that includes a single compensation capacitor (CX_) effectively across all the sense resistors. Placing individual capacitors, CRA, CRB, CRC, CRD, and CRE directly across the sense resistors, R_A, R_B, R_C, R_D, and R_E, independently optimizes each range. The combination of the capacitance across the sense resistors, along with the main amplifier compensation comparator, CM_, ensures stability into the maximum expected load capacitance while optimizing settling time for a given load. Digital Inputs (SCLK, DIN, CS, and LOAD) The digital inputs incorporate hysteresis to mitigate issues with noise, as well as provide for compatibility with opto-isolators that can have slow edges. Temperature Monitor Each device supplies a single temperature output signal, TEMP, that asserts a nominal output voltage of 2.98V at a die temperature of +25°C (298K). The output voltage increases proportionately with temperature at a rate of 10mV/°C. The temperature sensor output impedance is 15kΩ (typ). Determine the die temperature using: TDIE = (100) x VTEMP - 273 [°C] Chip Information TRANSISTOR COUNT: 11,000 PROCESS: BiCMOS ______________________________________________________________________________________ 21 MAX9951/MAX9952 Ground, DUT Ground, and IOS The MAX9951/MAX9952 utilize two local grounds, AGND (analog ground) and DGND (digital ground). Connect AGND and DGND together on the PC board. In a typical ATE system, the PMU force voltage is relative to DUT ground. In this case, reference the input voltages IN0_ and IN1_ to DUT ground. Similarly, reference IOS to DUT ground. If it is not desired to offset the current control and measure voltages, connect IOS to DUT ground potential. Reference the MSR_ output to DUT ground. Dual Per-Pin Parametric Measurement Units THMINA CLHIA CLLOA IN0A IN1A MSRA IOS AGND MSRB IN1B IN0B CLLOB CLHIB THMINB THMAXB TOP VIEW THMAXA MAX9951/MAX9952 Pin Configurations 64 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 SENSEA 1 48 SENSEB FORCEA 2 47 FORCEB CCA 3 46 CCB VCC 4 45 VCC VEE 5 44 VEE CCOMA 6 43 CCOMB RAAS 7 42 RBAS RAA 8 RAB 41 RBA MAX9951 9 40 RBB RAC 10 39 RBC RAD 11 38 RBD RAE 12 37 RBE RAX 13 36 RBX VCC 14 35 VCC VEE 15 34 VEE 33 EXTSELB INSELA TEMP DGND VL 26 27 28 29 30 31 32 DUTLB HI-ZA 25 DUTHB DUTHA 24 HI-ZB 23 INSELB 22 CS 21 SCLK 20 LOAD 19 DIN 18 DOUT 17 DUTLA EXTSELA 16 TQFP-EPR 22 ______________________________________________________________________________________ Dual Per-Pin Parametric Measurement Units THMAXB THMINB CLHIB CLLOB IN0B IN1B MSRB AGND IOS MSRA IN1A IN0A CLLOA CLHIA THMINA THMAXA TOP VIEW 64 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 SENSEB 1 48 SENSEA FORCEB 2 47 FORCEA CCB 3 46 CCA VCC 4 45 VCC VEE 5 44 VEE CCOMB 6 43 CCOMA RBAS 7 42 RAAS RBA 8 RBB 41 RAA MAX9952 9 40 RAB RBC 10 39 RAC RBD 11 38 RAD RBE 12 37 RAE RBX 13 36 RAX VCC 14 35 VCC VEE 15 34 VEE 33 EXTSELA DUTHB HI-ZB INSELB CS SCLK LOAD DIN 25 26 27 28 29 30 31 32 DUTLA 24 DUTHA 23 HI-ZA 22 INSELA 21 TEMP 20 DGND 19 VL 18 DOUT 17 DUTLB EXTSELB 16 TQFP-EP Package Information For the latest package outline information, go to www.maxim-ic.com/packages. Maxim cannot assume responsibility for use of any circuitry other than circuitry entirely embodied in a Maxim product. No circuit patent licenses are implied. Maxim reserves the right to change the circuitry and specifications without notice at any time. Maxim Integrated Products, 120 San Gabriel Drive, Sunnyvale, CA 94086 408-737-7600 ____________________ 23 © 2005 Maxim Integrated Products Printed USA is a registered trademark of Maxim Integrated Products, Inc. MAX9951/MAX9952 Pin Configurations (continued)